The measurement of layer-to-layer feature overlay will, in the foreseeable future, continue to be a critical metrological requirement for the semiconductor industry. Meeting the image placement metrology demands of accuracy, precision, and measurement speed favors the use of electrical test structures. In this paper, a two-dimensional, modified voltage-dividing potentiometer is applied to a short-loop VLSI process to measure image placement. The contributions of feature placement on the reticle and overlay on the wafer to the overall measurement are analyzed and separated. Additional sources of uncertainty are identified, and methods developed to monitor and reduce them are described.
This report briefly discusses the following research being conducted at Sandia Laboratories: Advanced Manufacturing -- Sandia technology helps keep US industry in the lead; Microelectronics-Sandia`s unique facilities transform research advances into manufacturable products; Energy -- Sandia`s energy programs focus on strengthening industrial growth and political decisionmaking; Environment -- Sandia is a leader in environmentally conscious manufacturing and hazardous waste reduction; Health Care -- New biomedical technologies help reduce cost and improve quality of health care; Information & Computation -- Sandia aims to help make the information age a reality; Transportation -- This new initiative at the Labs will help improve transportation, safety,l efficiency, and economy; Nonproliferation -- Dismantlement and arms control are major areas of emphasis at Sandia; and Awards and Patents -- Talented, dedicated employees are the backbone of Sandia`s success.
Test results sponsored by the USNRC have shown that reinforced shear wall (Seismic Category I) structures exhibit stiffnesses and natural frequencies which are smaller than those calculated in the design process. The USNRC has sponsored Sandia National Labs to perform an evaluation of the effects of the reduced frequencies on several existing seismic PRAs in order to determine the seismic risk implications inherent in these test results. This report presents the results for the re-evaluation of the seismic risk for three nuclear power plants: the Peach Bottom Atomic Power Station, the Zion Nuclear Power Plant, and Arkansas Nuclear One -- Unit 1 (ANO-1). Increases in core damage frequencies for seismic initiated events at Peach Bottom were 25 to 30 percent (depending on whether LLNL or EPRI hazard curves were used). At the ANO-1 site, the corresponding increases in plant risk were 10 percent (for each set of hazard curves). Finally, at Zion, there was essentially no change in the computed core damage frequency when the reduction in shear wall stiffness was included. In addition, an evaluation of deterministic ``design-like`` structural dynamic calculations with and without the shear stiffness reductions was made. Deterministic loads calculated for these two cases typically increased on the order of 10 to 20 percent for the affected structures.
The major thrust of the study leading to this report was a quick, but in-depth, understanding of the process for using multimedia computer equipment for information exchange within our engineering office and within the school environment. That is, how feasible is it to augment the typical office memo or school instruction sheet with pictures, video, and sounds? What specialized skills, hardware, and software are needed by those of us who want to use the technology? The brief study period allowed for an examination of available hardware and software, observation of current approaches to multimedia within our particular environment, and the development of applications, all within the context of several project areas: The Sandia Science Advisors program; a Sandia scientific project associated with the National Information Infrastructure Testbed; the curriculum of Monte Vista Elementary School of Albuquerque Public Schools; and the University of New Mexico Medical School Health Scene project.
Due to the recently enacted California regulations requiring zero emission vehicles be sold in the market place by 1998, electric vehicle research and development (R&D) is accelerating. Much of the R&D work is focusing on the Achilles` heel of electric vehicles -- advanced batteries. This report provides an assessment of the R&D work currently underway in advanced batteries and electric vehicles in the following countries: Denmark, France, Germany, Italy, Japan, Russia, and the United Kingdom. Although the US can be considered one of the leading countries in terms of advanced battery and electric vehicle R&D work, it lags other countries, particularly France, in producing and promoting electric vehicles. The US is focusing strictly on regulations to promote electric vehicle usage while other countries are using a wide variety of policy instruments (regulations, educational outreach programs, tax breaks and subsidies) to encourage the use of electric vehicles. The US should consider implementing additional policy instruments to ensure a domestic market exists for electric vehicles. The domestic is the largest and most important market for the US auto industry.
