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Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry

Journal of Materials Research

Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra

Journal Article – 2020 Journal Article 2020
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