Publications

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This paper describes the development and implementation of an integrated resistor process based on reactively sputtered tantalum nitride. Image reversal lithography was shown to be a superior method for liftoff patterning of these films. The results of a response surface DOE for the sputter deposition of the films are discussed. Several approaches to stabilization baking were examined and the advantages of the hot plate method are shown. In support of a new capability to produce special-purpose HBT-based Small-Scale Integrated Circuits (SSICs), we developed our existing TaN resistor process, designed for research prototyping, into one with greater maturity and robustness. Included in this work was the migration of our TaN deposition process from a research-oriented tool to a tool more suitable for production. Also included was implementation and optimization of a liftoff process for the sputtered TaN to avoid the complicating effects of subtractive etching over potentially sensitive surfaces. Finally, the method and conditions for stabilization baking of the resistors was experimentally determined to complete the full implementation of the resistor module. Much of the work to be described involves the migration between sputter deposition tools - from a Kurt J. Lesker CMS-18 to a Denton Discovery 550. Though they use nominally the same deposition technique (reactive sputtering of Ta with N{sup +} in a RF-excited Ar plasma), they differ substantially in their design and produce clearly different results in terms of resistivity, conformity of the film and the difference between as-deposited and stabilized films. We will describe the design of and results from the design of experiments (DOE)-based method of process optimization on the new tool and compare this to what had been used on the old tool.

Most far-field optical imaging systems rely on a lens and spatially-resolved detection to probe distinct locations on the object. We describe and demonstrate a novel high-speed wide-field approach to imaging that instead measures the complex spatial Fourier transform of the object by detecting its spatially-integrated response to dynamic acousto-optically synthesized structured illumination. Tomographic filtered backprojection is applied to reconstruct the object in two or three dimensions. This technique decouples depth-of-field and working-distance from resolution, in contrast to conventional imaging, and can be used to image biological and synthetic structures in fluoresced or scattered light employing coherent or broadband illumination. We discuss the electronically programmable transfer function of the optical system and its implications for imaging dynamic processes. Finally, we present for the first time two-dimensional high-resolution image reconstructions demonstrating a three-orders-of-magnitude improvement in depth-of-field over conventional lens-based microscopy.

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We consider the problem of placing sensors in a municipal water network when we can choose both the location of sensors and the sensitivity and specificity of the contamination warning system. Sensor stations in a municipal water distribution network continuously send sensor output information to a centralized computing facility, and event detection systems at the control center determine when to signal an anomaly worthy of response. Although most sensor placement research has assumed perfect anomaly detection, signal analysis software has parameters that control the tradeoff between false alarms and false negatives. We describe a nonlinear sensor placement formulation, which we heuristically optimize with a linear approximation that can be solved as a mixed-integer linear program. We report the results of initial experiments on a real network and discuss tradeoffs between early detection of contamination incidents, and control of false alarms.

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Since the energy storage technology market is in a relatively emergent phase, narrowing the gap between pilot project status and commercialization is fundamental to the accelerating of this innovative market space. This session will explore regional market design factors to facilitate the storage enterprise. You will also hear about: quantifying transmission and generation efficiency enhancements; resource planning for storage; and assessing market mechanisms to accelerate storage adoption regionally.

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We will discuss general mathematical ideas arising in the problems of Laser beam shaping and splitting. We will be particularly concerned with questions concerning the scaling and symmetry of such systems.

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