Publications Details
Chemically prepared Pb(Zr,Ti)O3 thin films: The effects of orientation and stress
The effects of orientation and stress on chemically prepared Pb(Zr,Ti)O3 (PZT) film properties have been determined. Systematic modification of the underlying substrate technology has made it possible to fabricate suites of films that have various degrees of orientation at a constant stress level, and to fabricate films that are in different states of stress but have similar orientation. Highly oriented films of the following compositions have been fabricated: PZT 60/40, PZT 40/60, and PZT 20/80. Remanent polarizations ( approximately=60 mu C/cm2) greater than those of the best bulk polycrystalline ferroelectrics were obtained for PZT 40/60 films that were under compression and highly.