Publications

Pathways for atomic-precision incorporation of donors and acceptors in silicon

2022 Silicon Quantum Electronics Workshop

Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Ezra Bussmann, Shashank Misra, Andrew David Baczewski

Stochastic magnetic actuated random transducer devices based on perpendicular magnetic tunnel junctions

Mmm 2022

L. Rehm, C.C.M Capriata, Shashank Misra, John Darby Smith, M. Pinarbasi, B. G. Malm, A. D. Kent

Atomic Precision Advanced Manufacturing for Ultraprecise 2D Bipolar Devices

Eipbn

James Owen, Ehud Fuchs, Robin Santini, John Randall, Juan Pedro Mendez Granado, Xujiao Gao, Denis Mamaluy, Shashank Misra

Atomic Precision Patterning and Alignment for Dopant-based Quantum Devices

2022 MRS Spring Meeting and Exhibit

J. H. G. Owen, E. Fuchs, R. Santini, J. N. Randall, Juan Pedro Mendez Granado, Xujiao Gao, Shashank Misra

Band-to-Band Tunneling in Atomic Precision Advanced Manufacturing (APAM) Enabled Bipolar Devices

2022 International Conference on Semiconductor Processes and Devices

Xujiao Gao, Juan Pedro Mendez Granado, Shashank Misra, John N. Randall, James H. G. Owen, Wiley P. Kirk

Hole in one: Pathways to deterministic single-acceptor incorporation in Si(100)-2x1

AVS Quantum Science

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

https://www.osti.gov/search/identifier:1870448

Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication

ACS Spring 2022

Esther Frederick, Quinn Campbell, Kevin Dwyer, Luke Robertson, Michael Dryer, Scott William Schmucker, David R. Wheeler, Shashank Misra, Robert Butera

Atomic Precision Advanced Manufacturing for Ultraprecise 2D Bipolar Devices

Eipbn

J.H.G Owen, R. Santini, E. Fuchs, J.N. Randall, Juan Pedro Mendez Granado, Xujiao Gao, Denis Mamaluy, Shashank Misra

Reaction of Dichlorophenylborane with H-Si(100)

ACS Omega

Esther Frederick, Quinn Campbell, Angelica Benavidez, David R. Wheeler, Shashank Misra

Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision

Physical Review Applied

Jeffrey Andrew Ivie, Quinn Campbell, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew Mounce, Daniel Ward, Malcolm Carroll, Ezra Bussmann, Andrew David Baczewski, Shashank Misra

Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices

AVS 67 Virtual Symposium

Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra

Hole in one: Pathways for deterministic incorporation of a single acceptor in silicon

Silicon Quantum Electronics Workshop

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor

International Conference on Simulation of Semiconductor Processes and Devices

Xujiao Gao, Juan Pedro Mendez Granado, Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra

https://www.osti.gov/search/identifier:1867273

Quantum Transport Simulations for Si: P delta-layer Tunnel Junctions

International Conference on Simulation of Semiconductor Processes and Devices

Juan Pedro Mendez Granado, Xujiao Gao, Denis Mamaluy, Shashank Misra

https://www.osti.gov/search/identifier:1867276

New fabrication pathway based on atomic resists

SPIE Advanced Lithography 2022

Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera

Pathways for deterministic incorporation of a single acceptor in silicon

Silicon Quantum Electronics Workshop 2021

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

Al-alkyls as acceptor dopant precursors for atomic-scale devices

Journal of PhysicsCondensed Matter

James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John Randall

https://www.osti.gov/search/identifier:1822247

AlCl3-Dosed Si(100)-2 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al

Journal of Physical Chemistry C

Matthew S. Radue, Sungha Baek, Azadeh Farzaneh, K.G. Dwyer, Quinn Campbell, Andrew David Baczewski, Ezra Bussmann, George T. Wang, Yifei Mo, Shashank Misra, R.E. Butera

https://www.osti.gov/search/identifier:1822240

Atomic-precision advanced manufacturing for Si quantum computing

MRS Bulletin

Ezra Bussmann, Robert E. Butera, James H. G. Owen, John N. Randall, Steven Rinaldi, Andrew David Baczewski, Shashank Misra

https://www.osti.gov/search/identifier:1817714

Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor

International Conference on Simulation of Semiconductor Processes and Devices

Xujiao Gao, Juan Pedro Mendez Granado, Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra

https://www.osti.gov/search/identifier:1867272

Quantum Transport Simulations for Si:P delta-layer Tunnel Junctions

International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2021)

Juan Pedro Mendez Granado, Denis Mamaluy, Xujiao Gao, Shashank Misra

https://www.osti.gov/search/identifier:1867271

Revealing Quantum Effects in Highly Conductive Delta-layer Systems

Communications Physics

Denis Mamaluy, Juan Pedro Mendez Granado, Xujiao Gao, Shashank Misra

https://www.osti.gov/search/identifier:1828022

Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

https://www.osti.gov/search/identifier:1810387

Supporting Information: Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition

21st International Conference on Atomic Layer Deposition

Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra

https://www.osti.gov/search/identifier:1877517