Publications Details

Improved assembly processes for the Quartz Digital Accelerometer cantilever

Gebert, C.T.

This report covers the development of improved assembly processes for the Quartz Digital Accelerometer cantilever. In this report we discuss improved single-assembly tooling, the development of tooling and processes for precision application of polyimide adhesive, the development of the wafer scale assembly procedure, and the application of eutectic bonding to cantilever assembly. 2 refs., 17 figs.