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Formation and stability of AsH bonds in H-implanted GaAs

Stein, H.J.

The chemical bonding and isochronal annealing of H implanted into GaAs at 80 K has been investigated by infrared absorption measurements. Based upon the frequency shift when deuterium is substituted for H, and an equivalent band formation in InAs, assignment of a new band at 2029 cm-1 is made to AsH centers. Bonding of H at interstitial As of an As-vacancy pair which anneals between 150 and 250 K is suggested as the structure for the defect. A previously reported absorption band at 1834 cm-1 assigned to GaH centers in H-implanted GaAs increases in intensity when H is released from AsH centers. © 1991.