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Development of a multi-purpose, pulsed-laser system for solar cell processing applications

King, David L.

The capabilities of a versatile Nd:YAG pulsed-laser system developed at Sandia National Laboratories for solar cell processing applications is described. The results of statistically based, multifactor experiments used to characterize the influence of laser-system process variables on patterns produced in silicon wafers and silicon-oxide layers are presented, and an initial assessment of laser-grooved solar cell processing conditions is given.