This Sandia publication seeks to facilitate technology exchange with industries, universities, and government agencies. It presents brief highlights of four projects. First is a project to simulate the use of airbags to soften the landing of a probe on Mars. Second is the use of a computer simulation system to facilitate the testing of designs for different experiments, both for experimental layout and results analysis. Third is the development of a system for in-house testing of batteries and capacitive energy storage systems, for deployment at the manufacturing sites, as opposed to final use areas. Finally is information on a noncontact measurement system which can be used to determine axes on objects of different shapes, with high precision.
Concern for the environment and cost reduction are the driving forces for a broad effort in government and the private sector to develop new, more cost-effective technologies for characterizing, monitoring and remediating environmental sites. Secondary goals of the characterization, monitoring and remediation (CMR) activity are: minimize secondary waste generation, minimize site impact, protect water tables, and develop methods/strategies to apply new technologies. The Sandia National Laboratories (SNL) project in directional boring for CMR of waste sites with enhanced machinery from the underground utility installation industry was initiated in 1990. Preliminary activities included surveying the directional drilling access needs of various DOE sites, identifying an existing class of machinery that could be enhanced for environmental work through development, and establishing a mutually beneficial working relationship with an industry partner. Since that time the project has tested a variety of prototype machinery and hardware built by the industrial partner, and SNL. The project continues to test and develop the machinery and technique refinements needed for future applications at DOE, DOD, and private sector sites. The original goal of cost-effectiveness is being met through innovation, adaptation, and application of fundamental concepts. Secondary goals are being met via a basic philosophy of ``cut/thrust and compact cuttings without adding large quantities of fluid`` to an environmental problem site. Technology transfer to the private sector is ongoing and ultimately should result in commercial availability of the machinery. Education of regulatory agencies resulting in restructuring appropriate regulatory standards for specification of the horizontal drilling techniques will be a final project goal.
The Beneficial Uses Shipping System cask is a Type B packaging developed by Sandia National Laboratories for the U.S. Department of Energy. The cask is designed to transport special form radioactive source capsules (cesium chloride and strontium fluoride) produced by the Department of Energy`s Hanford Waste Encapsulation and Storage Facility. This paper describes the cask system and the analyses performed to predict the response of the cask in impact, puncture, and fire accident conditions as specified in the regulations. The cask prototype has been fabricated and Certificates of Compliance have been obtained.
L-{alpha}-alanine, a nontoxic polycrystalline amino acid, has been investigated for use in high-precision, high-level absorbed-dose measurements in mixed neutron/photon environments such as research and test reactors. The technique is based on the use of electron paramagnetic resonance spectroscopy to determine the extent of free radical production in a sample exposed to ionizing radiation, and has been successfully used for photon absorbed-dose measurements at levels exceeding 10{sup 5} Gy with high measurement precision. Application of the technique to mixed environments requires knowledge of the energy-dependent response of the dosimeter for both photons and neutrons. Determination of the dosimeter response to photons is accomplished by irradiations in {sup 60}Co and bremsstrahlung sources and by calculations of energy-dependent photon kerma. Neutron response is determined by irradiations in conjunction with CaF{sub 2}:Mn thermoluminescence dosimeters and by calculations of energy-dependent neutron kerma. Several neutron environments are used, including those provided by the Annular Core Research Reactor and Sandia Pulsed Reactor.
