Publications

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FAIR DEAL Grand Challenge Overview

Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young

https://www.osti.gov/search/identifier:1854733

SAND Report – 2021 SAND Report 2021

New fabrication pathway based on atomic resists

SPIE Advanced Lithography 2022

Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera

Abstract – 2021 Abstract 2021

FAIR DEAL GC Thrust 2: APAM Modeling

Fair Deal Eab 3

Xujiao Gao, Denis Mamaluy, William Lepkowski, Steve Michael Young

https://www.osti.gov/search/identifier:1808429

Presentation (non-conference) – 2020 Presentation (non-conference) 2020
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