Publications

Pathways for atomic-precision incorporation of donors and acceptors in silicon

2022 Silicon Quantum Electronics Workshop

Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Ezra Bussmann, Shashank Misra, Andrew David Baczewski

Selective Amorphization of SiGe in Si/SiGe Nanostructures via High Energy Si+ Implant

Journal of Applied Physics

Emily Turner, Quinn Campbell, Ibrahim Avci, William J. Weber, Ping Lu, George T. Wang, Kevin S., Jones

https://www.osti.gov/search/identifier:1877177

Resource estimates for DOE quantum simulation problems

Cis Erb

Andrew David Baczewski, Quinn Campbell, Lucas Kocia, Benjamin Morrison, Antonio Russo, Stefan Seritan, Tameem Albash, Conor Smith

Resources Estimates for DOE Quantum Simulation Problems

CIS Research Foundation External Review

Andrew David Baczewski, Quinn Campbell, Lucas Kocia, Benjamin Morrison, Antonio Russo, Stefan Seritan, Tameem Albash, Conner Smith

Hole in one: Pathways to deterministic single-acceptor incorporation in Si(100)-2x1

AVS Quantum Science

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

https://www.osti.gov/search/identifier:1870448

Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication

ACS Spring 2022

Esther Frederick, Quinn Campbell, Kevin Dwyer, Luke Robertson, Michael Dryer, Scott William Schmucker, David R. Wheeler, Shashank Misra, Robert Butera

Reaction of Dichlorophenylborane with H-Si(100)

ACS Omega

Esther Frederick, Quinn Campbell, Angelica Benavidez, David R. Wheeler, Shashank Misra

Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision

Physical Review Applied

Jeffrey Andrew Ivie, Quinn Campbell, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew Mounce, Daniel Ward, Malcolm Carroll, Ezra Bussmann, Andrew David Baczewski, Shashank Misra

Hole in one: Pathways for deterministic incorporation of a single acceptor in silicon

Silicon Quantum Electronics Workshop

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

Controlled Formation of Stacked Si Quantum Dots in Vertical SiGe Nanowires

Nano Letters

Emily M. Turner, Quinn Campbell, Joaquin Pizarro, Hongbin Yang, Keshab Raj Sapkota, Ping Lu, Andrew David Baczewski, George T. Wang, Kevin S. Jones

https://www.osti.gov/search/identifier:1827619

FAIR DEAL Grand Challenge Overview

Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young

https://www.osti.gov/search/identifier:1854733

A New Route to Quantum-Scale Structures through a Novel Enhanced Germanium Diffusion Mechanism

George T. Wang, Ping Lu, Keshab Raj Sapkota, Andrew David Baczewski, Quinn Campbell, Peter Andrew Schultz, Kevin S. Jones, Emily M. Turner, Chappel J. Sharrock, Mark E. Law, Hongbin Yang

https://www.osti.gov/search/identifier:1854722

New fabrication pathway based on atomic resists

SPIE Advanced Lithography 2022

Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera

Pathways for deterministic incorporation of a single acceptor in silicon

Silicon Quantum Electronics Workshop 2021

Quinn Campbell, Andrew David Baczewski, Robert Butera, Shashank Misra

Al-alkyls as acceptor dopant precursors for atomic-scale devices

Journal of PhysicsCondensed Matter

James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John Randall

https://www.osti.gov/search/identifier:1822247

Neural Network Quantum Simulation

SNL/UNM Academic Alliance Virtual Poster Session

Conor Smith, Tameem Albash, Quinn Campbell, Andrew David Baczewski

AlCl3-Dosed Si(100)-2 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al

Journal of Physical Chemistry C

Matthew S. Radue, Sungha Baek, Azadeh Farzaneh, K.G. Dwyer, Quinn Campbell, Andrew David Baczewski, Ezra Bussmann, George T. Wang, Yifei Mo, Shashank Misra, R.E. Butera

https://www.osti.gov/search/identifier:1822240

Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

https://www.osti.gov/search/identifier:1810387

Supporting Information: Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition

21st International Conference on Atomic Layer Deposition

Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra

https://www.osti.gov/search/identifier:1877517

Solvothermal Chemistry to ?Ultradope? Si(100)

American Chemical Society - Spring 2021

Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Mark Anderson, David R. Wheeler, Shashank Misra

https://www.osti.gov/search/identifier:1877798

Stochastic atomistic disorder in atomic-precision doping

American Physical Society March Meeting 2021

Justin Koepke, Jeffrey Andrew Ivie, Quinn Campbell, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew David Baczewski, Andrew Mounce, Ezra Bussmann, Shashank Misra

https://www.osti.gov/search/identifier:1855714

Expanded toolkit for atomic precision advanced manufacturing

Area Selective Deposition 2021

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

J. Micro/Nanopattern. Mater. Metrol.

Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra

https://www.osti.gov/search/identifier:1772029

Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition

21st International Conference on Atomic Layer Deposition (ALD 2021)

Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra