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High silicon content silylating reagents for dry-developed positive-tone resists for extreme ultraviolet (13.5 nm) and deep ultraviolet (248 nm) microlithography

Wheeler, David R.

Recent results in the use of disilanes as silylating reagents for near-surface imaging with deep-UV (248 nm) and EUV (13.5 nm) lithography are reported. A relatively thin imaging layer of a photo-cross-linking resist is spun over a thicker layer of hard-baked resist that functions as a planarizing layer and antireflective coating. Photoinduced acid generation and subsequent heating crosslinks and renders exposed areas impermeable to an aminodisilane that reacts with the unexposed regions. Subsequent silylation and reactive ion etching afford a positive-tone image. The use of disilanes introduces a higher concentration of silicon into the polymer than is possible with silicon reagents that incorporate only one silicon atom per reactive site. The higher silicon content in the silylated polymer increases etching selectivity between exposed and unexposed regions and thereby increases the contrast. Additional improvements that help to minimize flow during silylation are also discussed, including the addition of bifunctional disilanes. We have resolved high aspect ratio, very high quality 0.20 {mu}m line and space patterns at 248 nm with a stepper having a numerical aperture (NA)= 0.53, and have resolved {<=} 0.15 {mu}m line and spaces at 13.5 nm.

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Atomic oxygen interaction with nickel multilayer and antimony oxide doped MoS{sub 2} films

Dugger, Michael T.

Sputtered MoS{sub 2} is a solid lubricant capable of ultralow friction coefficients (below 0.05) load-bearing capacity. Since it exhibits low friction in vacuum, low outgassing rate, is non-migrating and lacks organic binders, this material is an attractive lubricant for space mechanisms. To exploit these new materials to their fullest potential, designers of space-based motion systems require data on the effects of atomic oxygen exposure on dense, sputtered MoS{sub 2}. This paper describes the effects of atomic oxygen in low earth orbit on the friction and surface composition of sputtered MoS{sub 2} films. Sputtered multilayer films of MoS{sub 2} with nickel (0.7 nm Ni per 10 nm MoS{sub 2}, for 1 {mu}m total film thickness), and MoS{sub 2} cosputtered with antimony oxide (nominally 2 {mu}m thick) were exposed to 2.2 to 2.5 x 10{sup 20} oxygen/cm{sup 2} over a period of 42.25 hours in earth orbit on the United States space shuttle. Identical specimens were kept as controls in desiccated storage for the duration of the mission, and another set was exposed to an equivalent fluence of atomic oxygen in the laboratory. The friction coefficient in air and vacuum, and the composition of worn surfaces, were determined prior to the shuttle flight and again after the shuttle flight. Results are described.

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Thermal fatigue testing of a diffusion-bonded beryllium divertor mock-up under ITER relevant conditions

Youchison, Dennis L.

Thermal response and thermal fatigue tests of four 5 mm thick beryllium tiles on a Russian divertor mock-up were completed on the Electron Beam Test System at Sandia National Laboratories. The beryllium tiles were diffusion bonded onto an OFHC copper saddleblock and a DSCu (MAGT) tube containing a porous coating. Thermal response tests were performed on the tiles to an absorbed heat flux of 5 MW/m{sup 2} and surface temperatures near 300{degrees}C using 1.4 MPa water at 5.0 m/s flow velocity and an inlet temperature of 8-15{degrees}C. One tile was exposed to incrementally increasing heat fluxes up to 9.5 MW/m{sup 2} and surface temperatures up to 690{degrees}C before debonding at 10 MW/m{sup 2}. A third tile debonded after 9200 thermal fatigue cycles at 5 MW/m{sup 2}, while another debonded after 6800 cycles. In all cases, fatigue failure occurred in the intermetallic layers between the beryllium and copper. No fatigue cracking of the bulk beryllium was observed. During thermal cycling, a gradual loss of porous coating produced increasing sample temperatures. These experiments indicate that diffusion-bonded beryllium tiles can survive several thousand thermal cycles under ITER relevant conditions without failure. However, the reliability of the diffusion bonded Joint remains a serious issue.

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Autonomous, teleoperated, and shared control of robot systems

Anderson, Robert J.

This paper illustrates how different modes of operation such as bilateral teleoperation, autonomous control, and shared control can be described and implemented using combinations of modules in the SMART robot control architecture. Telerobotics modes are characterized by different ``grids`` of SMART icons, where each icon represents a portion of run-time code that implements a passive control law. By placing strict requirements on the module`s input-output behavior and using scattering theory to develop a passive sampling technique, a flexible, expandable telerobot architecture is achieved. An automatic code generation tool for generating SMART systems is also described.

