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The DOE Knowledge Base Mthodology for the Creation of an Optimal Spatial Tessellation

Hipp, James R.

The DOE Knowledge Base is a library of detailed information whose purpose is to improve the capability of the United States National Data Center (USNDC) to monitor compliance with the Comprehensive Test Ban Treaty (CTBT). Much of the data contained by the Knowledge Base is spatial in nature, and some of it is used to improve the accuracy with which seismic locations are determined while maintaining or improving current calculational perfor- mance. In this presentation, we define and describe the methodology used to create spatial tessellations of seismic data which are utilized with a gradient-modified natural-neighbor interpolation method to evaluate travel-time corrections. The goal is to interpolate a specified correction surface, or a group of them, with prescribed accuracy and surface smoothness requirements, while minimizing the number of data points necessary to represent the surface. Maintain- ing accuracy is crucial toward improving the precision of seismic origin location. Minimizing the number of nodes in the tessellation improves calculational and data access efficiency and performance. The process requires two initialization steps and an iterated 7 step algorithm for inserting new tessellation nodes. First, M residual data from ground truth events are included in the tessellation. These data remain fixed throughout the creation of the triangular tessellation. Next, a coarse grid of nodes is laid over the region to be tessellated. The coarse grid is necessary to define the boundary of the region to be tessellated. Next the 7 step iterated algorithm is performed to add new nodes to the tessellation to ensure that accuracy and smoothness requirements are met. These steps include 1) all data points in the tessellation are linked together to form a triangular tessellation using p standard Delaunay tessellation technique; 2) all of the data points, excluding the original data and boundruy nodes, are smoothed using a length-weighted Laplacian smoother to remove poorly formed triangles; 3) all new data points are assigned corrections by performing a Non-stationary Bayesian Kriging calculation for each new triangle node; 4) all nodes that exceed surface roughness requirements are split by inserting a new node at the mid-points of the edges that share the rough nod% 5) all remaining triangle edge midpoints and centers are inte~olated using gradient-modified natural-neighbor interpolation and kriged using the Bayesian IGiging algoritlm 6) new nodes are inserted into the tessellation at all edge and triangle mid-points that exceed the specified relative error tolerance between the interpo- lated and Iaiged values, and 7) all new insertion nodes are added to the tessellations node list. Steps 1 through 7 are repeated until all relative error and surface smoothness requirements are satisfied. Results indicate that node densities in the tessellation are largest in regions of high surface curvature as expected. Generally, gradient modified natural-neighbor interpolation methods do a better job than linear natural-neighbor methods at meeting accuracy requirements which translates to fewer nodes necessary to represent the surface.

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Using the DOE Knowledge Base for Special Event Analysis

Armstrong, H.M.; Harris, J.M.; Young, C.J.

The DOE Knowledge Base is a library of detailed information whose purpose is to support the United States National Data Center (USNDC) in its mission to monitor compliance with the Comprehensive Test Ban Treaty (CTBT). One of the important tasks which the USNDC must accomplish is to periodically perform detailed analysis of events of high interest, so-called "Special Events", to provide the national authority with information needed to make policy decisions. In this paper we investigate some possible uses of the Knowledge Base for Special Event Analysis (SEA), and make recommendations for improving Knowledge Base support for SEA. To analyze an event in detail, there are two basic types of data which must be used sensor-derived data (wave- forms, arrivals, events, etc.) and regiohalized contextual data (known sources, geological characteristics, etc.). Cur- rently there is no single package which can provide full access to both types of data, so for our study we use a separate package for each MatSeis, the Sandia Labs-developed MATLAB-based seismic analysis package, for wave- form data analysis, and ArcView, an ESRI product, for contextual data analysis. Both packages are well-suited to pro- totyping because they provide a rich set of currently available functionality and yet are also flexible and easily extensible, . Using these tools and Phase I Knowledge Base data sets, we show how the Knowledge Base can improve both the speed and the quality of SEA. Empirically-derived interpolated correction information can be accessed to improve both location estimates and associated error estimates. This information can in turn be used to identi~ any known nearby sources (e.g. mines, volcanos), which may then trigger specialized processing of the sensor data. Based on the location estimate, preferred magnitude formulas and discriminants can be retrieved, and any known blockages can be identified to prevent miscalculations. Relevant historic events can be identilled either by spatial proximity searches or through waveform correlation processing. The locations and waveforms of these events can then be made available for side-by-side comparison and processing. If synthetic modeling is thought to be warranted, a wide variety of rele- vant contextu~l information (e.g. crustal thickness and layering, seismic velocities, attenuation factors) can be retrieved and sent to the appropriate applications. Once formedj the synthetics can then be brought in for side-by-side comparison and fhrther processing. Based on our study, we make two general recommendations. First, proper inter-process communication between sensor data analysis software and contextual data analysis sofisvare should be developed. Second, some of the Knowl- edge Base data sets should be prioritized or winnowed to streamline comparison with observed quantities.

