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Failure analysis and process verification of high density copper ICs used in multi-chip modules (MCM)

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Walraven, J.A.; Jenkins, Mark W.; Simmons, Tuyet N.; Levy, James E.; Jensen, Sara E.; Jones, Adam J.; Edwards, Eric E.; Banz, James A.; Cole, Edward I.

Manufacturing of integrated circuits (ICs) using a split foundry process expands design space in IC fabrication by employing unique capabilities of multiple foundries and provides added security for IC designers [1] Defect localization and root cause analysis is critical to failure identification and implementation of corrective actions. In addition to split-foundry fabrication, the device addressed in this publication is .comprised of 8 metal layers, aluminum test pads, and tungsten thru-silicon vias (TSVs) making the circuit area > 68% metal. This manuscript addresses the failure analysis efforts involved in root cause analysis, failure analysis findings, and the corrective actions implemented to eliminate these failure mechanisms from occurring in future product.

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CMOS Integrated single electron transistor electrometry (CMOS-SET) circuit design for nanosecond quantum-bit read-out

2008 8th IEEE Conference on Nanotechnology, IEEE-NANO

Gurrieri, Thomas G.; Carroll, Malcolm; Lilly, Michael L.; Levy, James E.

Novel single electron transistor (SET) read-out circuit designs are described. The circuits use a silicon SET interfaced to a CMOS voltage mode or current mode comparator to obtain a digital read-out of the state of the qubit. The design assumes standard submicron (0.35um) CMOS SOI technology using room temperature SPICE models. Implications and uncertainties related to the temperature scaling of these models to 100mK operation are discussed. Using this technology, the simulations predict a read-out operation speed of approximately 1ns and a power dissipation per cell as low as 2nW for single-shot read-out, which is a significant advantage over currently used radio frequency SET (RF-SET) approaches. © 2008 IEEE.

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13 Results
13 Results