| Low Power Sensor for NOx Detection |
11,573,217 |
02/07/2023
|
| Low Power Sensor for NOx Detection |
11,573,217 |
02/07/2023
|
| PIEZOELECTRIC DEFORMABLE PHOTONIC DEVICES |
11,569,431 |
01/31/2023
|
| PIEZOELECTRIC DEFORMABLE PHOTONIC DEVICES |
11,569,431 |
01/31/2023
|
| MINIATURIZED VACUUM PACKAGE AND METHODS OF MAKING SAME |
11,551,921 |
01/10/2023
|
| ENHANCED MICROFABRICATION USING ELECTROCHEMICAL TECHNIQUES |
11,549,903 |
01/10/2023
|
| ENHANCED MICROFABRICATION USING ELECTROCHEMICAL TECHNIQUES |
11,549,903 |
01/10/2023
|
| MINIATURIZED VACUUM PACKAGE AND METHODS OF MAKING SAME |
11,551,921 |
01/10/2023
|
| COMPACT LASER SOURCE WITH FREQUENCY MODULATORS GENERATING MULTIPLE LINES |
11,545,815 |
01/03/2023
|
| COMPACT LASER SOURCE WITH FREQUENCY MODULATORS GENERATING MULTIPLE LINES |
11,545,815 |
01/03/2023
|
| ANALOG VECTOR-MATRIX MULTIPLICATION BY CAPACITIVE ELEMENTS WITH RESISTIVE STATE STORAGE |
11,494,464 |
11/08/2022
|
| ANALOG VECTOR-MATRIX MULTIPLICATION BY CAPACITIVE ELEMENTS WITH RESISTIVE STATE STORAGE |
11,494,464 |
11/08/2022
|
| METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN |
11,482,660 |
10/25/2022
|
| METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN |
11,482,660 |
10/25/2022
|
| THERMALLY SENSITIVE IONIC REDOX TRANSISTOR |
11,450,802 |
09/20/2022
|
| THERMALLY SENSITIVE IONIC REDOX TRANSISTOR |
11,450,802 |
09/20/2022
|
| PHOTOLITHOGRAPHY OF ATOMIC LAYER RESIST |
11,424,135 |
08/23/2022
|
| PHOTOLITHOGRAPHY OF ATOMIC LAYER RESIST |
11,424,135 |
08/23/2022
|
| PHASE-WRAPPING METHOD FOR BEAM STEERING IN OPTICAL PHASED ARRAYS |
11,409,183 |
08/09/2022
|
| PHASE-WRAPPING METHOD FOR BEAM STEERING IN OPTICAL PHASED ARRAYS |
11,409,183 |
08/09/2022
|
| HYBRID PIEZOELECTRIC MICRORESONATOR |
11,387,802 |
07/12/2022
|
| TUNNELING FULL-WAVE INFRARED RECTENNA |
11,296,240 |
04/05/2022
|
| TUNNELING FULL-WAVE INFRARED RECTENNA |
11,296,240 |
04/05/2022
|
| ACTIVE SHUNT CAPACITANCE CANCELLING OSCILLATOR FOR RESONATORS |
11,171,604 |
11/09/2021
|
| ACTIVE SHUNT CAPACITANCE CANCELLING OSCILLATOR FOR RESONATORS |
11,171,604 |
11/09/2021
|
| OPTICAL COUPLER FOR HETEROGENEOUS INTEGRATION |
11,163,115 |
11/02/2021
|
| OPTICAL COUPLER FOR HETEROGENEOUS INTEGRATION |
11,163,115 |
11/02/2021
|
| TRAPPED ION PLATFORM WITH OPTICAL INPUT AND OUTPUT |
11,150,609 |
10/19/2021
|
| TRAPPED ION PLATFORM WITH OPTICAL INPUT AND OUTPUT |
11,150,609 |
10/19/2021
|
| Apparatus and method to measure semiconductor optical absorption using
microwave charge sensing |
11,125,700 |
09/21/2021
|
| Apparatus and method to measure semiconductor optical absorption using
microwave charge sensing |
11,125,700 |
09/21/2021
|
| Microfabricated ion trap chip with in situ radio-frequency sensing |
11,056,332 |
07/06/2021
|
| Microfabricated ion trap chip with in situ radio-frequency sensing |
11,056,332 |
07/06/2021
|
| Optical devices enabled by vertical dielectric Mie resonators |
11,017,186 |
05/25/2021
|
| Microfabricated ion trap chip with an integrated microwave antenna |
10,984,976 |
04/20/2021
|
| Dual frequency transceiver device |
10,984,300 |
04/20/2021
|
| Dual frequency transceiver device |
10,984,300 |
04/20/2021
|
| Microfabricated ion trap chip with an integrated microwave antenna |
10,984,976 |
04/20/2021
|
| Focusing transformers/filters in isotropic/anisotropic piezoelectrics |
10,979,018 |
04/13/2021
|
| Method of fabricating photosensitive devices with reduced
process-temperature budget |
10,910,508 |
02/02/2021
|
| Method of fabricating photosensitive devices with reduced
process-temperature budget |
10,910,508 |
02/02/2021
|
| Heterogeneously integrated electro-optic modulator |
10,788,689 |
09/29/2020
|
| Heterogeneously integrated electro-optic modulator |
10,788,689 |
09/29/2020
|
| Heterogeneously integrated electro-optic modulator |
10,788,689 |
09/29/2020
|
| Hybrid semiconductor-piezoacoustic radiofrequency device |
10,666,222 |
05/26/2020
|
| High density optical waveguide using hybrid spiral pattern |
10,663,662 |
05/26/2020
|
| High density optical waveguide using hybrid spiral pattern |
10,663,662 |
05/26/2020
|
| ScAIN etch mask for highly selective etching |
10,651,048 |
05/12/2020
|
| ScAIN etch mask for highly selective etching |
10,651,048 |
05/12/2020
|
| Active mechanical-environmental-thermal MEMS device for nanoscale
characterization |
10,641,733 |
05/05/2020
|
| Active mechanical-environmental-thermal MEMS device for nanoscale
characterization |
10,641,733 |
05/05/2020
|
| Kinematic chip to chip bonding |
10,620,377 |
04/14/2020
|
| Kinematic chip to chip bonding |
10,620,377 |
04/14/2020
|
| Fabrication of multilayered carbon MEMS devices |
10,570,010 |
02/25/2020
|
| Fabrication of multilayered carbon MEMS devices |
10,570,010 |
02/25/2020
|
| Supply-noise-rejecting current source |
10,566,936 |
02/18/2020
|
| Supply-noise-rejecting current source |
10,566,936 |
02/18/2020
|
| Regrowth method for fabricating wide-bandgap transistors, and devices made
thereby |
10,553,697 |
02/04/2020
|
| Regrowth method for fabricating wide-bandgap transistors, and devices made
thereby |
10,553,697 |
02/04/2020
|
| Thallium bromide (TIBr) semiconductors and devices with extended life
apparatus, methods, and system |
10,516,068 |
12/24/2019
|
| Thallium bromide (TIBr) semiconductors and devices with extended life
