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DSMC Simulation of thermal transpiration and accomodation pumps

Hudson, M.L.

The Direct Simulation Monte Carlo (DSMC) technique is employed to evaluate several configurations of thermal transpiration and accommodation pumps. There is renewed interest in these rarefied flow pumping concepts for Micro-Electro-Mechanical Systems (MEMS) due to advances in micro-fabrication. The simulation results are compared with existing data to understand gas-surface interaction uncertainties in the experiments. Parametric studies are performed to determine the effects of Knudsen number and surface temperature and roughness on the maximum pump pressure ratio.