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Development to Release of CTBT Knowledge Base Datasets

Keyser, Ralph G.

For the CTBT Knowledge Base to be useful as a tool for improving U.S. monitoring capabilities, the contents of the Knowledge Base must be subjected to a well-defined set of procedures to ensure integrity and relevance of the con- stituent datasets. This paper proposes a possible set of procedures for datasets that are delivered to Sandia National Laboratories (SNL) for inclusion in the Knowledge Base. The proposed procedures include defining preliminary acceptance criteria, performing verification and validation activities, and subjecting the datasets to approvrd by domain experts. Preliminary acceptance criteria include receipt of the data, its metadata, and a proposal for its usability for U.S. National Data Center operations. Verification activi- ties establish the correctness and completeness of the data, while validation activities establish the relevance of the data to its proposed use. Results from these activities are presented to domain experts, such as analysts and peers for final approval of the datasets for release to the Knowledge Base. Formats and functionality will vary across datasets, so the procedures proposed herein define an overall plan for establishing integrity and relevance of the dataset. Specific procedures for verification, validation, and approval will be defined for each dataset, or for each type of dataset, as appropriate. Potential dataset sources including Los Alamos National Laboratories and Lawrence Livermore National Laborato- ries have contributed significantly to the development of thk process.

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FAA Fluorescent Penetrant Activities - An Update

Moore, D.G.

The Federal Aviation Administration's Airworthiness Assurance NDI Validation Center (AANC) is currently characterizing low cycle fatigue specimens that will support the needs of penetrant manufacturers, commercial airline industry and the Federal Aviation Administration. The main focus of this characterization is to maintain and enhance the evaluation of penetrant inspection materials and apply resources to support the aircraft community needs. This paper discusses efforts to-date to document the Wright Laboratory penetrant evaluation process and characterize penetrant brightness readings in the initial set of sample calibration panels using Type 1 penetrant.

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Remediation of a Classified Waste Landfill at Sandia National Laboratories, NM

Ward, Dann C.

The Sandia National Laboratory es/New Mexico (SNLiNM) Environmental Restoration Project is currently excavating the Classified Waste Landfill in Technical Area II (TA-H), which consists of disposal pits and trenches with discrete disposal cells. TA-11 is a secure, controlled assess, research facility managed by SNIJNM for the US Department of Energy (DOE). The 45-acre facility was established in 1948 for the assembly and maintenance of nuclear weapons. The assembly of weapons was discontinued in 1954. Since that time, TA-11 has been used primarily for explosive research and testing. Beginning is 1984, the DOE Er,vironmental Restoration Program conducted several environmental investigations across TA-11 and SNMNM. These investigations identified sites requiring firther study and possible corrective action. The majority of these sites were grouped into operable units (OUS). The TA-11 OU included 13 sites, one of which is identified as the Classified Waste Landfill (CWLF). The CWLF covers about 2.5 acres and was operated from approximately 1947 through 1987. It was the site for disposal of classified weapon components, s ome of which are potentially explosive, hazardous, ardor radioactively contarninatod. Until about 1958, no records were maintained for material disposed of in the CWLF. Information on the CWLF has been assembled horn interview notes, delivery to reckmation records and other sources. Items disposed of included security containers, hoppers, skids, missiles, wooden boxes, deactivated heat sources, tntium boosters, scintillation cocktails, weapons cases, shells, lasers, radar equipment and accountable mata-ials. Potential contaminants include tritium, thorium, cesium-137, strontium-90, uraniun, plutonium, beryllium, cadmium, lithium, chloroform, toluene, benzene ad other solvents.