apparatus, methods, and system |
10,516,068 |
12/24/2019
|
| Magnetoelastically actuated MEMS device and methods for its manufacture |
10,510,945 |
12/17/2019
|
| Magnetoelastically actuated MEMS device and methods for its manufacture |
10,510,945 |
12/17/2019
|
| Evanescently coupled piezoelectric acoustic devices |
10,491,190 |
11/26/2019
|
| Non-inverting multi-mode oscillator |
10,483,912 |
11/19/2019
|
| Low-power MEMS wakeup system |
10,481,672 |
11/19/2019
|
| Low-power MEMS wakeup system |
10,481,672 |
11/19/2019
|
| Non-inverting multi-mode oscillator |
10,483,912 |
11/19/2019
|
| Systems and methods for interferometric end point detection for a focused
ion beam fabrication tool |
10,446,369 |
10/15/2019
|
| Systems and methods for interferometric end point detection for a focused
ion beam fabrication tool |
10,446,369 |
10/15/2019
|
| Coupled memristor devices to enable feedback control and sensing of
micro/nanoelectromechanical actuator and sensors |
10,392,243 |
08/27/2019
|
| Coupled memristor devices to enable feedback control and sensing of
micro/nanoelectromechanical actuator and sensors |
10,392,243 |
08/27/2019
|
| Regrowth method for fabricating wide-bandgap transistors, and devices made
thereby |
10,388,753 |
08/20/2019
|
| Regrowth method for fabricating wide-bandgap transistors, and devices made
thereby |
10,388,753 |
08/20/2019
|
| TRANCEIVERS AND RECEIVERS FOR DISCRETE-VARIABLE QUANTUM KEY DISTRIBUTION |
10,341,096 |
07/02/2019
|
| TRANCEIVERS AND RECEIVERS FOR DISCRETE-VARIABLE QUANTUM KEY DISTRIBUTION |
10,341,096 |
07/02/2019
|
| Bus based timed input output module |
10,289,573 |
05/14/2019
|
| Bus based timed input output module |
10,289,573 |
05/14/2019
|
| Variable bandwidth filter |
10,267,896 |
04/23/2019
|
| Variable bandwidth filter |
10,267,896 |
04/23/2019
|
| Optical microresonator device with thermal isolation |
10,247,676 |
04/02/2019
|
| Optical microresonator device with thermal isolation |
10,247,676 |
04/02/2019
|
| Communication device and method of making the same |
10,235,614 |
03/19/2019
|
| Communication device and method of making the same |
10,235,614 |
03/19/2019
|
| Via configuration for wafer-to-wafer interconnection |
10,224,312 |
03/05/2019
|
| Via configuration for wafer-to-wafer interconnection |
10,224,312 |
03/05/2019
|
| Hybrid CMOS-MEMS devices adapted for high-temperature operation and method
for their manufacture |
10,214,415 |
02/26/2019
|
| METHOD FOR SIMULTANEOUS MODIFICATION OF MULTIPLE SEMICONDUCTOR DEVICE FEATURES |
10,217,704 |
02/26/2019
|
| Hybrid CMOS-MEMS devices adapted for high-temperature operation and method
for their manufacture |
10,214,415 |
02/26/2019
|
| Hybrid CMOS-MEMS devices adapted for high-temperature operation and method
for their manufacture |
10,214,415 |
02/26/2019
|
| Gm-C filter and multi-phase clock circuit |
10,181,840 |
01/15/2019
|
| Gm-C filter and multi-phase clock circuit |
10,181,840 |
01/15/2019
|
| Passive radiative cooling of a body |
10,173,792 |
01/08/2019
|
| Passive radiative cooling of a body |
10,173,792 |
01/08/2019
|
| Defect screening method for electronic circuits and circuit components
using power spectrum anaylysis |
10,145,894 |
12/04/2018
|
| Defect screening method for electronic circuits and circuit components
using power spectrum anaylysis |
10,145,894 |
12/04/2018
|
| Trimming method for microresonators and microresonators made thereby |
10,148,244 |
12/04/2018
|
| Trimming method for microresonators and microresonators made thereby |
10,148,244 |
12/04/2018
|
| Microsystems-based method and apparatus for passive detection and
processing of radio-frequency signals |
10,141,495 |
11/27/2018
|
| Microsystems-based method and apparatus for passive detection and
processing of radio-frequency signals |
10,141,495 |
11/27/2018
|
| Vertically integrated optoelectronics package for MEMS devices |
10,139,564 |
11/27/2018
|
| Vertically integrated optoelectronics package for MEMS devices |
10,139,564 |
11/27/2018
|
| Scanning method for screening of electronic devices |
10,094,874 |
10/09/2018
|
| Graphene heat dissipating structure |
10,096,536 |
10/09/2018
|
| Graphene heat dissipating structure |
10,096,536 |
10/09/2018
|
| Scanning method for screening of electronic devices |
10,094,874 |
10/09/2018
|
| System on chip module configured for event-driven architecture |
10,089,160 |
10/02/2018
|
| Supply-noise-rejecting current source |
10,090,826 |
10/02/2018
|
| Supply-noise-rejecting current source |
10,090,826 |
10/02/2018
|
| System on chip module configured for event-driven architecture |
10,089,160 |
10/02/2018
|
| Method and apparatus of enhanced thermoelectric cooling and power
conversion |
10,072,879 |
09/11/2018
|
| Method and apparatus of enhanced thermoelectric cooling and power
conversion |
10,072,879 |
09/11/2018
|
| Systems and methods to maintain optimum stoichiometry for reactively
sputtered films |
10,074,522 |
09/11/2018
|
| Optomechanical force sensors, cantilevers, and systems thereof |
10,031,158 |
07/24/2018
|
| Optomechanical force sensors, cantilevers, and systems thereof |
10,031,158 |
07/24/2018
|
| Guided wave opto-acoustic device |
10,025,123 |
07/17/2018
|
| Guided wave opto-acoustic device |
10,025,123 |
07/17/2018
|