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Transportation technology at Sandia

Mora, Carl J.

Industrial and military activities in the US produce large amounts of hazardous mixed waste, which includes both radioactive and toxic substances. The already overburdened environment is faced with the task of safely disposing of these complex wastes. A very important aspect of this effort is the safe and economical transportation of radioactive and toxic chemical wastes to projected repositories. Movement of wastes to the repository sites is accomplished by a combination of truck, rail, ship, and air. The DOE directs transportation activities including cask development technology for use in single or multimode transport. Sandia National Laboratories` Transportation Technology programs provide the technology and know-how to support DOE in achieving safe, efficient, and economical packaging and transportation of nuclear and other hazardous waste materials. This brochure describes the Transportation Technology programs and the specialized techniques and capabilities they offer to prospective users.

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Fifth wheel installation, S97556, Issue H

O'Canna, Myra L.

This report consists of one engineering drawing showing the design of the Fifth Wheel System for a semi-tractor trailer truck. Notes on the drawing give instructions for installation of some items, references to other drawings and instructions, and testing procedures.

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Fifth wheel modification assembly, Issue U

O'Canna, Myra L.

This report consists of one engineering drawing showing modifications to the Fifth Wheel System for a semi-tractor trailer truck. Notes give instructions for installation of some items, where other items may be purchased, testing instructions, and shipping instructions.

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Recent progress in the photovoltaic manufacturing technology project (PVMaT)

Ruby, Douglas S.

The Photovoltaic Manufacturing Technology (PVMaT) Project was initiated in 1990 to help the US photovoltaic (PV) industry extend its world leadership role in manufacturing and commercially developing PV modules and systems. It is being conducted in several phases, staggered to support industry progress. The four most recently awarded subcontracts (Phase 2B) are now completing their first year of research. They include two subcontracts on CdTe, one on Spheral Solar[trademark] Cells, and one on cast polysilicon. These subcontracts represent new technology additions to the PVMaT Project. Subcontracts initiated in earlier phases are nearing completion, and their progress is summarized. An additional phase of PVMaT, Phase 4A, is being initiated which will emphasize product-driven manufacturing research and development. The intention of Phase 4A is to emphasize improvement and cost reduction in the manufacture of full-system PV products. The work areas may include, but are not limited to, issues such as improvement of module manufacturing processes; system and system component packaging, integration, manufacturing, and assembly; product manufacturing flexibility; and balance-of-system development with the goal of product manufacturing improvements.

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Finite-element analyses of blade and slot coating flows using an implicit pseudo-solid domain mapping technique coupled with unstructured grids

Chen, Ken S.

In coating processes (e.g. in blade coating) the flow domain inherently contains free surfaces and three-phase contact lines, and characteristic length scales of flow features in the dimension transverse to the web-movement vary by an order of magnitude or more from a fraction of a millimeter or more to tens of microns or less). The presence of free surfaces and three-phase contact lines, and the sudden changes of flow geometry and directions create difficulties in theoretical analyses of such flows. Though simulations of coating flows via finite-element methods using structured grids have been reportedly demonstrated in the literature, achieving high efficiency of such numerical experiments remains a grand challenge -- mainly due to difficulties in local mesh-refinement and in avoiding unacceptably distorted grids. High efficiency of computing steady flow fields under various process conditions is crucial in shortening turn-around time in design and optimization of coating-flow processes. In this paper we employ a fully-implicit, pseudo-solid, domain mapping technique coupled with unstructured meshes to analyze blade and slot coating flows using Galerkin`s method with finite element basis functions. We demonstrate the robustness and efficiency of our unique technique in circumventing shortcomings of mesh-motion schemes currently being used in the coating-flow research community. Our goal is to develop an efficient numerical tool, together with a suitable optimization toolkit, that can be used routinely in design and optimization of coating-flow processes.

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Solar Two

O'Canna, Myra L.

This is a brief report about the Solar One and Solar Two instrument-energy-producing projects and the commercialization strategy for the Power Towers

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The Valles natural analogue project

Stockman, Harlan W.

The contact between an obsidian flow and a steep-walled tuff canyon was examined as an analogue for a highlevel waste repository. The analogue site is located in the Valles Caldera in New Mexico, where a massive obsidian flow filled a paleocanyon in the Battleship Rock tuff. The obsidian flow provided a heat source, analogous to waste panels or an igneous intrusion in a repository, and caused evaporation and migration of water. The tuff and obsidian samples were analyzed for major and trace elements and mineralogy by INAA, XRF, X-ray diffraction; and scanning electron microscopy and electron microprobe. Samples were also analyzed for D/H and {sup 39}Ar/{sup 4O} isotopic composition. Overall,the effects of the heating event seem to have been slight and limited to the tuff nearest the contact. There is some evidence of devitrification and migration of volatiles in the tuff within 10 meters of the contact, but variations in major and trace element chemistry are small and difficult to distinguish from the natural (pre-heating) variability of the rocks.

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MELCOR 1.8.3 assessment: CSE containment spray experiments

Kmetyk, Lubomyra N.

MELCOR is a fully integrated, engineering-level computer code, being developed at Sandia National Laboratories for the USNRC, that models the entire spectrum of severe accident phenomena in a unified framework for both BWRs and PWRS. As part, of an ongoing assessment program, the MELCOR computer code has been used to analyze a series of containment spray tests performed in the Containment Systems Experiment (CSE) vessel to evaluate the performance of aqueous sprays as a means of decontaminating containment atmospheres. Basecase MELCOR results are compared with test data, and a number of sensitivity studies on input modelling parameters and options in both the spray package and the associated aerosol washout and atmosphere decontamination by sprays modelled in the radionuclide package have been done. Time-step and machine-dependency calculations were done to identify whether any numeric effects exist in these CSE assessment analyses. A significant time-step dependency due to an error in the spray package coding was identified and eliminated. A number of other code deficiencies and inconveniences also are noted.

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Dynamic properties of Indiana, Fort Knox and Utah test range limestones and Danby Marble over the stress range 1 to 20 GPa

Furnish, Michael D.

The responses of the following carbonate materials to shock loading and release have been measured: Indiana limestone (18% porosity; saturated and dry), Jeffersonville/Louisville Limestones (Fort Knox limestone) (variable dolomitization, low porosity), Danby Marble (essentially pure calcite; low porosity), and a limestone from the Utah Test and Training Range (low porosity, with 22% silica). Various experimental configurations were used, some optimized to yield detailed waveform information, others to yield a clean combination of Hugoniot states and release paths. All made use of velocity interferometry as a primary diagnostic. The stress range of 0 - 20 GPa was probed (in most cases, emphasizing the stress range 0 -10 GPa). The primary physical processes observed in this stress regime were material strength, porosity, and polymorphic phase transitions between the CaCO{sub 3} phases I, II, III and VI. Hydration was also a significant reaction under certain conditions. The Indiana Limestone studies in particular represent a significant addition to the low-pressure database for porous limestone. Temperature dependence and the effect of freezing were assessed for the Fort Knox limestone. Experimental parameters and detailed results are provided for the 42 impact tests in this series.

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Comparison of stress-measuring techniques at the DNA-UTP site, Rodgers Hollow, Kentucky

Finley, Ray E.

The Defense Nuclear Agency (DNA) is developing explosives technology through its Underground Technology Program (UTP). Sandia National Laboratories (SNL) has supported the DNA by conducting research to characterize the in situ stress and rock mass deformability at one of the UTP underground sites at Rodgers Hollow, near Louisville, Kentucky on the Fort Knox Military Reservation. The purpose of SNL`s testing was to determine the in situ stress using three different measurement techniques and, if possible, to estimate the rock mass modulus near the underground opening. The three stress-measuring techniques are (1) borehole deformation measurements using overcoring, (2) Anelastic Strain Recovery (ASR) complemented by laboratory ultrasonic and mechanical properties testing, and (3) the in situ flatjack technique using cancellation pressure. Rock mass modulus around the underground opening was estimated using the load deformation history of the flatjack and surrounding rock. Borehole deformation measurements using the overcoring technique probably represent the most reliable method for in situ stress determination in boreholes up to 50 ft (15 m) deep in competent rock around an isolated excavation. The technique is used extensively by the tunneling and mining industries. The ASR technique is also a core-based technique and is used in the petroleum and natural gas industries for characterization of in situ stress from deep boreholes. The flatjack technique has also been used in the tunneling and mining industries, and until recently has been limited to measurement of the stress immediately around the excavation. Results from the flatjack technique must be further analyzed to calculate the in situ stress in the far field.

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Hydrogen Trailer Storage Facility (Building 878). Consequence analysis

Wood, C.L.

