Inductively Coupled Plasma Etching in ICl- and IBr-Based Chemistries: Part I. GaAs, GaSb and AlGaAs
Plasma Chemistries and Plasma Processes
Plasma Chemistries and Plasma Processes
Plasma Chemistries and Plasma Processes
Journal of Vacuum Science and Technology B
Journal of Electronic Materials
Materials Issues in Semiconductor Process
Journal of Chemical Physics
Inorganic Chemistry
Journal of Thermal Spray Technology
Journal of Electronic Materials
Physics of Plasmas
Diamond and Related Materials
International Journal for Numerical Methods in Engineering
Langmuir