Publications

Characterization of systematic process variation in a silicon photonic platform

Boynton, Nicholas; Pomerene, Andrew P.; Starbuck, Andrew L.; Lentine, Anthony L.; DeRose, Christopher T.

We present a quantitative analysis of the correlation of resonant wavelength variation with process variables, and find that 50% of the resonant wavelength variation for microrings is due to systematic process conditions. We also discuss the improvement of device uniformity by mitigating these systematic variations.