Publications Details
Development of Characterization Tools for Reliability Testing of MicroElectroMechanical System Actuators
Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.