Pathways for atomic-precision incorporation of donors and acceptors in silicon
2022 Silicon Quantum Electronics Workshop
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Ezra Bussmann, Shashank Misra, Andrew David Baczewski
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Abstract – 2022
Abstract
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2022 |
Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision
Physical Review Applied
Jeffrey Andrew Ivie, Quinn Campbell, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew Mounce, Daniel Ward, Malcolm Carroll, Ezra Bussmann, Andrew David Baczewski, Shashank Misra
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Journal Article – 2021
Journal Article
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2021 |
Stochastic atomistic disorder in atomic-precision doping
American Physical Society March Meeting 2021
Justin Koepke, Jeffrey Andrew Ivie, Quinn Campbell, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew David Baczewski, Andrew Mounce, Ezra Bussmann, Shashank Misra
https://www.osti.gov/search/identifier:1855714
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Conference Presentation – 2021
Conference Presentation
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2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Signatures of missing donors in transport through atomically precise P donor chains in Si
APS March Meeting 2021
Mitchell Ian Brickson, Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1854311
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Conference Presentation – 2021
Conference Presentation
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2021 |
A chemical model for atomic-precision single-donor incorporation of phosphorus atoms in Si(100)-2x1
American Physical Society March Meeting 2021
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1854314
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Conference Presentation – 2021
Conference Presentation
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2021 |
A chemical model for atomic-precision single-donor incorporation of phosphorus atoms in Si(100)-2x1
APS March Meeting 2021
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
The impact of donor incorporation statistics on analog quantum simulations of Hubbard physics in near-atomic precision donor arrays
2021 APS March Meeting
Mitchell Ian Brickson, Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Stochastic atomistic disorder in atomic-precision doping
American Physical Society March Meeting
Ezra Bussmann, Jeffrey Andrew Ivie, Justin Koepke, Quinn Campbell, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1831038
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Conference Presentation – 2020
Conference Presentation
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2020 |
Estimating structural disorder in atomic-precision Si:P doping techniques
Materials Research Society Fall Symposium
Ezra Bussmann, Justin Koepke, Andrew David Baczewski, Peter Andrew Schultz, Richard P. Muller, Andrew Mounce, Shashank Misra, Malcolm .S. Carroll
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Abstract – 2019
Abstract
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2019 |
Progress Towards CMOS Compatible Atomic-Precision Fabrication
Materials Research Society Spring 2018 Conference
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1510378
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Conference Paper – 2018
Conference Paper
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2018 |
Variability of atomically precise tunnel junctions
APS March Meeting
Michael Thomas Marshall, DeAnna Marie Campbell, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1501972
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Conference Paper – 2018
Conference Paper
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2018 |
CMOS compatible processing for phosphorous delta-layer nanoscale electronics
APS March Meeting
DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1501971
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Conference Paper – 2018
Conference Paper
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2018 |
Understanding phosphorus donor insertion on Si(001) from PH3 dissociation in dimer windows formed by hydrogen lithography
MRS 2017 Fall Meeting
Peter Andrew Schultz, Andrew David Baczewski, Richard P. Muller, Justin Koepke, Ezra Bussmann, Robert J. Simonson
https://www.osti.gov/search/identifier:1488743
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Conference Paper – 2017
Conference Paper
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2017 |
CMOS compatible processing for phosphorous delta-layer nanoscale electronics
APS March Meeting
DeAnna Marie Campbell, Michael Thomas Marshall, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
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Abstract – 2017
Abstract
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2017 |
Variability of atomically precise tunnel junctions
APS March Meeting
Michael Thomas Marshall, DeAnna Marie Campbell, Leon Maurer, Justin Koepke, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
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Abstract – 2017
Abstract
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2017 |
Multi-scale modeling of dopant arrays in silicon
APS March Meeting
Andrew David Baczewski, Ezra Bussmann, John King (Microsoft Research) Gamble, Noah Tobias Jacobson, Justin Koepke, Richard P. Muller, Peter Andrew Schultz, Luke (SNL) Shulenburger, Robert J. Simonson, Lisa A Tracy, Shashank Misra
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Abstract – 2017
Abstract
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2017 |
All-optical backend for atomic precision fabrication
American Vacuum Society Symposium
Daniel Robert Ward, Michael Thomas Marshall, DeAnna Marie Campbell, Tzu-Ming Lu, Justin Koepke, David Scrymgeour, Leon Maurer, Andrew David Baczewski, Ezra Bussmann, Shashank Misra
https://www.osti.gov/search/identifier:1480598
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Conference Paper – 2017
Conference Paper
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2017 |
Modeling STM junctions and TFETs
UW Condensed Matter seminar
Leon Maurer, John Gamble, Daniel Robert Ward, Michael Thomas Marshall, DeAnna Marie Campbell, Tzu-Ming Lu, Justin Koepke, Shashank Misra
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Presentation (non-conference) – 2017
Presentation (non-conference)
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2017 |
Understanding phosphorus donor insertion on Si(001) from PH_3 dissociation in dimer windows formed by hydrogen lithography
2017 MRS Fall Meeting and Exhibit
Peter Andrew Schultz, Andrew David Baczewski, Richard P. Muller, Justin Koepke, Ezra Bussmann, Robert J. Simonson
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Abstract – 2017
Abstract
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2017 |
Atomic-precision fabrication and metrology for epitaxial Si quantum devices
2017 MRS Fall Meeting and Exhibit
Justin Koepke, David Scrymgeour, Robert J. Simonson, Peter Andrew Schultz, Andrew David Baczewski, Richard P. Muller, Shashank Misra, Malcolm S. Carroll
https://www.osti.gov/search/identifier:1455363
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Conference Paper – 2017
Conference Paper
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2017 |
Atomically Precise Single Donor Placement by STM Lithography
2016 CINT User Meeting
Justin Koepke, David Scrymgeour, Robert J. Simonson, Michael Thomas Marshall, Daniel Robert Ward, Richard P. Muller, Peter Andrew Schultz, Andrew David Baczewski, Malcolm S. Carroll, Shashank Misra, Ezra Bussmann
https://www.osti.gov/search/identifier:1395614
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Conference Paper – 2016
Conference Paper
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2016 |