The Department of Energy Order 5500.3A requires facility-specific hazards assessments be prepared, maintained, and used for emergency planning purposes. This consequence analysis documents the impact that a hydrogen accident could have to employees, the general public, and nearby facilities. The computer model ARCHIE was utilized to determine discharge rates, toxic vapor dispersion analyses, flammable vapor cloud hazards, explosion hazards, and flame jets for the Hydrogen Trailer Storage Facility located at Building 878. To determine over pressurization effects, hand calculations derived from the Department of the Air Force Manual, ``Structures to Resist the Effects of Accidental Explosions,`` were utilized. The greatest distances at which a postulated facility event will produce the Lower Flammability and the Lower Detonation Levels are 1,721 feet and 882 feet, respectively. The greatest distance at which 10.0 psi overpressure (i.e., total building destruction) is reached is 153 feet.

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Sandia Administrative Micrographics Facility, Building 802: Hazards assessment document

Swihart, A.

The Department of Energy Order 5500.3A requires facility-specific hazards assessments be prepared, maintained, and used for emergency planning purposes. This hazards assessment document describes the chemical and radiological hazards associated with the Sandia Administrative Micrographics Facility, Building 802. The entire inventory was screened according to the potential airborne impact to onsite and offsite individuals. The air dispersion model, ALOHA, estimated pollutant concentrations downwind from the source of a release, taking into consideration the toxicological and physical characteristics of the release site, the atmospheric conditions, and the circumstances of the release. The greatest distance at which a postulated facility event will produce consequences exceeding the Early Severe Health Effects threshold is 33 meters. The highest emergency classification is a Site Area Emergency. The Emergency Planning Zone is 75 meters.

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Test results: SEGS LS-2 solar collector

Kolb, Gregory J.

A SEGS LS-2 parabolic trough solar collector was tested to determine the collector efficiency and thermal losses with two types of receiver selective coatings, combined with three different receiver configurations: glass envelope with either vacuum or air in the receiver annulus, and glass envelope removed from the receiver. As expected, collector performance was significantly affected by each variation in receiver configuration. Performance decreased when the cermet selective coating was changed to a black chrome coating, and progressively degraded as air was introduced into the vacuum annulus, and again when the glass envelope was removed from the receiver. For each receiver configuration, performance equations were derived relating collector efficiency and thermal losses to the operating temperature. For the bare receiver (no glass envelope) efficiency and thermal losses are shown as a function of wind speed. An incident angle modifier equation was also developed for each receiver case. Finally, equations were derived showing collector performance as a function of input insolation value, incident angle, and operating temperature. Results from the experiments were compared with predictions from a one-dimensional analytical model of the solar receiver. Differences between the model and experiment were generally within the band of experimental uncertainty.

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Epitaxial Pb(Zr{sub 0.40}Ti{sub 0.60})O{sub 3}/SrRuO{sub 3} and PbTiO{sub 3}/SrRuO{sub 3} multilayer thin films prepared by MOCVD and rf sputtering

Dimos, Duane B.

Epitaxial SrRuO{sub 3} thin films were deposited by RF sputtering on SrTiO{sub 3} or MgO substrates for use as underlying electrodes. On these conductive substrates, epitaxial Pb(Zr{sub 0.35}Ti{sub 0.65})O{sub 3} (PZT) and PbTiO{sub 3} (PT) thin films were, deposited by metalorganic chemical vapor deposition (MOCVD). X-ray diffraction (XRD), RBS channeling (RBS), transmission electron microscopy (TEM) and optical waveguiding were used to characterize phase, microstructure, defect structure, refractive index, and film thickness of the deposited films. The PZT and PT films were epitaxial and c-axis oriented. 90{degree} domains, interfacial misfit dislocations and dislocations and threading dislocations were the primary structural defects, and the films showed a 70% RBS channeling reduction. Hysteresis and dielectric measurements of epitaxial PZT ferroelectric capacitor structures formed using evaporated Ag or ITO glass top electrode showed: a remanent polarization of 46.2 mC/cm{sup 2}, a coercive field of 54.9 KV/cm, a dielectric constant of 410, a bipolar resistivity of {approximately}5.8 {times} 10{sup 9} {Omega}-cm at a field of 275 KV/cm, and a breakdown strength of >400 KV/cm.

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Studies of thermohydrologic flow processes using TOUGH2. Yucca Mountain Site Characterization Project

Ho, Clifford K.

