Publications

Olsson, R.H., Greth, K.D., Nordquist, C., Shul, R.J., Wiwi, M., Plut, T., Young, T., & Young, T. (2012). Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance [Conference]. https://www.osti.gov/biblio/1117248

Greth, K.D., Nordquist, C., Shul, R.J., Wiwi, M., Plut, T., Olsson, R.H., & Olsson, R.H. (2012). Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance [Conference]. https://www.osti.gov/biblio/1118145

Chanchani, R., Nordquist, C., Olsson, R.H., Peterson, T., Shul, R.J., Ahlers, C.R., Plut, T., Patrizi, G., & Patrizi, G. (2011). A new wafer-level packaging technology for MEMS with hermetic micro-environment [Conference]. Proceedings - Electronic Components and Technology Conference. https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=79960435131&origin=inward

Olsson, R.H., Nordquist, C., Peterson, T., Shul, R.J., Ahlers, C.R., Plut, T., Patrizi, G., Chanchani, R., & Chanchani, R. (2011). A new Wafer-level Packaging Technology for MEMS with Hermetic Micro-environment [Conference]. https://www.osti.gov/biblio/1141164

Shul, R.J., Bauer, T.M., Plut, T., Sanchez, C.A., & Sanchez, C.A. (2010). XeF2 vapor phase silicon etch used in the fabrication of movable SOI structures [Conference]. https://www.osti.gov/biblio/1026980

Clevenger, J., Patrizi, G., Peterson, T., Cich, M., Baca, A.G., Klem, J.F., Plut, T., Hawkins, S.D., Sullivan, C.T., & Sullivan, C.T. (2007). Improved manufacturability of AlGaAs/GaAs Pnp heterojunction bipolar transistors [Conference]. https://www.osti.gov/biblio/908853

Clevenger, J.B., Patrizi, G., Peterson, T., Cich, M.J., Baca, A.G., Klem, J.F., Plut, T., Fortune, T.R., Hightower, M.S., Torres, D., Hawkins, S.D., Sullivan, C.T., & Sullivan, C.T. (2007). Improved manufacturability of AlGaAs/GaAs Pnp heterojunction bipolar transistors [Conference]. ECS Transactions. https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=45749152557&origin=inward

Dyck, C., Jokiel, B., Kraus, G.M., Plut, T., Cowan, W.D., Sullivan, C.T., & Sullivan, C.T. (2005). High performance packaging of RF MEMS switches and circuits [Conference]. https://www.osti.gov/biblio/943919

Dyck, C., Jokiel, B., Kraus, G.M., Plut, T., Cowan, W.D., Sullivan, C.T., & Sullivan, C.T. (2005). High performance packaging of RF MEMS switches and circuits [Conference]. https://www.osti.gov/biblio/966602

Nordquist, C., Sullivan, C.T., Finnegan, P.S., Goldsmith, C.L., Muyshondt, A., Pack, M., Dyck, C., Reines, I.C., Kraus, G.M., Plut, T., Sloan, G., & Sloan, G. (2003). A 10 to 15 GHz RF MEMS switched coupled coplanar strip filter. Proposed for publication in IEEE Microwave and Wireless Components Letters.. https://www.osti.gov/biblio/1005405

Sloan, G., Sullivan, C.T., Nordquist, C., Muyshondt, A., Pack, M., Finnegan, P.S., Dyck, C., Reines, I.C., Kraus, G.M., Plut, T., & Plut, T. (2002). A 6 to 9 GHz RF MEMS tunable coupled line filter [Conference]. https://www.osti.gov/biblio/913202