Publications

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Low Thermal Budget High-k/Metal Surface Gate for buried donor-based devices

Journal of PhysicsMaterials

Evan Michael Anderson, DeAnna Marie Campbell, Leon M. Maurer, Andrew David Baczewski, Michael Thomas Marshall, Tzu-Ming Lu, Ping Lu, Lisa A Tracy, Scott William Schmucker, Daniel R. Ward, Shashank Misra

https://www.osti.gov/search/identifier:1634811

Journal Article – 2020 Journal Article 2020

Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry

Journal of Materials Research

Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra

https://www.osti.gov/search/identifier:1644064

Journal Article – 2020 Journal Article 2020

Development of a high-k gate stack for atomic-precision advanced manufacturing

APS March Meeting 2020

Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Ward, Shashank Misra

https://www.osti.gov/search/identifier:1768736

Conference Paper – 2020 Conference Paper 2020

Expanded toolkit for atomic precision advanced manufacturing

Asd 2020

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra

Abstract – 2020 Abstract 2020

Atomic precision advanced manufacturing for digital electronics

Electronic Device Failure Analysis

Daniel Robert Ward, Scott William Schmucker, Evan Mark Anderson, Ezra Bussmann, Lisa A Tracy, Tzu-Ming Lu, Leon Mauerer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Shashank Misra

https://www.osti.gov/search/identifier:1842839

Journal Article – 2020 Journal Article 2020

Designer quantum materials

Shashank Misra, Daniel Robert Ward, Andrew David Baczewski, Quinn Campbell, Scott William Schmucker, Andrew Mounce, Lisa A Tracy, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell

https://www.osti.gov/search/identifier:1592939

SAND Report – 2019 SAND Report 2019

Development of a high-k gate stack for atomic-precision advanced manufacturing

APS March Meeting 2020

Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Robert Ward, Shashank Misra

Abstract – 2019 Abstract 2019

Surface gated atomically precise single electron Islands

Quantum Computing Program Review

Daniel Robert Ward, Evan Michael Anderson, Leon Maurer, DeAnna Marie Campbell, Michael Thomas Marshall, Lisa A Tracy, Andrew David Baczewski, Tzu-Ming Lu, Shashank Misra

https://www.osti.gov/search/identifier:1641453

Conference Paper – 2019 Conference Paper 2019

Modeling Transport in Phosphorus δ-Doped Silicon Tunnel Junctions

International Workshop on Computational Nanotechnology

Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

https://www.osti.gov/search/identifier:1640109

Conference Paper – 2019 Conference Paper 2019

Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric

77th Device Research Conference

Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra

Abstract – 2019 Abstract 2019

Fabrication and Measurement of Actomically Precise Single Electron Islands

APS March Meeting

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra

https://www.osti.gov/search/identifier:1639282

Conference Paper – 2019 Conference Paper 2019

Modeling transport in phosphorus δ-doped silicon tunnel junctions

APS March Meeting

Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

https://www.osti.gov/search/identifier:1639249

Conference Paper – 2019 Conference Paper 2019

Modeling Transport in Phosphorus δ-doped Silicon Tunnel Junctions

International Workshop on Computational Nanotechnology

Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

Abstract – 2019 Abstract 2019

Fabrication and Measurement of Atomically Precise Single Electron Islands

American Physical Society March Meet 2019

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra

Abstract – 2018 Abstract 2018

Fabrication and Measurement of Gated, Atomically-Precise Tunnel-Junctions and Single Electron Islands

Materials Research Society Spring Meeting

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra

Abstract – 2018 Abstract 2018

Modeling the electronic structure of donor island arrays fabricated using STM lithography

APS March Meeting 2019

Andrew David Baczewski, Mitchell Ian Brickson, Leon Maurer, DeAnna Marie Campbell, Tzu-Ming Lu, Michael Thomas Marshall, Lisa A Tracy, Daniel Robert Ward, Shashank Misra

Abstract – 2018 Abstract 2018

Integrated devices made using atomic precision advanced manufacturing

AVS Symposium

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra

https://www.osti.gov/search/identifier:1592639

Conference Paper – 2018 Conference Paper 2018

Modeling transport in phosphorus δ-doped silicon tunnel junctions

American Physical Society March Meetin

Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

Abstract – 2018 Abstract 2018

Digital Electronics at the Atomic Limit

Shashank Misra, Daniel Robert Ward, Leon Maurer, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell

https://www.osti.gov/search/identifier:1474250

SAND Report – 2018 SAND Report 2018

Integrated devices made using atomically precise advanced manufacturing

American Vacuum Society Symposium

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra

Abstract – 2018 Abstract 2018

Progress Towards CMOS Compatible Atomic-Precision Fabrication

Materials Research Society Spring 2018 Conference

Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Shashank Misra

https://www.osti.gov/search/identifier:1510378

Conference Paper – 2018 Conference Paper 2018

Variability of atomically precise tunnel junctions

APS March Meeting

Michael Thomas Marshall, DeAnna Marie Campbell, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

https://www.osti.gov/search/identifier:1501972

Conference Paper – 2018 Conference Paper 2018

CMOS compatible processing for phosphorous delta-layer nanoscale electronics

APS March Meeting

DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

https://www.osti.gov/search/identifier:1501971

Conference Paper – 2018 Conference Paper 2018

Designer Quantum Materials, atom-by-atom.

Eipbn

Lisa A Tracy, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell, Daniel Robert Ward, Andrew David Baczewski, Shashank Misra

Abstract – 2018 Abstract 2018

CMOS compatible processing for phosphorous delta-layer nanoscale electronics

APS March Meeting

DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra

Abstract – 2017 Abstract 2017
Document Title Type Year
Results 1–25 of 29