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Effects of Spatially Heterogeneous Porosity on Matrix-Diffusion as Investigated by X ray Absorption Imaging

Journal of Contaminate Hydrology

Tidwell, Vincent C.

Laboratory experiments were performed to investigate the effects of spatial variation in porosity on matrix-diffusion processes. Four centimeter-scale slabs of Culebra dolomite taken from the Waste Isolation Pilot Plant site were used in the tests. Experiments involved the simple diffusion of iodine into a single edge of each rock slab while X ray absorption imaging was used to measure the resulting two-dmensional solute concentration field as a function of time. X ray imaging was also used to quantify the two-dimensional porosity field of each rock slab. Image analysis provided a unique opportunity to both visuake and quantifj the effects of the spatially variable porosi~ on matrixdMusion. Four key results were obtained. First, significant variation in rates of diffusion were realized over the relatively small length (centimeter) and time scales (months) investigated. Second, clear evidence of diffusion preferentially following zones of relatively higher porosity was noted. Third, rate of difhion was found to vary as tracer diffused into the rock slabs encountering changing porosity conditions. Fourth, strong correlation between porosi~ and the calculated diffusion coefficients was found. In fact, the nature of the correlation can be related to the geometry, position, and orientation of the heterogeneous porosity features populating each rock slab.

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Self-Organized Growth of Alloy Superlattices

Nature

Floro, Jerrold A.

We predict theoretically and demonstrate experimentally the spontaneous formation of a superlattice during crystal growth. When a strained alloy grows by "step flow", the steps at the surface form periodic bunches. The resulting modulated strain biases the incorporation of the respective alloy components at different steps in the bunch, leading to the formation of a superlattice. X-ray diffraction and electron microscopy for SiGe grown on Si give clear evidence for such spontaneous superlattice formation.

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Conformational Diversity in (Octaethylporphinato) (trichloroacetato)iron(III) Derivatives

Inorganic Chemistry Acta

Shelnutt, John A.

Treatment of [Fe(OEP)]20 with trichloroacetic acid results in ruffled formation of (octaethylporphinato trichloroacetato)iron(HI). Various crystalline solvates can be isolated, depending on the crystallization solvent. Initial crystallization with CHC13/hexanes resulted in the isolation of an unsolvated form. [Fe(OEP)(02C2C13 )]. This form contains distinct porphyrin core conformations at the same site: one is domed and the other is ruffled. Crystal data for [Fe(OEP)(02C2C13 )]: Q = 14.734(4) .4. b = 13.674(1) .\. c = 17..541 [,.5] .~. 3 = 90.67(1)0, V = 35-!5.8(14) .\3. monoclinic. space group R1/ n. Z = 4. Subsequent crystallization with CHC13/hexanes resulted in a new crystalline form, [Fe(OEP)(OzC2C13 )~.- CHC13; the porphyrin core is slightly ruffled. Crystal data for [Fe(OEP)(OoC2C13 )]. CHC13: a =12.323(1) .~, 6 = 13.062(3) .\. C = 14.327(2) .$, Q = 89.32(1)", .3 = 113.36(2)0. :~ = 105.26(1)'. V = `2031.3(6) .\3. triclinic. space group Pi. Z = 2. Crystallization with CH2C12/hexanes resulted in the isolation of yet another form, [Fe(OEP) (02 C2C13)]. H02C2C13. which contains two independent molecules in the unit cell: molecule is slightly saddled and molecule B is modestly ruffled. Crystal data for [Fe(OEP)(02ClC13 )]. H02C2C13: a = 13.148(3) .\, b = 13.45.5(3) A, c = Q3.761(5) -& ~ = 90.72(3)", ~ = 91. ~4(3)". -y = 92.36(3)0, V = 4198.5(15) .\3, triclinic.space group PI, Z = 4. .+11 conformations form dimers in the solid state. Temperature-dependent manometic susceptibility measurements showed that [Fe(OEP)(02C2C13)] .CHC13 contains a high-spin iron(III) center; the data for {Fe(OEP)(02C2C13 )l.H02C2C13 are understood in terms of an admixed intermediate-spin state (S = 3/2, 5/2) and are readily fit to a faltempo model with a ground state multiplet containing about 78% S = 5/2 character and 22% S = 3/2 character. The structural data for [Fe(OEP)(02C2C13 )]. CHC13 are consistent with the observed high-spin state, while data for ~Fe(OEP) (02 C2C13)] .H02C2C13 are consistent with the admixed-spin iron(HI) character. The observed core conformations have been described by a normal-coordinate structural decomposition method.

