Publications Details

Control of thin film processing behavior through precursor structural modifications

Schwartz, R.W.

In the sol-gel processing of ceramic thin films it has been frequently noted that the processing behavior, microstructure and properties of the films are dependent on the nature of the coating solution. In an attempt to understand such processing-property relationships, we have systematically investigated the effects of precursor nature on thin film densification and crystallization for ZrO2 and TiO2 thin films. Metal alkoxide starting compounds, e.g., zirconium (IV) n-butoxide n-butanol and titanium (IV) i-propoxide, were reacted with acetic acid and 2,4-pentanedione to prepare coating solutions for thin film deposition. The use of these ligands resulted in solution oligomeric species of different nature. Studies of thin film processing indicated that film processing characteristics, i.e., consolidation, densification and crystallization, were strongly dependent on solution precursor nature. Ligand steric size, pyrolysis behavior, extent of modification, and precursor reactivity were found to be key variables in controlling film processing.