| Methods for suppressing spurious modes in microresonators |
10,009,002 |
06/26/2018
|
| Flexible packaging for microelectronic devices |
9,978,895 |
05/22/2018
|
| Flexible packaging for microelectronic devices |
9,978,895 |
05/22/2018
|
| Packaging system with cleaning channel and method of making the same |
9,972,553 |
05/15/2018
|
| Packaging system with cleaning channel and method of making the same |
9,972,553 |
05/15/2018
|
| Attenuation of spurious responses in electromechanical filters |
9,941,857 |
04/10/2018
|
| Attenuation of spurious responses in electromechanical filters |
9,941,857 |
04/10/2018
|
| Superlattice photodetector having improved carrier mobility |
9,929,293 |
03/27/2018
|
| Superlattice photodetector having improved carrier mobility |
9,929,293 |
03/27/2018
|
| Diode and method of making the same |
9,917,149 |
03/13/2018
|
| Transceivers and receivers for quantum key distribution and methods
pertaining thereto |
9,906,311 |
02/27/2018
|
| Transceivers and receivers for quantum key distribution and methods
pertaining thereto |
9,906,311 |
02/27/2018
|
| Gallium beam lithography for superconductive structure formation |
9,882,113 |
01/30/2018
|
| Gallium beam lithography for superconductive structure formation |
9,882,113 |
01/30/2018
|
| Method and system for gas flow mitigation of molecular contamination of
optics |
9,874,512 |
01/23/2018
|
| Second harmonic generation in resonant optical structures |
9,865,987 |
01/09/2018
|
| Second harmonic generation in resonant optical structures |
9,865,987 |
01/09/2018
|
| Ion-barrier for memristors/ReRAM and methods thereof |
9,831,427 |
11/28/2017
|
| Electroabsorption optical modulator |
9,823,497 |
11/21/2017
|
| Method of making thermally-isolated silicon-based integrated circuits |
9,824,932 |
11/21/2017
|
| Electroabsorption optical modulator |
9,823,497 |
11/21/2017
|
| Method of making thermally-isolated silicon-based integrated circuits |
9,824,932 |
11/21/2017
|
| Processing device with self-scrubbing logic |
9,792,184 |
10/17/2017
|
| System on chip module configured for event-driven architecture |
9,792,250 |
10/17/2017
|
| System on chip module configured for event-driven architecture |
9,792,250 |
10/17/2017
|
| Processing device with self-scrubbing logic |
9,792,184 |
10/17/2017
|
| Integrated unaligned resonant modulator tuning |
9,780,870 |
10/03/2017
|
| Integrated unaligned resonant modulator tuning |
9,780,870 |
10/03/2017
|
| Adiabatic/diabatic polarization beam splitter |
9,759,862 |
09/12/2017
|
| Apparatus for assembly of microelectronic devices |
9,763,370 |
09/12/2017
|
| Apparatus for assembly of microelectronic devices |
9,763,370 |
09/12/2017
|
| Adiabatic/diabatic polarization beam splitter |
9,759,862 |
09/12/2017
|
| Adiabatic/diabatic polarization beam splitter |
9,759,862 |
09/12/2017
|
| Fast process flow, on-wafer interconnection and singulation for MEPV |
9,748,415 |
08/29/2017
|
| Fast process flow, on-wafer interconnection and singulation for MEPV |
9,748,415 |
08/29/2017
|
| Avalanche diode having reduced dark current and method for its manufacture |
9,748,429 |
08/29/2017
|
| Avalanche diode having reduced dark current and method for its manufacture |
9,748,429 |
08/29/2017
|
| Integrated optical transceiver with electronically controlled optical
beamsteering |
9,740,079 |
08/22/2017
|
| Integrated optical transceiver with electronically controlled optical
beamsteering |
9,740,079 |
08/22/2017
|
| Graphene heat dissipating structure |
9,721,867 |
08/01/2017
|
| Graphene heat dissipating structure |
9,721,867 |
08/01/2017
|
| On-chip photonic-phononic emitter-receiver apparatus |
9,696,492 |
07/04/2017
|
| On-chip photonic-phononic emitter-receiver apparatus |
9,696,492 |
07/04/2017
|
| Fast frequency divider circuit using combinational logic |
9,667,231 |
05/30/2017
|
| Wafer scale oblique angle plasma etching |
9,659,797 |
05/23/2017
|
| Wafer scale oblique angle plasma etching |
9,659,797 |
05/23/2017
|
| Method of making a silicon nanowire device |
9,660,026 |
05/23/2017
|
| Method of making a silicon nanowire device |
9,660,026 |
05/23/2017
|
| Thermally-isolated silicon-based integrated circuits and related methods |
9,646,874 |
05/09/2017
|
| Thermally-isolated silicon-based integrated circuits and related methods |
9,646,874 |
05/09/2017
|
| Single crystal micromechanical resonator |
9,641,154 |
05/02/2017
|
| Single crystal micromechanical resonator |
9,641,154 |
05/02/2017
|
| Device-packaging method and apparatus for optoelectronic circuits |
9,632,261 |
04/25/2017
|
| Device-packaging method and apparatus for optoelectronic circuits |
9,632,261 |
04/25/2017
|
| Reconfigurable optical-to-optical frequency conversion method and
apparatus |
9,625,785 |
04/18/2017
|
| Reconfigurable optical-to-optical frequency conversion method and
apparatus |
9,625,785 |
04/18/2017
|
| Method to fabricate micro and nano diamond devices |
9,620,596 |
04/11/2017
|
| Resonant optical device with a microheater |
9,612,458 |
04/04/2017
|
| Resonant optical device with a microheater |
9,612,458 |
04/04/2017
|
| Visible light laser voltage probing on thinned substrates |
9,599,667 |
03/21/2017
|
| Visible light laser voltage probing on thinned substrates |
9,599,667 |
03/21/2017
|
| Plasmon-assisted optical vias for photonic ASICS |
