Publications Details

Characterization of a surface micromachined pressure sensor array

Eaton, W.P.; Smith, J.H.

A surface micromachined pressure sensor array has been designed and fabricated. The sensors are based upon deformable, silicon nitride diaphragms with polysilicon piezoresistors. Absolute pressure is detected by virtue of reference pressure cavities underneath the diaphragms. For this type of sensor, design tradeoffs must be made among allowable diaphragm deflection, diaphragm size, and desirable pressure ranges. Several fabrication issues were observed and addressed. Offset voltage, sensitivity, and nonlinearity of 100 μm diameter sensors were measured.