Publications Details

Comparison of bulk- and surface-micromachined pressure sensors

Eaton, W.P.

Two piezoresistive micromachined pressure sensors were compared: a commercially available bulk-micromachined (BM) pressure sensor and an experimental surface-micromachined (SM) pressure sensor. While the SM parts had significantly smaller die sizes, they were outperformed in most areas by the BM parts. This was due primarily to the smaller piezoresistive gauge factor in the polysilicon piezoresistors in the SM parts compared to the single crystal strain gauge used in the BM parts.