Publications Details
Near atomic resolution microanalysis of interfaces by analytical electron microscopy
High spatial resoslution x-ray microanalysis in the analytical electron microscope (AEM) can be used to determine chemical composition on spatial scales of < 50 nm. Simple scattering models have the drawback of being incapable of treating electron scattering in inhomogeneous specimens, such as at phase interfaces or grain boundary segregation. The best method for calculating electron scattering and x-ray generation function is by Mone Carlo methods. Two examples are discussed: a phase interface in an Fe-Ni-Cr alloy, and grain boundary segregation using a 0.3 nm Cu slab in a 25 nm Al film (the slab is parallel to incident electron beam). It is concluded that high spatial resolution x-ray microanalysis can achieve near atomic resolution, but that massively parallel Monte Carlo models for electron scattering and a well characterized electron beam are needed.