Publications Details

Air-drag damping on micro-cantilever beams

Sumali, Hartono S.; Carne, Thomas G.

Damping in a micro-cantilever beam was measured for a very broad range of air pressures from atmosphere (10 5 Pa) down to 0.2 Pa. The beam was in open space free from squeeze films. The damping ratio, due mainly to air drag, varied by a factor of 10 4 within this pressure range. The damping due to air drag was separated from other sources of energy dissipation so that air damping could be measured at 10 -6 of critical damping factor. The linearity of the damping was confirmed over a wide range of beam vibration levels. Lastly, the measured damping was compared with several existing theories for air-drag damping for both rarified and viscous flow gas theories. The measured data indicate that, in the rarefied regime the air damping is proportional to pressure, independent of viscosity, and in the viscous regime the damping is determined by viscosity.