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ELLIPSE user's manual and program reference

Tardy, H.L.

A new program, ELLIPSE, for the analysis of ellipsometric data is described. The program is interactive and includes on-line help, performs explicit error analysis for single-angle-of-incidence measurements, allows the input of four-zone null data, and performs least-squares analysis of multiple-angle-of-incidence data. Solutions for the transparent-film-on-substrate model are obtained using decoupled equations for film thickness and index. No initial guess is required for thickness, and the algorithm is insensitive to the initial guess for film index. This document combines the user's manual and program description for ELLIPSE, and includes several examples of its use. 11 refs.