Publications Details
Atomic processes in processing plasmas
The goal of this project is to gain an understanding of the fundamental mechanisms and processes occurring in low pressure, partially ionized plasmas and their interactions with materials. Emphasis is placed on: understanding the basic atomic and molecular physics that is occurring within the plasma bulk and sheath, understanding the relation of the collective plasma dynamics to the internal atomic processes, developing the ability to perform computer simulations of the plasmas as to both Collective dynamics and inclusion of atomic properties, and analyzing the response of the materials to the plasma and how the plasma might be tailored to obtain a given effect at the material surface.