The RADTRAN 4 computer code for transportation risk assessment is the central code in a system that contains both other codes and data libraries. Some of these codes and data libraries supply input data for RADTRAN; others perform supplemental calculations. RADTRAN 4 will be released by the IAEA in an international version known as INTERTRAN 2 in 1995. In the United States, RADTRAN 4 and its supporting system may be accessed via the INTERNET, a precursor to the Information Superhighway. Similar networks are being contemplated elsewhere in the world, and the RADTRAN System may serve as a prototype for systems on these networks. A system is desirable for the following reasons. Some classes of data and data-handling methods are country-specific and some are not -- ancillary codes and data libraries that provide the latter are not affected by national and regional borders while the former must be provided on a country-by-country basis. Making the invariant portions available to all users in an international system would simplify quality assurance (QA) and, therefore, the reliability and consistency of risk results. Among the classes of data used in RADTRAN 4 (and INTERTRAN 2) and the supplemental calculational capabilities that are essentially invariant for all countries and regions are: (1) radionuclide characteristics such as half-life, photon energy, and dose-conversion factors; (2) characteristics of radioactive-material packages found in international commerce; (3) features of highly standardized international transportation modes (primarily sea and air); and (4) uncertainty analysis. These features and their related QA benefits are discussed.
As the United States embarks upon a major effort to cleanup its nuclear defense facilities, a large quantity of low-level waste (LLW) will be generated. This LLW must be managed and ultimately placed into final disposal. Much of this waste is expected to exceed certain limits defined in U.S. regulations (Title 10, U.S. Code of Federal Regulations, part 61) called Class C. The waste which exceeds Class C, called Greater-than-Class-C (GTCC), poses a major challenge to waste managers. Each GTCC waste form must be placed into costly geologic disposal unless separate approval is obtained from the United States regulator to place it into less costly {open_quotes}near-surface{close_quotes} land burial. Management of GTCC will also require, to some extent, storage and transport prior to its final disposal. A further LLW stream exists in the United States also stemming from the prior operations of United States defense facilities, viz., radioactively contaminated and irradiated scrap metal which has been accumulating over the past forty years. Similarly, as cleanup, decontamination, and decommissioning proceeds, this contaminated scrap metal inventory is expected to grow rapidly. This paper explores the notion of the authors that an opportunity for a synergistic solution to two difficult waste management problems may be available in the United States today, and perhaps may similarly be available in other nuclear countries as well. The possibility exists for fabricating packagings from contaminated scrap metal (which would otherwise be part of the waste inventory) and for using these packaging for storage, transport and disposal of GTCC in near-surface burial facilities without reopening or repacking. This approach is appealing and should lead to major safety and cost benefits. An examination of existing regulations with the intent to propose additions, changes, or clarifications that would effectively and beneficially regulate such combined activity is proposed.
A tunable, high-accelerating-gradient cavity has been designed for use in the rf system of the Low Energy Booster (LEB) at the Superconducting Super Collider (SSC). Details of the cavity design are discussed along with low level, swept frequency, and high pwoer test results.
The Robotic All-Terrain Lunar Exploration Rover (RATLER) is a four wheeled all-wheel-drive dual-body vehicle. A uniquely simple method of chassis articulation is employed which allows all four wheels to remain in contact with the ground, even while climbing over step-like obstacles as large as 1.3 wheel diameters. The RATLER design concept began at Sandia National Laboratories in late 1991 with a series of small, proof-of-principle, working scale models. The models proved the viability of the concept for high mobility through mechanical simplicity, and eventually received internal funding at Sandia National Laboratories for full scale, proof-of-concept prototype development. Whereas the proof-of-principle models demonstrated the mechanical design's capabilities for mobility, the full scale proof-of-concept design currently under development is intended to support field operations for experiments in telerobotics, autonomous robotic operations, telerobotic field geology, and advanced man-machine interface concepts. The development program's current status is described, including an outline of the program's work over the past year, recent accomplishments, and plans for follow-on development work.
This paper describes a collision avoidance system using Whole Arm Proximity (WHAP) sensors on a PUMA 560 robot arm. The capacitance-based sensors generate electric fields which can completely encompass the robot arm and detect obstacles as they approach from any direction. The directional obstacle information gathered by the WHAP sensors together with the sensor geometry and robot configuration is used to scale the commanded joint velocities of the robot. A linearized relationship between the WHAP sensor reading and the distance from the obstacle allows direct transformation of perturbations in WHAP readings to perturbations in joint velocities. The WHAP reading is used to directly reduce the component of the command input velocity along the normal axis of the sensor, allowing graceful reductions in speed as the arm approaches the obstacle. By scaling only the component of the velocity vector in the direction of the nearest obstacles, the control system restricts motion in the direction of obstacles while permitting unconstrained motion in other directions.
