Development of a high-k gate stack for atomic-precision advanced manufacturing
Lu, Tzu-Ming L.; Anderson, Evan M.; Campbell, DeAnna M.; Marshall, Michael T.; Lu, Ping L.; Schmucker, Scott W.; Tracy, Lisa A.; Robison, Mitchell R.; Arghavani, Reza A.; Maurer, Leon N.; Baczewski, Andrew D.; Ward, Daniel R.; Misra, Shashank M.
Abstract not provided.