Publications

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Resist substrates used in the LIGA process must provide high initial bond strength between the substrate and resist, little degradation of the bond strength during x-ray exposure, acceptable undercut rates during development, and a surface enabling good electrodeposition of metals. Additionally, they should produce little fluorescence radiation and give small secondary doses in bright regions of the resist at the substrate interface. To develop a new substrate satisfying all these requirements, we have investigated secondary resist doses due to electrons and fluorescence, resist adhesion before exposure, loss of fine features during extended development, and the nucleation and adhesion of electrodeposits for various substrate materials. The result of these studies is a new anodized aluminum substrate and accompanying methods for resist bonding and electrodeposition. We demonstrate successful use of this substrate through all process steps and establish its capabilities via the fabrication of isolated resist features down to 6 {micro}m, feature aspect ratios up to 280 and electroformed nickel structures at heights of 190 to 1400 {micro}m. The minimum mask absorber thickness required for this new substrate ranges from 7 to 15 {micro}m depending on the resist thickness.

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Simulations within density functional theory (DFT) are a common component of research into the physics of materials. With the broad success of DFT, it is easily forgotten that computational DFT methods invariably do not directly represent simulated properties, but require careful construction of models that are computable approximations to a physical property. Perhaps foremost among these computational considerations is the routine use of the supercell approximation to construct finite models to represent infinite systems. Pitfalls in using supercells (k-space sampling, boundary conditions, cell sizes) are often underappreciated. We present examples (e.g. vacancy defects) that exhibit a surprising or significant dependence on supercells, and describe workable solutions. We describe procedures needed to construct meaningful models for simulations of real material systems, focusing on k-space and cell size issues.

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This highly interactive workshop is designed to elicit from the participants a vision of an ideal future analytic environment for intelligence analysis, the components of such a system that are already in place or in development and the identification of needed future developments. It will cover processes and tools for enabling effective individual analysts, teams of analysts, computer mediated analysis teams and management of tasks and teams.

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Single bilayer membranes of l-palmitoyl-2-oleoyl-sn-glycero-3- phosphocholine (POPC) were formed on ordered nanocomposite and nanoporous silica thin films by fusion of small unilamellar vesicles. The structure of these membranes was investigated using neutron reflectivity. The underlying thin films were formed by evaporation induced self-assembly to obtain periodic arrangements of silica and surfactant molecules in the nanocomposite thin films, followed by photocalcination to oxidatively remove the organics and render the films nanoporous. We show that this platform affords homogeneous and continuous bilayer membranes that have promising applications as model membranes and sensors. © 2005 American Chemical Society.

Joint fuel Raman and filtered Rayleigh-scattering (FRS) imaging is demonstrated in a laminar methane-air diffusion flame. These experiments are, to our knowledge, the first reported extension of the FRS technique to nonpremixed combustion. This joint imaging approach allows for correction of the FRS images for the large variations in Rayleigh cross section that occur in diffusion flames and for a secondary measurement of fuel mole fraction. The temperature-dependent filtered Rayleigh cross sections are computed with a six-moment kinetic model for calculation of major-species Rayleigh-Brillouin line shapes and a flamelet-based model for physically judicious estimates of gas-phase chemical composition. Shot-averaged temperatures, fuel mole fractions, and fuel number densities from steady and vortex-strained diffusion flames stabilized on a Wolfhard-Parker slot burner are presented, and a detailed uncertainty analysis reveals that the FRS-measured temperatures are accurate to within ±4.5 to 6% of the local absolute temperature. © 2005 Optical Society of America.

An experiment was recently conducted in DIII-D in which 13C methane (13CH4) was injected from the upper divertor plenum into 22 identical lower single null divertor L-mode plasmas. Twenty-nine graphite tiles were subsequently removed and analyzed to determine the spatial distribution of 13C deposited on the main chamber wall and divertor. 13C coverage was mapped by ion beam analysis using the 13C(3He, p)15N nuclear reaction. This technique also measures deuterium, boron and 12C content in the near-surface region of the tiles. The measurements show the 13C is deposited mainly at the inner divertor. © 2004 Elsevier B.V. All rights reserved.

Far scrape-off layer (SOL) plasma parameters in DIII-D depend strongly on the discharge density and confinement regime. In L-mode, cross-field transport increases with the average discharge density and elevates the far SOL density, thus increasing plasma-wall contact. Far SOL density near the low field side (LFS) of the main chamber wall also increases with decreasing plasma current and with decreasing outer wall gap. In H-mode, between edge localized modes (ELMs), plasma-wall contact is weaker than in L-mode. During ELMs plasma fluxes to the LFS wall increase to, or above the L-mode levels. A large fraction of the net cross-field fluxes is convected through the SOL by large amplitude intermittent transport events. In high-density L-mode and during ELMs in H-mode, intermittent events propagate all the way to the LFS wall and may cause sputtering. © 2004 Elsevier B.V. All rights reserved.

Use of carbon in tokamaks leads to a major tritium retention issue due to co-deposition. To investigate this process a low power L-mode experiment was performed on DIII-D in which 13CH4 was puffed into the main vessel through the toroidally-symmetric pumping plenum at the top of lower single-null discharges. Subsequently, the 13C content of tiles taken from the vessel wall was measured. The interpretive OEDGE code was used to model the results. It was found that the 13C deposition pattern is controlled by: (a) source strength of 13C+, (b) Δrs, radial location of the 13C+ source, (c) D⊥, (d) M∥, the scrape-off layer parallel Mach number. Best agreement was found for (a) ∼50% conversion efficiency 13CH 4 → 13C+, (b) Δrs, ∼+3.5 cm (outboard of separatrix) near 13CH4 injection location, (c) D⊥ ∼ 0.3 m2/s, (d) M∥∼ 0.4 toward inside. © 2004 Elsevier B.V. All rights reserved.

Time-resolved measurements of deposition in current tokamaks are crucial to gain a predictive understanding of deposition with a view to mitigating tritium retention and deposition on diagnostic mirrors expected in next-step devices. Two quartz crystal microbalances have been installed on NSTX at a location 0.77 m outside the last closed flux surface. This configuration mimics a typical diagnostic window or mirror. The deposits were analyzed ex-situ and found to be dominantly carbon, oxygen and deuterium. A rear facing quartz crystal recorded deposition of lower sticking probability molecules at 10% of the rate of the front facing one. Time resolved measurements over a 4-week period with 497 discharges, recorded 29.2 μg/cm2 of deposition, however surprisingly, 15.9 μg/cm2 of material loss occurred at 7 discharges. The net deposited mass of 13.3 μg/cm2 matched the mass of 13.5 μg/cm2 measured independently by ion beam analysis. Monte Carlo modeling suggests that transient processes are likely to dominate the deposition. © 2004 Elsevier B.V. All rights reserved.