Publications Details

Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films

Xu, Yejia; Schiltz, Drew; Emmert, Luke; Brown, Andrew; Talghader, Joseph; Kletecka, Damon E.; Field, Ella S.; Bellum, John C.; Patel, Dinesh; Menoni, Carmen; Rudolph, Wolfgang

Abstract not provided.