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Unipolar Complementary Circuits Using Double Electron Layer Tunneling Tansistors

Applied Physics Letters

Simmons, Jerry A.

We demonstrate unipolar complementary circuits consisting of a pair of resonant tunneling transistors based on the gate control of 2D-2D interlayer tunneling, where a single transistor - in addition to exhibiting a welldefined negative-differential-resistance can be operated with either positive or negative transconductance. Details of the device operation are analyzed in terms of the quantum capacitance effect and band-bending in a double quantum well structure, and show good agreement with experiment. Application of resonant tunneling complementary logic is discussed by demonstrating complementary static random access memory using two devices connected in series.

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Evolution of 2D Potts Model Grain Microstructures from an Initial Hillert Size Distribution

Battaile, Corbett C.

Grain growth experiments and simulations exhibit self-similar grain size distributions quite different from that derived via a mean field approach by Hillert [ 1]. To test whether this discrepancy is due to insufficient anneal times, two different two-dimensional grain structures with realistic topologies and Hillert grain size distributions are generated and subjected to grain growth via the Monte Carlo Potts Model (MCPM). In both cases, the observed self-similar grain size distributions deviate from the initial Hillert form and conform instead to that observed in MCPM grain growth simulations that start from a random microstructure. This suggests that the Hillert grain size distribution is not an attractor.

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An Overview of HATS: A Language Independent High Assurance Transformation System

Winter, V.L.

Transformations that are based on syntax directed rewriting systems can have a significant impact on the construction of high assurance systems. However, in order for a transformational approach to be useful to a particular problem domain, a (general) transformation system must be adapted to the notation of that particular domain. A transformation system that can be easily adapted to various domain notations has the potential of having a wide range of applicability. In this paper we dissus why transforrmtion is attractive horn a high assurance perspective, as well as some issues surrounding automated transformation within specific problem domains. We then give an overview of a language independent High Assurance Transformation System (HATS) that is being developed at Sandia National Laboratories.

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Validation of Electrical-Impedance Tomography for Measurements of Material Distribution in Two-Phase Flows

International Journal of Multiphase Flow

Torczynski, John R.

A series of studies is presented in which an electrical-impedance tomography (EXT) system is validated for two-phase flow measurements. The EIT system, developed at Sandia National Laboratories, is described along with the computer algorithm used for reconstructing phase volume fraction profiles. The algorithm is first tested using numerical data and experimental phantom measurements, with good results. The EIT system is then applied to solid-liquid and gas-liquid flows, and results are compared to an established gamma-densitometry tomography (GDT) system. In the solid-liquid flows, the average solid volume fractions measured by EIT are in good agreement with nominal values; in the gas-liquid flows, average gas volume fractions and radial gas volume fraction profiles from GDT and EIT are also in good agreement.

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Use of Dissolved and Colloidal Actinide Parameters within the 1996 Waste Isolation Pilot Plant Compliance Certification Application

Stockman, Christine T.

Many of the papers in this volume present detailed descriptions of the chemical analyses and methodologies that have been used to evaluate the maximum dissolved and colloid concentrations of actinides within the WIPP repository as part of the performance assessment. This paper describes the program fcm collecting experimental data and provides an overview of how the PA modeled the release of radionuclides to the accessible environment, and how volubility and colloid parameters were used by the PA models.

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Experimental Demonstration of Guiding and Bending of Electromagnetic Waves in a Photonic Crystal

Science

Lin, Shawn-Yu

The routing and interconnection of optical signals through narrow channels and around sharp corners is important for large-scale all-optical circuit applications. A recent computational result suggests that photonic crystals may offer a novel way of achieving this goal by providing a mechanism for guiding light that is fundamentally different from traditional index guiding. Waveguiding in a photonic crystal, and near 100% transmission of electromagnetic waves around sharp 90o corners were observed experimentally. Bend- ing radii were made smaller than one wavelength.

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An Overview of Surface Finishes and Their Role in Printed Circuit Board Solderability and Solder Joint Performance

Circuit World

Vianco, Paul T.

A overview has been presented on the topic of alternative surface finishes for package I/Os and circuit board features. Aspects of processability and solder joint reliability were described for the following coatings: baseline hot-dipped, plated, and plated-and-fused 100Sn and Sn-Pb coatings; Ni/Au; Pd, Ni/Pd, and Ni/Pd/Au finishes; and the recently marketed immersion Ag coatings. The Ni/Au coatings appear to provide the all-around best option in terms of solderability protection and wire bondability. Nickel/Pal ftishes offer a slightly reduced level of performance in these areas that is most likely due to variable Pd surface conditions. It is necessmy to minimize dissolved Au or Pd contents in the solder material to prevent solder joint embrittlement. Ancillary aspects that included thickness measurement techniques; the importance of finish compatibility with conformal coatings and conductive adhesives; and the need for alternative finishes for the processing of non-Pb bearing solders were discussed.

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Low-(18)O Silicic Magmas: Why Are They So Rare?

Earth and Planetary Science Letters

Balsley, Steven D.

LOW-180 silicic magmas are reported from only a small number of localities (e.g., Yellowstone and Iceland), yet petrologic evidence points to upper crustal assimilation coupled with fractional crystallization (AFC) during magma genesis for nearly all silicic magmas. The rarity of 10W-l `O magmas in intracontinental caldera settings is remarkable given the evidence of intense 10W-l*O meteoric hydrothermal alteration in the subvolcanic remnants of larger caldera systems. In the Platoro caldera complex, regional ignimbrites (150-1000 km3) have plagioclase 6180 values of 6.8 + 0.1%., whereas the Middle Tuff, a small-volume (est. 50-100 km3) post-caldera collapse pyroclastic sequence, has plagioclase 8]80 values between 5.5 and 6.8%o. On average, the plagioclase phenocrysts from the Middle Tuff are depleted by only 0.3%0 relative to those in the regional tuffs. At Yellowstone, small-volume post-caldera collapse intracaldera rhyolites are up to 5.5%o depleted relative to the regional ignimbrites. Two important differences between the Middle Tuff and the Yellowstone 10W-180 rhyolites elucidate the problem. Middle Tuff magmas reached water saturation and erupted explosively, whereas most of the 10W-l 80 Yellowstone rhyolites erupted effusively as domes or flows, and are nearly devoid of hydrous phenocrysts. Comparing the two eruptive types indicates that assimilation of 10W-180 material, combined with fractional crystallization, drives silicic melts to water oversaturation. Water saturated magmas either erupt explosively or quench as subsurface porphyrins bejiire the magmatic 180 can be dramatically lowered. Partial melting of low- 180 subvolcanic rocks by near-anhydrous magmas at Yellowstone produced small- volume, 10W-180 magmas directly, thereby circumventing the water saturation barrier encountered through normal AFC processes.

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Multispectral UV Fluorescence Detection of a Dilute Constituent in an Optically Dense Matrix

Applied Optics

Chan, O.H.; Rubenstein, R.; Tisone, G.C.; Wagner, J.S.

Multispectral UV fluorescence measurements were made of an optically dense medium (fetal bovine serum, FBS) spiked with sodium salicylate at concentrate ions from 0.2 to 500 pg/ml . Analysis of the spectra show that, depending on experimental conditions, reasonably good estimates of concentration can be obtained across the entire range of concentrate ions. Experimental conditions required for recovering these estimates are demonstrated.

