Publications Details

A 3-axis force balanced accelerometer using a single proof-mass

Lemkin, M.A.; Boser, B.E.; Auslander, D.; Smith, J.

This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer.