Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices
Anderson, Evan M.; Campbell, DeAnna M.; Ivie, Jeffrey A.; Schmucker, Scott W.; Lu, Ping L.; Gao, Xujiao G.; Tracy, Lisa A.; Arghavani, Reza A.; Bussmann, Ezra B.; Baczewski, Andrew D.; Lu, Tzu-Ming L.; Katzenmeyer, Aaron M.; Scrymgeour, David S.; Misra, Shashank M.
Abstract not provided.