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Development of a high-k gate stack for atomic-precision advanced manufacturing

APS March Meeting 2020

Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Ward, Shashank Misra

https://www.osti.gov/search/identifier:1768736

Conference Paper – 2020 Conference Paper 2020

Development of a high-k gate stack for atomic-precision advanced manufacturing

APS March Meeting 2020

Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Robert Ward, Shashank Misra

Abstract – 2019 Abstract 2019
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