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Predictable Safety in the Control of High Consequence Systems

Covan, John M.

Many industries transmit large amounts of energy under the control of safety critical systems, inadvertent release of energy by such systems can result in negative high consequences. Thirpaper describes aprincipie-ba.re dstrategyfor preventing inadvertent release due [O normai operational stresses or abnormal (e.g., accident) stresses. The sajetyprin- ciples, deveioped by Sandia )?a~ional Laboratories for im- bedding detonation safety in nuclear weapons, include iso- [atio~ inoperabilip and incompatibility. There principles will be defined in the paper. They are illustrated and con- trasted to conventionalpractice via the application to a gas jiunace control system.

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Use of Z-Pinch Sources for High-Pressure Equation-of-State Studies

Asay, J.R.

In this paper, we describe a new technique for using a pulsed power source (Z pinch) to produce planar shock waves for high-pressure equation of state (EOS) studies. Initial EOS experiments conducted with techniques indicate that these sources are effective for shock wave studies in samples with diameters of a few millimeters and thicknesses of a fraction of one millimeter, and thus provide the possibility for achieving accuracy in shock and particle velocity measurements of a few percent. We have used the Z pinch source to produce the first in-situ time-resolve particle velocity profiles obtained with pulsed radiation sources in the Mbar regime. Particle velocity profiles obtained with a VISAR interferometer are compared with I-D numerical simulations performed with a radiation-hydrodynamics code, ALEGRA. Good agreement with experimental results was achieved in the simulations and suggests that Z pinch source should be a valuable tool for high-pressure EOS studies in thermodynamic regimes important to hypervelocity impact.

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Remote Optical Imagery of Obscured Objects in Low-Visibility Environments Using Parametric Amplification

Cameron, Stewart M.

The development of unconventional active optical sensors to remotely detect and spatially resolve suspected threats obscured by low-visibility observation conditions (adverse weather, clouds, dust, smoke, precipitation, etc.) is fundamental to maintaining tactical supremacy in the battlespace. In this report, the authors describe an innovative frequency-agile image intensifier technology based on time-gated optical parametic amplification (OPA) for enhanced light-based remote sensing through pervasive scattering and/or turbulent environments. Improved dynamic range characteristics derived from the amplified passband of the OPA receiver combined with temporal discrimination in the image capture process will offset radiant power extinction losses, while defeating the deugradative effects & multipath dispersion and ,diffuse backscatter noise along the line-of-sight on resultant image contrast and range resolution. Our approach extends the operational utility of the detection channel in existing laser radar systems by increasing sensitivity to low-level target reffectivities, adding ballistic rejection of scatter and clutter in the range coordinate, and introducing multispectral and polarization discrimination capability in a wavelen~h-tunable, high gain nonlinear optical component with strong potential for source miniaturization. A key advantage of integrating amplification and tlequency up-conversion functions within a phasematched three-wave mixing parametric device is the ability to petiorm background-free imaging with eye-safe or longer inilared illumination wavelengths (idler) less susceptible to scatter without sacrificing quantum efficiency in the detection process at the corresponding signal wavelength. We report benchmark laboratory experiments in which the OPA gating process has been successfidly demonstrated in both transillumination and reflection test geometries with extended pathlengths representative of realistic coastal sea water and cumulus cloud scenarios. In these experiments, undistorted range-gated optica[ images tiom specular and diffuse reflectance targets were acquired through scattering attenuations exceeding ten orders cf magnitude which would be undetectable with traditional optical methods. The broadcast and gating pulses were derived ilom both millijoules 10 Hz picosecond (50-100 ps) and 250 KHz microjoule femtosecond (-150 fs) laser configurations to assess signal-to-noise and spatiaI resolution considerations as a fimction of scattering, integration time, and repetition rate. In addition, the technique was combined with a self-referencing Shack-Hartrnann wavetiont sensor to dia=~ose underlying phase signatures of weak refictive index gradients (OPD-M1 00) or persistent convective wakes (exhaust plumes, bubbles), and to perform adaptive optical compensation in visual fields exhibiting both turbulence and turbidity (OD=4). Comparative system anaiysis results relating image quaiity, optimal gate width, detectable range, and broadcast laser size versus operative atmospheric scattering conditions and search/dwell probability of detection criteria will also be presented.

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Effect of Temperature on GaGdO/GaN Metal Oxide Semiconductor Field Effect Transistors

Applied Physics Letters

Baca, Albert G.

GaGdO was deposited on GaN for use as a gate dielectric in order to fabricate a depletion metal oxide semiconductor field effect transistor (MOSFET). This is the fmt demonstration of such a device in the III-Nitride system. Analysis of the effect of temperature on the device shows that gate leakage is significantly reduced at elevated temperature relative to a conventional metal semiconductor field effeet transistor (MESFET) fabricated on the same GaN layer. MOSFET device operation in fact improved upon heating to 400 C. Modeling of the effeet of temperature on contact resistance suggests that the improvement is due to a reduction in the parasitic resistances present in the device.

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300 Degree C GaN/AlGaN Heterojunction Bipolar Transistor

MRS Internet Nitride Journal

Baca, Albert G.

A GaN/AIGaN heterojunction bipolar transistor has been fabricated using C12/Ar dry etching for mesa formation. As the hole concentration increases due to more efficient ionization of the Mg acceptors at elevated temperatures (> 250oC), the device shows improved gain. Future efforts which are briefly summarized. should focus on methods for reducing base resistance.

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Quantitative Determination of Dielectric Thin-Film Properties Using Infrared Emission Spectroscopy

Applied Spectroscopy

Haaland, David M.

We have completed an experimental study to investigate the use of infrared emission spectroscopy (IRES) for the quantitative analysis of borophosphosilicate glass (BPSG) thin films on silicon monitor wafers. Experimental parameters investigated included temperatures within the range used in the microelectronics industry to produce these films; hence the potential for using the IRES technique for real-time monitoring of the film deposition process has been evaluated. The film properties that were investigated included boron content, phosphorus content, film thickness, and film temperature. The studies were conducted over two temperature ranges, 125 to 225 *C and 300 to 400 *C. The later temperature range includes realistic processing temperatures for the chemical vapor deposition (CVD) of the BPSG films. Partial least squares (PLS) multivariate calibration methods were applied to spectral and film property calibration data. The cross-validated standard errors of prediction (CVSEP) fi-om the PLS analysis of the IRES spectraof21 calibration samples each measured at 6 temperatures in the 300 to 400 "C range were found to be 0.09 wt. `?40 for B, 0.08 wt. `%0 for P, 3.6 ~m for film thickness, and 1.9 *C for temperature. By lowering the spectral resolution fi-om 4 to 32 cm-l and decreasing the number of spectral scans fi-om 128 to 1, we were able to determine that all the film properties could be measured in less than one second to the precision required for the manufacture and quality control of integrated circuits. Thus, real-time in-situ monitoring of BPSG thin films formed by CVD deposition on Si monitor wafers is possible with the methods reported here.

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Damage to III-V Devices During Electron Cyclotron Resonance Chemical Vapor Deposition

Journal of Vacuum Science and Technology A

Shul, Randy J.

GaAs-based metal semiconductor field effect transistors (MESFETS), heterojunction bipolar transistors (HBTs) and high electron mobility transistors (HEMTs) have been exposed to ECR SiJ&/NH3 discharges for deposition of SiNX passivating layers. The effect of source power, rf chuck power, pressure and plasma composition have been investigated. Effects due to both ion damage and hydrogenation of dopants are observed. For both HEMTs and MESFETS there are no conditions where substantial increases in channel sheet resistivity are not observed, due primarily to (Si-H)O complex formation. In HBTs the carbon-doped base layer is the most susceptible layer to hydrogenation. Ion damage in all three devices is minimized at low rf chuck power, moderate ECR source power and high deposition rates.

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Results 94526–94550 of 100,993
Results 94526–94550 of 100,993
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