Publications Details
Crystallographic phase identification in the scanning electron microscope: backscattered electron Kikuchi patterns
Demonstrated in this study is the phase identification through a combination of backscattered electron Kikuchi patterns (BEKP) and energy dispersive x-ray spectrometry (EDS) by the identification of crystals present on ruthenium oxide thin films on Si. The crystals were identified as RuO2, a tetragonal phase. The charge coupled device (CCD)-based detector is also briefly described. The ability of the CCD-based detector to collect high quality patterns without the use of photographic emulsions enables on-line analysis of the BEKP's.