Publications Details
Materials analysis with nuclear microprobes: Superconductors and buried conductors
Nuclear microprobe analysis (NMA) is a unique form of microbeam analysis in that it combines high lateral resolution with the high depth resolution techniques of conventional ion beam analysis (IBA) to nondestructively determine sample composition in three dimensions. By using depth sensitive IBA techniques (e.g., Rutherford Backscattering Spectrometry (RBS), Enhanced Backscattering Spectrometry (EBS) or Elastic Recoil Detection (ERD)), NMA finds its greatest utility in analyses requiring the following information: (1) 1--100 ppM sensitivity, (2) nondestructive three-dimensional depth profiling, and (3) quantitative light element analysis (e.g., the first two rows of the periodic table). This paper demonstrates the continuing evolution of NMA capabilities through two examples. First, the unique capabilities afforded NMA are shown in a simple yet accurate method to measure both oxygen and metal atom concentrations in Y-Ba-Cu-O alloys with micro-area ion beam analysis. Second, a NMA of buried tungsten lines in a silicon wafer demonstrates the complementary nature of information determined by NMA and scanning electron microscopy (SEM). 9 refs., 2 figs.