9,599,781 |
03/21/2017
|
| Plasmon-assisted optical vias for photonic ASICS |
9,599,781 |
03/21/2017
|
| Tuneable photonic device including an array of metamaterial resonators |
9,594,266 |
03/14/2017
|
| Tuneable photonic device including an array of metamaterial resonators |
9,594,266 |
03/14/2017
|
| Fast process flow, on-wafer interconnection and singulation for MEPV |
9,559,219 |
01/31/2017
|
| Fast process flow, on-wafer interconnection and singulation for MEPV |
9,559,219 |
01/31/2017
|
| Photoelectrochemically driven self-assembly method |
9,548,411 |
01/17/2017
|
| Methods of depositing an alpha-silicon-carbide-containing film at low
temperature |
9,546,420 |
01/17/2017
|
| Methods of depositing an alpha-silicon-carbide-containing film at low
temperature |
9,546,420 |
01/17/2017
|
| Photoelectrochemically driven self-assembly method |
9,548,411 |
01/17/2017
|
| Silicon nanowire device and method for its manufacture |
9,536,947 |
01/03/2017
|
| Silicon nanowire device and method for its manufacture |
9,536,947 |
01/03/2017
|
| Single crystal micromechanical resonator and fabrication methods thereof |
9,525,398 |
12/20/2016
|
| Single crystal micromechanical resonator and fabrication methods thereof |
9,525,398 |
12/20/2016
|
| Transparent contacts for stacked compound photovoltaic cells |
9,508,881 |
11/29/2016
|
| Transparent contacts for stacked compound photovoltaic cells |
9,508,881 |
11/29/2016
|
| High-speed optical phase-shifting apparatus |
9,488,854 |
11/08/2016
|
| High-speed optical phase-shifting apparatus |
9,488,854 |
11/08/2016
|
| Methods for dry etching semiconductor devices |
9,484,216 |
11/01/2016
|
| Methods for dry etching semiconductor devices |
9,484,216 |
11/01/2016
|
| Guided-wave photodiode using through-absorber quantum-well-intermixing and
methods thereof |
9,477,040 |
10/25/2016
|
| Guided-wave photodiode using through-absorber quantum-well-intermixing and
methods thereof |
9,477,040 |
10/25/2016
|
| Power meter ratio method of stabilizing a resonant modulator |
9,467,233 |
10/11/2016
|
| Power meter ratio method of stabilizing a resonant modulator |
9,467,233 |
10/11/2016
|
| Zero-power receiver |
9,460,321 |
10/04/2016
|
| Silicon force sensor and method of using the same |
9,459,161 |
10/04/2016
|
| Zero-power receiver |
9,460,321 |
10/04/2016
|
| Silicon force sensor and method of using the same |
9,459,161 |
10/04/2016
|
| Fabrication method for small-scale structures with non-planar features |
9,448,336 |
09/20/2016
|
| Microfluidic pressure amplifier circuits and electrostatic gates for
pneumatic microsystems |
9,447,895 |
09/20/2016
|
| Microfluidic pressure amplifier circuits and electrostatic gates for
pneumatic microsystems |
9,447,895 |
09/20/2016
|
| Fabrication method for small-scale structures with non-planar features |
9,448,336 |
09/20/2016
|
| Integrated field emission array for ion desorption |
9,425,019 |
08/23/2016
|
| Multilevel resistive information storage and retrieval |
9,412,446 |
08/09/2016
|
| Two-dimensional APDs and SPADs and related methods |
9,391,225 |
07/12/2016
|
| Two-dimensional APDs and SPADs and related methods |
9,391,225 |
07/12/2016
|
| Methods and apparatus for use with extreme ultraviolet light having
contamination protection |
9,389,180 |
07/12/2016
|
| Silicon force sensor |
9,383,270 |
07/05/2016
|
| Thermo-optically tuned photonic resonators with concurrent electrical
connection and thermal isolation |
9,366,822 |
06/14/2016
|
| Thermo-optically tuned photonic resonators with concurrent electrical
connection and thermal isolation |
9,366,822 |
06/14/2016
|
| Microresonator electrode design |
9,337,800 |
05/10/2016
|
| Methods for resistive switching of memristors |
9,336,870 |
05/10/2016
|
| Method and apparatus of highly linear optical modulation |
9,329,413 |
05/03/2016
|
| Method and apparatus of highly linear optical modulation |
9,329,413 |
05/03/2016
|
| Integrated circuit test-port architecture and method and apparatus of
test-port generation |
9,311,444 |
04/12/2016
|
| Integrated circuit test-port architecture and method and apparatus of
test-port generation |
9,311,444 |
04/12/2016
|
| Programmable electroacoustic filter apparatus and method for its
manufacture |
9,276,557 |
03/01/2016
|
| Processing device with self-scrubbing logic |
9,274,895 |
03/01/2016
|
| Processing device with self-scrubbing logic |
9,274,895 |
03/01/2016
|
| Programmable electroacoustic filter apparatus and method for its
manufacture |
9,276,557 |
03/01/2016
|
| Guided wave opto-acoustic device |
9,268,092 |
02/23/2016
|
| Methods and apparatus of entangled photon generation using four-wave
mixing |
9,268,195 |
02/23/2016
|
| Apparatuses and methods for tuning center frequencies |
9,270,281 |
02/23/2016
|
| Methods and apparatus of entangled photon generation using four-wave
mixing |
9,268,195 |
02/23/2016
|
| Apparatuses and methods for tuning center frequencies |
9,270,281 |
02/23/2016
|
| Guided wave opto-acoustic device |
9,268,092 |
02/23/2016
|
| Methods of producing strain in a semiconductor waveguide and related
devices |
9,261,647 |
02/16/2016
|
| Methods of producing strain in a semiconductor waveguide and related
devices |
9,261,647 |
02/16/2016
|
| Particle control near reticle and optics using showerhead |
9,244,368 |