Coupled thermal and hydrologic flow processes have been recognized as important factors in the evaluation of Yucca Mountain as a potential repository for high-level radioactive wastes. As a result, several models and numerical codes such as TOUGH2 have been used to investigate the thermohydrologic conditions near a potential nuclear waste repository. However, very few of these models have been tested through laboratory or field scale studies. This work has therefore focused on modeling well-controlled experiments of non-isothermal flow processes in porous media at different scales to serve two primary objectives: (1) identify processes that are potentially important to thermal and hydrologic transport at Yucca Mountain and (2) build confidence in models and codes through combined experimental and numerical studies of thermohydrologic behavior at different scales and conditions. In this report, three independent studies of thermohydrologic flow processes at laboratory and field scales are presented. The experiments and field studies that are presented here were performed independently of this work. The main focus of this report was to use the numerical code TOUGH2 to simulate the non-isothermal flow behavior observed in each experiment to generate understanding of the thermohydrologic processes and to gain confidence in the code. TOUGH2 was chosen due to its current use in calculations associated with Yucca Mountain and its capability of modeling the coupled transport of air, water, vapor, and heat in porous media.

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High heat flux testing capabilities at Sandia National Laboratories, New Mexico

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Youchison, Dennis L.

High heat flux testing for the United States fusion power program is the primary mission of the Plasma Materials Test Facility (PMTF) located at Sandia National Laboratories - New Mexico. This facility, which is owned by the United States Department of Energy, has been in operation for over 17 years and has provided much of the high heat flux data used in the design and evaluation of plasma facing components for many of the world's magnetic fusion, tokamak experiments. In addition to domestic tokamaks such as Tokamak Fusion Test Reactor (TFTR) at Princeton and the DIII-D tokamak at General Atomics, components for international experiments like TEXTOR, Tore-Supra, and JET also have been tested at the PMTF. High heat flux testing spans a wide spectrum including thermal shock tests on passively cooled materials, thermal response and thermal fatigue tests on actively cooled components, critical heat flux-burnout tests, braze reliability tests and safety related tests. The objective of this article is to provide a brief overview of the high heat flux testing capabilities at the PMTF and describe a few of the experiments performed over the last year.

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Analyses of releases due to drilling at the potential Yucca Mountain repository

High Level Radioactive Waste Management - Proceedings of the Annual International Conference

Barnard, R.

Radionuclide releases due to drilling into the potential Yucca Mountain nuclear-waste repository have been evaluated as part of a recent total-system performance assessment. The probability that a drilling event intersects a waste package is a function of the sizes of the drill bit and the waste package, and the density of placement of the containers in the repository. The magnitude of the releases is modeled as a random function that also depends on the amount of decay the radionuclides have undergone. Four cases have been analyzed, representing the combinations of two waste-package designs (small-capacity, thin-wall, vertically emplaced; and large-capacity, thick-wall, horizontally emplaced) and two repository layouts (lower thermal power dissipation, low waste-package placement density; and higher thermal power dissipation, high waste-package placement density). The results show a fairly pronounced dependence on waste-package design and slight dependence on repository layout. Given the assumptions in the model, releases from the larger containers are 4-5 times greater than from the smaller packages.

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Evaluation of Transparent Insulation Materials in Flat Plate Collectors

Emrich, Carol; Coffman, Roy

Polycarbonate rectangular honeycomb and acrylic capillary honeycomb, two types of transparent insulation material, were tested in flat-plate collectors. The honeycomb was inserted between the cover plate and the absorber, leaving a 1-cm air gap above the absorber to decouple radiative and conductive heat-transfer modes. Four 4 by 8 ft. collectors with selective black chrome absorbers were evaluated side by side using ASHRAE Standard 93-1986. They differed in thickness and type of material as follows: 1) no insulation material, 2) 1 in. of polycarbonate, 3) 4-in. of polycarbonate, and 4) 4 in. of acrylic honeycomb. Another set of tests was completed using absorbers coated with moderately selective black paint, and a third set with flat-black paint. A collector containing a selective chrome absorber and 4 in. of acrylic honeycomb achieved the best thermal performance. The amount of improvement in thermal performance was greatest when transparent insulation material was added to collectors with flat-black absorbers, and it decreased as absorber selectivity increased. Since small-cell honeycomb improves thermal performance by suppressing both convective and radiative transfer, combination with selective coatings is partially redundant because they are poor emitters. Also, the unacceptably low melting temperature of these materials preclude them from withstanding even a wet stagnation, thereby rendering this application impractical.

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Results 93626–93650 of 96,771
Results 93626–93650 of 96,771