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Experiments in micromanipulation and CAD-driven microassembly

Feddema, John T.

This paper discusses recent experiments in the manipulation and assembly of parts with 100 micron outside dimensions and submicron tolerances. The objective of this work is to develop a micromanipulation workcell which can automatically assemble LIGA (Lithography Galvonoforming Abforming) parts using an assembly plan and a CAD drawing of each of the components. The workcell consists of an AdeptOne robot, precision stages, long distance microscope, and a high aspect ratio modeled polysilicon tweezers for picking up the parts. Fourier optics methods are used to generate synthetic microscope images from CAD drawings. These synthetic images are used off-line to test image processing routines under varying magnifications an depths of field. They also provide reference image features which are used to visually servo the true part to the desired position.