Pathways for atomic-precision incorporation of donors and acceptors in silicon
2022 Silicon Quantum Electronics Workshop
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Ezra Bussmann, Shashank Misra, Andrew David Baczewski
|
Abstract – 2022
Abstract
|
2022 |
Atomic-step disorder on polycrystalline surfaces leads to spatially-inhomogeneous work functions
The Journal of Vacuum Science and Technology A
Ezra Bussmann, Sean W. Smith, David Scrymgeour, Michael Brumbach, Ping Lu, Sara Dickens, Joseph Michael, Taisuke Ohta, Harold P. Hjalmarson, Peter Andrew Schultz, Paul G. Clem, Matthew M. Hopkins, Christopher Moore
https://www.osti.gov/search/identifier:1871998
|
Journal Article – 2022
Journal Article
|
2022 |
Impact of Incorporation Kinetics on Device Fabrication with Atomic Precision
Physical Review Applied
Jeffrey Andrew Ivie, Quinn Campbell, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew Mounce, Daniel Ward, Malcolm Carroll, Ezra Bussmann, Andrew David Baczewski, Shashank Misra
|
Journal Article – 2021
Journal Article
|
2021 |
Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices
AVS 67 Virtual Symposium
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
FAIR DEAL Grand Challenge Overview
Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young
https://www.osti.gov/search/identifier:1854733
|
SAND Report – 2021
SAND Report
|
2021 |
Al-alkyls as acceptor dopant precursors for atomic-scale devices
Journal of PhysicsCondensed Matter
James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John Randall
https://www.osti.gov/search/identifier:1822247
|
Journal Article – 2021
Journal Article
|
2021 |
AlCl3-Dosed Si(100)-2 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al
Journal of Physical Chemistry C
Matthew S. Radue, Sungha Baek, Azadeh Farzaneh, K.G. Dwyer, Quinn Campbell, Andrew David Baczewski, Ezra Bussmann, George T. Wang, Yifei Mo, Shashank Misra, R.E. Butera
https://www.osti.gov/search/identifier:1822240
|
Journal Article – 2021
Journal Article
|
2021 |
Atomic-precision advanced manufacturing for Si quantum computing
MRS Bulletin
Ezra Bussmann, Robert E. Butera, James H. G. Owen, John N. Randall, Steven Rinaldi, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1817714
|
Journal Article – 2021
Journal Article
|
2021 |
First-principles calculations of metal surfaces. II. Properties of low-index platinum surfaces toward understanding electron emission
Physical Review B
Peter Andrew Schultz, Harold P. Hjalmarson, Morgann Berg, Ezra Bussmann, David Scrymgeour, Taisuke Ohta, Christopher Hudson Moore
https://www.osti.gov/search/identifier:1787531
|
Journal Article – 2021
Journal Article
|
2021 |
Stochastic atomistic disorder in atomic-precision doping
American Physical Society March Meeting 2021
Justin Koepke, Jeffrey Andrew Ivie, Quinn Campbell, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew David Baczewski, Andrew Mounce, Ezra Bussmann, Shashank Misra
https://www.osti.gov/search/identifier:1855714
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
|
Abstract – 2021
Abstract
|
2021 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
J. Micro/Nanopattern. Mater. Metrol.
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1772029
|
Journal Article – 2021
Journal Article
|
2021 |
Signatures of missing donors in transport through atomically precise P donor chains in Si
APS March Meeting 2021
Mitchell Ian Brickson, Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1854311
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
A chemical model for atomic-precision single-donor incorporation of phosphorus atoms in Si(100)-2x1
American Physical Society March Meeting 2021
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1854314
|
Conference Presentation – 2021
Conference Presentation
|
2021 |
A model for atomic precision p-type doping with diborane on Si(100)-2x1
The Journal of Physcial Chemistry C
Quinn Campbell, Jeffrey Andrew Ivie, Ezra Bussmann, Scott William Schmucker, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1765769
|
Journal Article – 2021
Journal Article
|
2021 |
Triethyl Aluminium - A Precursor for Atomically-Precise Acceptor Dopant Placement?
2020 Virtual MRS Fall Meeting & Exhibit
James H.G. Owen, Quinn Campbell, Robin Santini, Jeffrey Andrew Ivie, Andrew David Baczewski, Scott William Schmucker, Ezra Bussmann, Shashank Misra, John N. Randall
https://www.osti.gov/search/identifier:1831369
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
A multiscale model of the reaction pathway for p-type doping using diborane on Si(100)-2x1
Fall Materials Research Society Meeting
Quinn Campbell, Jeffrey Andrew Ivie, Ezra Bussmann, Scott William Schmucker, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1829238
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
A chemical model for atomic-precision single-donor incorporation of phosphorus atoms in Si(100)-2x1
APS March Meeting 2021
Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Andrew Mounce, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
The impact of donor incorporation statistics on analog quantum simulations of Hubbard physics in near-atomic precision donor arrays
2021 APS March Meeting
Mitchell Ian Brickson, Quinn Campbell, Jeffrey Andrew Ivie, Justin Koepke, Peter Andrew Schultz, Richard P. Muller, Ezra Bussmann, Andrew David Baczewski, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
Stochastic atomistic disorder in atomic-precision doping
American Physical Society March Meeting
Ezra Bussmann, Jeffrey Andrew Ivie, Justin Koepke, Quinn Campbell, Mitchell Ian Brickson, Peter Andrew Schultz, Richard P. Muller, Andrew David Baczewski, Andrew Mounce, Shashank Misra
https://www.osti.gov/search/identifier:1831038
|
Conference Presentation – 2020
Conference Presentation
|
2020 |
A multiscale model of the reaction pathway for p-type doping using diborane on Si(100)-2x1
Fall 2020 MRS Meeting
Quinn Campbell, Jeffrey Andrew Ivie, Ezra Bussmann, Scott William Schmucker, Andrew David Baczewski, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
Development of low thermal budget Si epitaxy and high-k/metal gate stack for atomically precise electronic devices
AVS 67th International Symposium & Exhibition
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Daniel R. Ward, Shashank Misra
|
Abstract – 2020
Abstract
|
2020 |
Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry
Journal of Materials Research
Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra
https://www.osti.gov/search/identifier:1644064
|
Journal Article – 2020
Journal Article
|
2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Proceedings
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1619225
|
Journal Article – 2020
Journal Article
|
2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Advanced Lithography
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1768141
|
Conference Paper – 2020
Conference Paper
|
2020 |