01/26/2016
|
| Athermalization of resonant optical devices via thermo-mechanical feedback |
9,239,431 |
01/19/2016
|
| Athermalization of resonant optical devices via thermo-mechanical feedback |
9,239,431 |
01/19/2016
|
| Thermally tuneable optical modulator adapted for differential signaling |
9,235,065 |
01/12/2016
|
| Thermally tuneable optical modulator adapted for differential signaling |
9,235,065 |
01/12/2016
|
| Fully integrated and encapsulated micro-fabricated vacuum diode and method
of manufacturing same |
9,202,657 |
12/01/2015
|
| Tuning method for microresonators and microresonators made thereby |
9,203,134 |
12/01/2015
|
| Tuning method for microresonators and microresonators made thereby |
9,203,134 |
12/01/2015
|
| Fabrication of small-scale structures with non-planar features |
9,190,736 |
11/17/2015
|
| Power spectrum analysis for defect screening in integrated circuit devices |
9,188,622 |
11/17/2015
|
| Three-dimensional stacked structured ASIC devices and methods of
fabrication thereof |
9,190,392 |
11/17/2015
|
| Three-dimensional stacked structured ASIC devices and methods of
fabrication thereof |
9,190,392 |
11/17/2015
|
| Fabrication of small-scale structures with non-planar features |
9,190,736 |
11/17/2015
|
| Power spectrum analysis for defect screening in integrated circuit devices |
9,188,622 |
11/17/2015
|
| Methods and apparatus for cleaning objects in a chamber of an optical
instrument by generating reactive ions using photon radiation |
9,156,068 |
10/13/2015
|
| Low-voltage differentially-signaled modulators |
9,128,308 |
09/08/2015
|
| Systems and methods for controlling an operating wavelength |
9,127,983 |
09/08/2015
|
| Low-voltage differentially-signaled modulators |
9,128,308 |
09/08/2015
|
| Systems and methods for controlling an operating wavelength |
9,127,983 |
09/08/2015
|
| Method and apparatus of wide-angle optical beamsteering from a nanoantenna
phased array |
9,104,086 |
08/11/2015
|
| Method and apparatus of wide-angle optical beamsteering from a nanoantenna
phased array |
9,104,086 |
08/11/2015
|
| Methods and devices for maintaining a resonant wavelength of a photonic
microresonator |
9,081,135 |
07/14/2015
|
| Methods and devices for optimizing the operation of a semiconductor
optical modulator |
9,083,460 |
07/14/2015
|
| Methods and devices for maintaining a resonant wavelength of a photonic
microresonator |
9,081,135 |
07/14/2015
|
| Silicon photonic heater-modulator |
9,081,215 |
07/14/2015
|
| Silicon photonic heater-modulator |
9,081,215 |
07/14/2015
|
| Methods and devices for optimizing the operation of a semiconductor
optical modulator |
9,083,460 |
07/14/2015
|
| Passive thermo-optic feedback for robust athermal photonic systems |
9,063,354 |
06/23/2015
|
| Passive thermo-optic feedback for robust athermal photonic systems |
9,063,354 |
06/23/2015
|
| Electro-refractive photonic device |
9,052,535 |
06/09/2015
|
| Electro-refractive photonic device |
9,052,535 |
06/09/2015
|
| Separating semiconductor devices from substrate by etching graded
composition release layer disposed between semiconductor devices and
substrate including forming protuberances that reduce stiction |
9,029,239 |
05/12/2015
|
| Separating semiconductor devices from substrate by etching graded
composition release layer disposed between semiconductor devices and
substrate including forming protuberances that reduce stiction |
9,029,239 |
05/12/2015
|
| Protecting integrated circuits from excessive charge accumulation during
plasma cleaning of multichip modules |
9,013,046 |
04/21/2015
|
| Protecting integrated circuits from excessive charge accumulation during
plasma cleaning of multichip modules |
9,013,046 |
04/21/2015
|
| Membrane projection lithography |
8,981,337 |
03/17/2015
|
| Membrane projection lithography |
8,981,337 |
03/17/2015
|
| High-speed photonic modulator designs |
8,947,764 |
02/03/2015
|
| Processes for multi-layer devices utilizing layer transfer |
8,946,052 |
02/03/2015
|
| High-speed photonic modulator designs |
8,947,764 |
02/03/2015
|
| Processes for multi-layer devices utilizing layer transfer |
8,946,052 |
02/03/2015
|
| Method of forming through substrate vias (TSVs) and singulating and
releasing die having the TSVs from a mechanical support substrate |
8,906,803 |
12/09/2014
|
| Method of forming through substrate vias (TSVs) and singulating and
releasing die having the TSVs from a mechanical support substrate |
8,906,803 |
12/09/2014
|
| Structured wafer for device processing |
8,895,364 |
11/25/2014
|
| Structured wafer for device processing |
8,895,364 |
11/25/2014
|
| Memristor using a transition metal nitride insulator |
8,872,246 |
10/28/2014
|
| Method and apparatus for optical phase error correction |
8,822,959 |
09/02/2014
|
| Method and apparatus for optical phase error correction |
8,822,959 |
09/02/2014
|
| Method of manufacturing a fully integrated and encapsulated
micro-fabricated vacuum diode |
8,814,622 |
08/26/2014
|
| Micromachined force-balance feedback accelerometer with optical
displacement detection |
8,783,106 |
07/22/2014
|
| Plasmon absorption modulator systems and methods |
8,780,431 |
07/15/2014
|
| Plasmon absorption modulator systems and methods |
8,780,431 |
07/15/2014
|
| Full tape thickness feature conductors for EMI structures |
