Publications Details
A 2-D Self-Consistent DSMC Model for Chemically Reacting Low Pressure Plasma Reactors
This paper will focus on the methodology of using a 2D plasma Direct Simulation Monte Carlo technique to simulate the species transport in an inductively coupled, low pressure, chemically reacting plasma system. The pressure in these systems is typically less than 20 mtorr with plasma densities of approximately 10{sup 17} {number_sign}/m{sup 3} and an ionization level of only 0.1%. This low ionization level tightly couples the neutral, ion, and electron chemistries and interactions in a system where the flow is subsonic. We present our strategy and compare simulation results to experimental data for Cl{sub 2} in a Gaseous Electronics Conference (GEC) reference cell modified with an inductive coil.