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Impact of polymer film thickness and cavity size on polymer flow during embossing : towards process design rules for nanoimprint lithography

Schunk, Randy

This paper presents continuum simulations of polymer flow during nanoimprint lithography (NIL). The simulations capture the underlying physics of polymer flow from the nanometer to millimeter length scale and examine geometry and thermophysical process quantities affecting cavity filling. Variations in embossing tool geometry and polymer film thickness during viscous flow distinguish different flow driving mechanisms. Three parameters can predict polymer deformation mode: cavity width to polymer thickness ratio, polymer supply ratio, and Capillary number. The ratio of cavity width to initial polymer film thickness determines vertically or laterally dominant deformation. The ratio of indenter width to residual film thickness measures polymer supply beneath the indenter which determines Stokes or squeeze flow. The local geometry ratios can predict a fill time based on laminar flow between plates, Stokes flow, or squeeze flow. Characteristic NIL capillary number based on geometry-dependent fill time distinguishes between capillary or viscous driven flows. The three parameters predict filling modes observed in published studies of NIL deformation over nanometer to millimeter length scales. The work seeks to establish process design rules for NIL and to provide tools for the rational design of NIL master templates, resist polymers, and process parameters.

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TYPE SAND Report YEAR 2006
DOIOSTI

Circulating fluidized bed hydrodynamics experiments for the multiphase fluid dynamics research consortium (MFDRC)

Trujillo, Steven M.; Torczynski, J.R.; Tortora, Paul R.; O'Hern, Timothy J.

An experimental program was conducted to study the multiphase gas-solid flow in a pilot-scale circulating fluidized bed (CFB). This report describes the CFB experimental facility assembled for this program, the diagnostics developed and/or applied to make measurements in the riser section of the CFB, and the data acquired for several different flow conditions. Primary data acquired included pressures around the flow loop and solids loadings at selected locations in the riser. Tomographic techniques using gamma radiation and electrical capacitance were used to determine radial profiles of solids volume fraction in the riser, and axial profiles of the integrated solids volume fraction were produced. Computer Aided Radioactive Particle Tracking was used to measure solids velocities, fluxes, and residence time distributions. In addition, a series of computational fluid dynamics simulations was performed using the commercial code Arenaflow{trademark}.

More Details
TYPE SAND Report YEAR 2006
DOIOSTI
Results 82126–82150 of 96,771
Results 82126–82150 of 96,771