Low Thermal Budget High-k/Metal Surface Gate for buried donor-based devices
Journal of PhysicsMaterials
Evan Michael Anderson, DeAnna Marie Campbell, Leon M. Maurer, Andrew David Baczewski, Michael Thomas Marshall, Tzu-Ming Lu, Ping Lu, Lisa A Tracy, Scott William Schmucker, Daniel R. Ward, Shashank Misra
https://www.osti.gov/search/identifier:1634811
|
Journal Article – 2020
Journal Article
|
2020 |
Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry
Journal of Materials Research
Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra
https://www.osti.gov/search/identifier:1644064
|
Journal Article – 2020
Journal Article
|
2020 |
Development of a high-k gate stack for atomic-precision advanced manufacturing
APS March Meeting 2020
Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Ward, Shashank Misra
https://www.osti.gov/search/identifier:1768736
|
Conference Paper – 2020
Conference Paper
|
2020 |
Expanded toolkit for atomic precision advanced manufacturing
Asd 2020
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
Atomic precision advanced manufacturing for digital electronics
Electronic Device Failure Analysis
Daniel Robert Ward, Scott William Schmucker, Evan Mark Anderson, Ezra Bussmann, Lisa A Tracy, Tzu-Ming Lu, Leon Mauerer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Shashank Misra
https://www.osti.gov/search/identifier:1842839
|
Journal Article – 2020
Journal Article
|
2020 |
Designer quantum materials
Shashank Misra, Daniel Robert Ward, Andrew David Baczewski, Quinn Campbell, Scott William Schmucker, Andrew Mounce, Lisa A Tracy, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell
https://www.osti.gov/search/identifier:1592939
|
SAND Report – 2019
SAND Report
|
2019 |
Development of a high-k gate stack for atomic-precision advanced manufacturing
APS March Meeting 2020
Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Robert Ward, Shashank Misra
|
Abstract – 2019
Abstract
|
2019 |
Surface gated atomically precise single electron Islands
Quantum Computing Program Review
Daniel Robert Ward, Evan Michael Anderson, Leon Maurer, DeAnna Marie Campbell, Michael Thomas Marshall, Lisa A Tracy, Andrew David Baczewski, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1641453
|
Conference Paper – 2019
Conference Paper
|
2019 |
Modeling Transport in Phosphorus δ-Doped Silicon Tunnel Junctions
International Workshop on Computational Nanotechnology
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1640109
|
Conference Paper – 2019
Conference Paper
|
2019 |
Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric
77th Device Research Conference
Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra
|
Abstract – 2019
Abstract
|
2019 |
Fabrication and Measurement of Actomically Precise Single Electron Islands
APS March Meeting
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1639282
|
Conference Paper – 2019
Conference Paper
|
2019 |
Modeling transport in phosphorus δ-doped silicon tunnel junctions
APS March Meeting
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1639249
|
Conference Paper – 2019
Conference Paper
|
2019 |
Modeling Transport in Phosphorus δ-doped Silicon Tunnel Junctions
International Workshop on Computational Nanotechnology
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
|
Abstract – 2019
Abstract
|
2019 |
Fabrication and Measurement of Atomically Precise Single Electron Islands
American Physical Society March Meet 2019
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
Fabrication and Measurement of Gated, Atomically-Precise Tunnel-Junctions and Single Electron Islands
Materials Research Society Spring Meeting
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
Modeling the electronic structure of donor island arrays fabricated using STM lithography
APS March Meeting 2019
Andrew David Baczewski, Mitchell Ian Brickson, Leon Maurer, DeAnna Marie Campbell, Tzu-Ming Lu, Michael Thomas Marshall, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
Integrated devices made using atomic precision advanced manufacturing
AVS Symposium
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1592639
|
Conference Paper – 2018
Conference Paper
|
2018 |
Modeling transport in phosphorus δ-doped silicon tunnel junctions
American Physical Society March Meetin
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
Digital Electronics at the Atomic Limit
Shashank Misra, Daniel Robert Ward, Leon Maurer, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell
https://www.osti.gov/search/identifier:1474250
|
SAND Report – 2018
SAND Report
|
2018 |
Integrated devices made using atomically precise advanced manufacturing
American Vacuum Society Symposium
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
Progress Towards CMOS Compatible Atomic-Precision Fabrication
Materials Research Society Spring 2018 Conference
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1510378
|
Conference Paper – 2018
Conference Paper
|
2018 |
Variability of atomically precise tunnel junctions
APS March Meeting
Michael Thomas Marshall, DeAnna Marie Campbell, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1501972
|
Conference Paper – 2018
Conference Paper
|
2018 |
CMOS compatible processing for phosphorous delta-layer nanoscale electronics
APS March Meeting
DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1501971
|
Conference Paper – 2018
Conference Paper
|
2018 |
Designer Quantum Materials, atom-by-atom.
Eipbn
Lisa A Tracy, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell, Daniel Robert Ward, Andrew David Baczewski, Shashank Misra
|
Abstract – 2018
Abstract
|
2018 |
CMOS compatible processing for phosphorous delta-layer nanoscale electronics
APS March Meeting
DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
|
Abstract – 2017
Abstract
|
2017 |