8,747,591 |
06/10/2014
|
| Infrared nanoantenna apparatus and method for the manufacture thereof |
8,750,653 |
06/10/2014
|
| Infrared nanoantenna apparatus and method for the manufacture thereof |
8,750,653 |
06/10/2014
|
| Full tape thickness feature conductors for EMI structures |
8,747,591 |
06/10/2014
|
| Optically transduced MEMS gyro device |
8,726,730 |
05/20/2014
|
| Structured wafer for device processing |
8,729,673 |
05/20/2014
|
| Parallel optical sampler |
8,730,562 |
05/20/2014
|
| Structured wafer for device processing |
8,729,673 |
05/20/2014
|
| Optically transduced MEMS gyro device |
8,726,730 |
05/20/2014
|
| Optical domain analog to digital conversion methods and apparatus |
8,725,004 |
05/13/2014
|
| Microscale autonomous sensor and communications module |
8,680,810 |
03/25/2014
|
| Microscale autonomous sensor and communications module |
8,680,810 |
03/25/2014
|
| Ovenized microelectromechanical system (MEMS) resonator |
8,669,823 |
03/11/2014
|
| Die singulation method |
8,623,744 |
01/07/2014
|
| Ultralow loss cavities and waveguides scattering loss cancellation |
8,625,939 |
01/07/2014
|
| Die singulation method |
8,623,744 |
01/07/2014
|
| Ultralow loss cavities and waveguides scattering loss cancellation |
8,625,939 |
01/07/2014
|
| System for active control of integrated resonant optical device wavelength |
8,615,173 |
12/24/2013
|
| System for active control of integrated resonant optical device wavelength |
8,615,173 |
12/24/2013
|
| Micro electro mechanical system optical switching |
8,611,706 |
12/17/2013
|
| Silicon photonics thermal phase shifter with reduced temperature range |
8,610,994 |
12/17/2013
|
| Silicon photonics thermal phase shifter with reduced temperature range |
8,610,994 |
12/17/2013
|
| MEMS packaging with etching and thinning of lid wafer to form lids and
expose device wafer bond pads |
8,597,985 |
12/03/2013
|
| Nano-optomechanical transducer |
8,600,200 |
12/03/2013
|
| MEMS packaging with etching and thinning of lid wafer to form lids and
expose device wafer bond pads |
8,597,985 |
12/03/2013
|
| Nano-optomechanical transducer |
8,600,200 |
12/03/2013
|
| Optical XOR gate |
8,582,931 |
11/12/2013
|
| Optical XOR gate |
8,582,931 |
11/12/2013
|
| Wafer-level packaging with compression-controlled seal ring bonding |
8,575,748 |
11/05/2013
|
| Wafer-level packaging with compression-controlled seal ring bonding |
8,575,748 |
11/05/2013
|
| Integrated field emission array for ion desorption |
8,536,564 |
09/17/2013
|
| Lateral Acoustic Wave Resonator Comprising a Suspended Membrane of Low Damping Resonator Material |
8,525,619 |
09/03/2013
|
| Microelectromechanical filter formed from parallel-connected lattice
networks of contour-mode resonators |
8,497,747 |
07/30/2013
|
| Method to determine the position-dependant metal correction factor for
dose-rate equivalent laser testing of semiconductor devices |
8,481,345 |
07/09/2013
|
| Method to determine the position-dependant metal correction factor for
dose-rate equivalent laser testing of semiconductor devices |
8,481,345 |
07/09/2013
|
| Die singulation method |
8,461,023 |
06/11/2013
|
| Die singulation method |
8,461,023 |
06/11/2013
|
| Microfabricated particle focusing device |
8,425,749 |
04/23/2013
|
| Method for fabricating a microelectromechanical resonator |
8,367,305 |
02/05/2013
|
| Optical set-reset latch |
8,363,990 |
01/29/2013
|
| Antifuse with a single silicon-rich silicon nitride insulating layer |
8,357,994 |
01/22/2013
|
| Lithographically defined microporous carbon structures |
8,349,547 |
01/08/2013
|
| Die singulation method and package formed thereby |
8,236,611 |
08/07/2012
|
| Die singulation method and package formed thereby |
8,236,611 |
08/07/2012
|
| Microelectromechanical (MEM) thermal actuator |
8,232,858 |
07/31/2012
|
| Microelectromechanical (MEM) thermal actuator |
8,232,858 |
07/31/2012
|
| Microelectromechanical Inertial Sensor |
8,205,497 |
06/26/2012
|
| Microelectromechanical Inertial Sensor |
8,205,497 |
06/26/2012
|
| Integrated optic vector-matrix multiplier |
8,027,587 |
09/27/2011
|
| Integrated optic vector-matrix multiplier |
8,027,587 |
09/27/2011
|
| Optical NOR gate |
8,014,639 |
09/06/2011
|
| Optical NOR gate |
8,014,639 |
09/06/2011
|
| Tunable surface plasmon devices |
8,009,356 |
08/30/2011
|
| Tunable surface plasmon devices |
8,009,356 |
08/30/2011
|
| Micromachined cutting blade formed from {211}-oriented silicon |
7,992,309 |
08/09/2011
|
| Optical NAND gate |
7,995,877 |
08/09/2011
|
| Micromachined cutting blade formed from {211}-oriented silicon |
7,992,309 |
08/09/2011
|
| Optical NAND gate |
7,995,877 |
08/09/2011
|
| Wavelength-tunable optical ring resonators |
7,983,517 |
07/19/2011
|
| Microelectromechanical pump utilizing porous silicon |
7,980,828 |
07/19/2011
|
| Wavelength-tunable optical ring resonators |
7,983,517 |
07/19/2011
|
| Optical waveguide device with an adiabatically-varying width |
7,941,014 |
05/10/2011
|
| Optical waveguide device with an adiabatically-varying width |
7,941,014 |
05/10/2011
|
| Microfabricated ion frequency standard |
7,859,350 |
12/28/2010
|
| Microfabricated ion frequency standard |
7,859,350 |
12/28/2010
|
| Microfabricated bulk wave acoustic bandgap device |
7,836,566 |
11/23/2010
|
| Microfabricated bulk wave acoustic bandgap device |
7,836,566 |
11/23/2010
|
| Dual-range linearized transimpedance amplifier system |
7,825,735 |
11/02/2010
|
| Dual-range linearized transimpedance amplifier system |
7,825,735 |
11/02/2010
|
| Fabrication of thermal microphotonic sensors and sensor arrays |
7,820,970 |
10/26/2010
|
| Optical data latch |
7,787,719 |
08/31/2010
|
| Method for the Protection of Extreme Ultraviolet Lithography Optics |
7,740,916 |
06/22/2010
|
| Method for the Protection of Extreme Ultraviolet Lithography Optics |
7,740,916 |
06/22/2010
|
| Microfabricated bulk wave acoustic bandgap device |
7,733,198 |
06/08/2010
|
| Microfabricated bulk wave acoustic bandgap device |
7,733,198 |
06/08/2010
|
| Method for forming precision clockplate with pivot pins |
7,728,248 |
06/01/2010
|
| Method for forming precision clockplate with pivot pins |
7,728,248 |
06/01/2010
|
| Nanoeletromechanical switch and logic circuits formed therefrom |
7,719,318 |
05/18/2010
|
| Microelectromechanical tunable inductor |
7,710,232 |
05/04/2010
|
| Modular manifold for integrated fluidics and electronics |
7,685,864 |
03/30/2010
|
| Modular manifold for integrated fluidics and electronics |
7,685,864 |
03/30/2010
|
| Thermal microphotonic sensor and sensor array |
7,667,200 |
02/23/2010
|
| Thermal microphotonic sensor and sensor array |
7,667,200 |
02/23/2010
|
| Microelectromechanical resonator and method for fabrication |
7,652,547 |
01/26/2010
|
| Eddy-current-damped microelectromechanical switch |
7,633,362 |
12/15/2009
|
| Wavelength-tunable optical ring resonators |
7,616,850 |
11/10/2009
|
| Wavelength-tunable optical ring resonators |
7,616,850 |
11/10/2009
|
| Microelectromechanical resonator and method for fabrication |
7,616,077 |
11/10/2009
|
| Apparatus and method for electroforming high aspect ratio micro-parts |
7,608,174 |
10/27/2009
|
| Vitreous carbon mask substrate for X-ray lithography |
7,608,367 |
10/27/2009
|
| Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films |
7,597,819 |
10/06/2009
|
| Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films |
7,597,819 |
10/06/2009
|
| Microelectromechanical flow control apparatus |
7,540,469 |
06/02/2009
|
| Microelectromechanical flow control apparatus |
7,540,469 |
06/02/2009
|
| Inertial sensing microelectromechanical (MEM) safe-arm device |
7,530,312 |
05/12/2009
|
| Inertial sensing microelectromechanical (MEM) safe-arm device |
7,530,312 |
05/12/2009
|
| Adhesive particle shielding |
7,473,301 |
01/06/2009
|
| Adhesive particle shielding |
7,473,301 |
01/06/2009
|
| Method for providing a compliant cantilevered micromold |
7,465,419 |
12/16/2008
|
| Method and apparatus for creating a topography at a surface |
7,449,699 |
11/11/2008
|
| Methods for the precise locating and forming of arrays of curved features into a workpiece |
7,434,299 |
10/14/2008
|
| Methods for the precise locating and forming of arrays of curved features into a workpiece |
7,434,299 |
10/14/2008
|
| Micro electro-mechanical system (MEMS) pressure sensor for footwear |
7,426,873 |
09/23/2008
|
| Micro electro-mechanical system (MEMS) pressure sensor for footwear |
7,426,873 |
09/23/2008
|
| Apparatus for raising or tilting a micromechanical structure |
7,421,924 |
09/09/2008
|
| Apparatus for raising or tilting a micromechanical structure |
7,421,924 |
09/09/2008
|
| Differential transimpedance amplifier circuit for correlated differential amplification |
7,403,065 |
07/22/2008
|
| Differential transimpedance amplifier circuit for correlated differential amplification |
7,403,065 |
07/22/2008
|
| Microfabricated diffusion source |
7,399,449 |
07/15/2008
|
| Microfabricated diffusion source |
7,399,449 |
07/15/2008
|
| Pyroelectric demodulating detector |
7,397,301 |
07/08/2008
|
| Pyroelectric demodulating detector |
7,397,301 |
07/08/2008
|
| Microelectromechanical safing and arming apparatus |
7,383,774 |
06/10/2008
|
| Contour mode resonators with acoustic reflectors |
7,385,334 |
06/10/2008
|
| Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices |
7,375,332 |
05/20/2008
|
| Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices |
7,375,332 |
05/20/2008
|
| Geophysics-based method of locating a stationary earth object |
7,376,507 |
05/20/2008
|
| Optical displacement sensor |
7,355,720 |
04/08/2008
|
| Optical displacement sensor |
7,355,720 |
04/08/2008
|
| Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom |
7,339,454 |
03/04/2008
|
| Integration of a waveguide self-electrooptic effect device and a vertically coupled interconnect waveguide |
7,336,855 |
02/26/2008
|
| Heterogeneously integrated microsystem-on-a-chip |
7,335,972 |
02/26/2008
|
| Heterogeneously integrated microsystem-on-a-chip |
7,335,972 |
02/26/2008
|
| Micromachined electrode array |
7,308,317 |
12/11/2007
|
| Radiation-hardened transistor and integrated circuit |
7,298,010 |
11/20/2007
|
| Eddy-current-damped microelectromechanical switch |
7,289,009 |
10/30/2007
|
| MEMS fluidic actuator |
7,246,524 |
07/24/2007
|
| MEMS fluidic actuator |
7,246,524 |
07/24/2007
|
| Condenser Optic with Sacrificial Reflective Surface |
7,239,443 |
07/03/2007
|
| Condenser Optic with Sacrificial Reflective Surface |
7,239,443 |
07/03/2007
|
