Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication
ACS Spring 2022
Esther Frederick, Quinn Campbell, Kevin Dwyer, Luke Robertson, Michael Dryer, Scott William Schmucker, David R. Wheeler, Shashank Misra, Robert Butera
|
Conference Presentation – 2022
Conference Presentation
|
2022 |
Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices
AVS 67 Virtual Symposium
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
FAIR DEAL Grand Challenge Overview
Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young
https://www.osti.gov/search/identifier:1854733
|
SAND Report – 2021
SAND Report
|
2021 |
Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor
International Conference on Simulation of Semiconductor Processes and Devices
Xujiao Gao, Juan Pedro Mendez Granado, Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
https://www.osti.gov/search/identifier:1867273
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
New fabrication pathway based on atomic resists
SPIE Advanced Lithography 2022
Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera
|
Abstract – 2021
Abstract
|
2021 |
Al-alkyls as acceptor dopant precursors for atomic-scale devices
Journal of PhysicsCondensed Matter
James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John Randall
https://www.osti.gov/search/identifier:1822247
|
Journal Article – 2021
Journal Article
|
2021 |
Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor
International Conference on Simulation of Semiconductor Processes and Devices
Xujiao Gao, Juan Pedro Mendez Granado, Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
https://www.osti.gov/search/identifier:1867272
|
Conference Paper – 2021
Conference Paper
|
2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
https://www.osti.gov/search/identifier:1877517
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
Path towards a vertical TFET enabled by atomic precision advanced manufacturing
Silicon Nanoelectronics Workshop 2021
Tzu-Ming Lu, Xujiao Gao, Evan Mark Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
https://www.osti.gov/search/identifier:1872185
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
Path towards a vertical TFET enabled by atomic precision advanced manufacturing
Silicon Nanoelectronics Workshop 2021
Tzu-Ming Lu, Xujiao Gao, Evan Michael Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor
2021 International Conference on Simulation of Semiconductor Processes and Devices
Xujiao Gao, Juan Pedro Mendez Granado, Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
J. Micro/Nanopattern. Mater. Metrol.
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1772029
|
Journal Article – 2021
Journal Article
|
2021 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
American Physical Society March Meeting 2021
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1854693
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition (ALD 2021)
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Towards a deeper understanding of tunneling using atomic precision advanced manufacturing
IEEE Device Research Conference
Tzu-Ming Lu, Xujiao Gao, Evan Michael Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Path towards vertical tunnel field effect transistor enabled by atomic precision advanced manufacturing
VLSI Sympsium 2021
Tzu-Ming Lu, Xujiao Gao, Evan Mark Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
A model for atomic precision p-type doping with diborane on Si(100)-2x1
The Journal of Physcial Chemistry C
Quinn Campbell, Jeffrey Andrew Ivie, Ezra Bussmann, Scott William Schmucker, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1765769
|
Journal Article – 2021
Journal Article
|
2021 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
Sandia Postdoctoral Showcase 2020
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1833491
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
Triethyl Aluminium - A Precursor for Atomically-Precise Acceptor Dopant Placement?
2020 Virtual MRS Fall Meeting & Exhibit
James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John N. Randall
https://www.osti.gov/search/identifier:1831369
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
A multiscale model of the reaction pathway for p-type doping using diborane on Si(100)-2x1
Fall Materials Research Society Meeting
Quinn Campbell, Jeffrey Andrew Ivie, Ezra Bussmann, Scott William Schmucker, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1829238
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
APS March Meeting 2021
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
Quantum transport in Si:P δ-layer wires
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2020)
Juan Pedro Mendez Granado, Denis Mamaluy, Xujiao Gao, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Tzu-Ming Lu, Scott William Schmucker, Shashank Misra
https://www.osti.gov/search/identifier:1820274
|
Conference Paper – 2020
Conference Paper
|
2020 |
Modeling Assisted Room Temperature Operation of Atomic Precision Advanced Manufacturing Devices
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2020
Xujiao Gao, Lisa A Tracy, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Tzu-Ming Lu, Denis Mamaluy, Scott William Schmucker, Shashank Misra
https://www.osti.gov/search/identifier:1819257
|
Conference Paper – 2020
Conference Paper
|
2020 |
Modeling Assisted Room Temperature Operation of Atomic Precision Advanced Manufacturing Devices
International Conference on Simulation Processes and Devices
Xujiao Gao, Lisa A Tracy, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Tzu-Ming Lu, Denis Mamaluy, Scott William Schmucker, Shashank Misra
https://www.osti.gov/search/identifier:1818017
|
Conference Paper – 2020
Conference Paper
|
2020 |