The computational fluid dynamics code FIDAP (Fluid Dynamics International) is used to perform simulations of the steady laminar flow of an incompressible fluid in a three-dimensional rectangular cavity. Although most previous studies have considered a 'lid-driven' cavity, where a uniform horizontal velocity is imposed on the cavity lid, the flow in the channel above the cavity is explicitly included in the computational domain in these simulations. Simulations are performed for various Reynolds numbers in the range 0 ≤ Re ≤ 1000 and are compared to corresponding two-dimensional results. The three-dimensional flows are seen to exhibit a smooth topology change around Re ≈ 35.
Detection of air-borne environmental contaminants, such as organic solvents, requires unambiguous compound identification and sensitivity to concentrations below those permitted by regulating agencies. One promising detection approach uses a pulsed supersonic molecular beam vacuum expansion in combination with fluorescence signal spectral analysis to identify species in a chemical mixture. This report describes the use and performance of the ultraviolet excitation molecular beam fluorometer.
We have studied a singly-resonant KTP ring OPO pumped by nanosecond pulses from a frequency-doubled NdYAG laser. We present measurements of the temporal and spatial intensity profiles of the incident pump beam and OPO output beams, including the depleted pump, as well as the output energy as a function of pump laser energy. These measurements have been carried out for both injection-seeded and unseeded operation of the OPO The results of these measurements have been compared to the output of a computer model.
The Telemanaged Mobile Security Station (TMSS) was developed at Sandia National Laboratories to investigate the role of mobile robotics in exterior perimeter security systems. A major feature of the system is its capability to perform autonomous patrols of the security site's network of roads. Perimeter security sites are well known, structured environments; the locations of the roads, buildings, and fences are relatively static. A security robot has the advantage of being able to learn its new environment prior to autonomous travel. The TMSS robot combines information from a microwave beacon system and on-board dead reckoning sensors to determine its location within the site. The operator is required to teleoperate the robot in a teach mode over all desired paths before autonomous operations can commence. During this teach phase, TMSS stores points from its position location system at two meter intervals. This map data base is used for planning paths and for reference during path following. Details of the position location and path following systems will be described along with system performance and recommendations for future enhancements.
Fluorescence depolarization studies of polysilane chains in solution have shown that energy transfer along the polymer chains occurs for only a very short time relative to the excited state lifetime and only over short distances before the excited states become trapped in long, low-energy segments. However, in solid films we have shown in previous work that excitons are highly mobile throughout their 600 ps lifetime at room temperature, presumably because energy transfer among neighboring, parallel chain segments becomes possible. In this paper we report that the exciton-exciton annihilation rate constant decreases by only a factor of five between room temperature and 12 K, showing that the excitons do not become trapped even at low temperatures.
The blast-induced movement and final location of geologic layers that may cause environmental problems can be predicted using discrete element methods. This prediction capability can be used by mine operators to locate the material in the muck pile during excavation which would allow encapsulation to prevent groundwater infiltration.
Time-resolved velocity interferometry measurements have been made on boron carbide and silicon carbide ceramics to assess dynamic equation-of-state and strength properties of these materials. Hugoniot precursor characteristics, and post-yield shock and release wave properties, indicated markedly different dynamic strength and flow behavior for the two carbides.
This study is a comparison of hydraulic fracture models run using test data from the GRI Staged Field Experiment No. 3. Models compared include 2D, pseudo-3D, and 3D codes, run on up to eight different cases. Documented in this comparison are the differences in length, height, width, pressure, and efficiency. The purpose of this study is to provide the completions engineer with a practical comparison of the available models so that rational decisions can be made as to which model is optimal for a given application.