| Method for forming permanent magnets with different polarities for use in microelectromechanical devices |
7,207,102 |
04/24/2007
|
| Method for forming permanent magnets with different polarities for use in microelectromechanical devices |
7,207,102 |
04/24/2007
|
| Triple inverter pierce oscillator circuit suitable for CMOS |
7,183,868 |
02/27/2007
|
| Triple inverter pierce oscillator circuit suitable for CMOS |
7,183,868 |
02/27/2007
|
| Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission |
7,173,764 |
02/06/2007
|
| Silicon micro-mold |
7,124,994 |
10/24/2006
|
| Method to control artifacts of microstructural fabrication |
7,105,098 |
09/12/2006
|
| Method to control artifacts of microstructural fabrication |
7,105,098 |
09/12/2006
|
| Compliant cantilevered micromold |
7,090,189 |
08/15/2006
|
| Condenser optic with sacrificial reflective surface |
7,081,992 |
07/25/2006
|
| Condenser optic with sacrificial reflective surface |
7,081,992 |
07/25/2006
|
| Inertial measurement unit using rotatable MEMS sensors |
7,066,004 |
06/27/2006
|
| Inertial measurement unit using rotatable MEMS sensors |
7,066,004 |
06/27/2006
|
| Microelectromechanical safing and arming apparatus |
7,051,656 |
05/30/2006
|
| Anti-stiction coating for microelectromechanical devices |
7,045,170 |
05/16/2006
|
| Gray scale x-ray mask |
7,008,737 |
03/07/2006
|
| Self-seeding ring optical parametric oscillator |
6,980,354 |
12/27/2005
|
| Flip-chip light emitting diode with resonant optical microcavity |
6,969,874 |
11/29/2005
|
| Three-dimensional microelectromechanical tilting platform operated by gear-driven racks |
6,960,849 |
11/01/2005
|
| Sacrificial plastic mold with electroplatable base |
6,929,733 |
08/16/2005
|
| Erected mirror optical switch |
6,903,861 |
06/07/2005
|
| Erected mirror optical switch |
6,903,861 |
06/07/2005
|
| Tailored ink for piston driven electrostatic liquid drop modulator |
6,881,250 |
04/19/2005
|
| Method for the fabrication of three-dimensional microstructures by deep X-ray lithography |
6,875,544 |
04/05/2005
|
| Microoptical system and fabrication method therefor |
6,867,435 |
03/15/2005
|
| Photoimageable composition |
6,858,378 |
02/22/2005
|
| Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfaces |
6,847,463 |
01/25/2005
|
| Silicon micro-mold and method for fabrication |
6,841,339 |
01/11/2005
|
| Polymeric mold for providing a micro-scale part |
6,841,306 |
01/11/2005
|
| X-ray mask and method for making |
6,810,104 |
10/26/2004
|
| Microelectronic device package with an integral window mounted in a recessed lip |
6,809,413 |
10/26/2004
|
| Apparatus and method for controlling plating uniformity |
6,802,950 |
10/12/2004
|
| X-ray mask and method for providing same |
6,798,862 |
09/28/2004
|
| Image-rotating, 4-mirror, ring optical parametric oscillator |
6,775,054 |
08/10/2004
|
| Apparatus for in situ cleaning of carbon contaminated surfaces |
6,772,776 |
08/10/2004
|
| NPN double heterostructure bipolar transistor with InGaAsN base region |
6,765,242 |
07/20/2004
|
| Microelectromechanical apparatus for elevating and tilting a platform |
6,759,787 |
07/06/2004
|
| Method for providing an arbitrary three-dimensional microstructure in silicon using an anisotropic deep etch |
6,749,997 |
06/15/2004
|
| In-vacuum exposure shutter |
6,744,493 |
06/01/2004
|
| Reconditioning of semiconductor substrates to remove photoresist during semiconductor device fabrication |
6,682,607 |
01/27/2004
|
| Method for applying a photoresist layer to a substrate having a preexisting topology |
6,680,263 |
01/20/2004
|
| Castable plastic mold with electroplatable base |
6,679,471 |
01/20/2004
|
| Planar-constructed spatial micro-stage |
6,675,671 |
01/13/2004
|
| Bi-level microelectronic device package with an integral window |
6,674,159 |
01/06/2004
|
| Broadband visible light source based on AllnGaN light emitting diodes |
6,665,329 |
12/16/2003
|
| Single level microelectronic device package with an integral window |
6,661,084 |
12/09/2003
|
| Photoimageable composition |
6,645,696 |
11/11/2003
|
| Optical parametric osicllators with improved beam quality |
6,647,033 |
11/11/2003
|
| Mask-to-wafer alignment system |
6,642,995 |
11/04/2003
|
| Monitoring system including an electronic sensor platform and an interrogation transceiver |
6,624,760 |
09/23/2003
|
| Cantilever epitaxial process |
6,599,362 |
07/29/2003
|
| Multiple wavelength photolithography for preparing multilayer microstructures |
6,582,890 |
06/24/2003
|
| Damascene fabrication of nonplanar microcoils |
6,578,254 |
06/17/2003
|
| Radiation source with shaped emission |
6,563,907 |
05/13/2003
|
| Microelectromechanical apparatus for elevating and tilting a platform |
6,545,385 |
04/08/2003
|
| Monolithic integration of a MOSFET with a MEMS device |
6,531,331 |
03/11/2003
|
| Gold-based electrical interconnections for microelectronic devices |
6,500,760 |
12/31/2002
|
| Electrode configuration for extreme-UV electrical discharge source |
6,498,832 |
12/24/2002
|
| Removable pellicle for lithographic mask protection and handling |
6492067 |
12/10/2002
|
| X-ray mask and method for providing same |
6,477,225 |
11/05/2002
|
| Surface micromachined structure fabrication methods for a fluid ejection device |
6472332 |
10/29/2002
|
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