Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices
AVS 67 Virtual Symposium
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra
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Conference Presentation – 2021
Conference Presentation
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2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
https://www.osti.gov/search/identifier:1877517
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Conference Presentation – 2021
Conference Presentation
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2021 |
Path towards a vertical TFET enabled by atomic precision advanced manufacturing
Silicon Nanoelectronics Workshop 2021
Tzu-Ming Lu, Xujiao Gao, Evan Michael Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
J. Micro/Nanopattern. Mater. Metrol.
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1772029
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Journal Article – 2021
Journal Article
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2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition (ALD 2021)
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Towards a deeper understanding of tunneling using atomic precision advanced manufacturing
IEEE Device Research Conference
Tzu-Ming Lu, Xujiao Gao, Evan Michael Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Albert Dario Grine, Ping Lu, Lisa A Tracy, Reza Arghavani, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Forming Direct Boron-Si Bonds on Si(100) using Solution-Phase Surface Chemistry
ACS SPRING 2021 meeting
Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Michael Anderson, David R. Wheeler, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Low Thermal Budget High-k/Metal Surface Gate for buried donor-based devices
Journal of PhysicsMaterials
Evan Michael Anderson, DeAnna Marie Campbell, Leon M. Maurer, Andrew David Baczewski, Michael Thomas Marshall, Tzu-Ming Lu, Ping Lu, Lisa A Tracy, Scott William Schmucker, Daniel R. Ward, Shashank Misra
https://www.osti.gov/search/identifier:1634811
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Journal Article – 2020
Journal Article
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2020 |
Development of low thermal budget Si epitaxy and high-k/metal gate stack for atomically precise electronic devices
AVS 67th International Symposium & Exhibition
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Daniel R. Ward, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Atomic precision advanced manufacturing in silicon
SPIE Advanced Lithography
Shashank Misra, Daniel Robert Ward, Aaron Michael Katzenmeyer, Andrew David Baczewski, Evan Michael Anderson, Scott William Schmucker, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Ping Lu, Xujiao Gao
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Abstract – 2019
Abstract
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2019 |
Characterization of Induced Defects in InAsSb from Proton Irradiation using in-situ Lifetime measurements
Research and applications of photonics in defense
Clark N. Kadlec, Michael Goldflam, Edward S. Bielejec, Emil Kadlec, Preston Thomas Webster, Evan Michael Anderson, Peter Andrew Schultz, Samuel D. Hawkins, John F. Klem, Jin K. Kim, Eric A. Shaner
https://www.osti.gov/search/identifier:1641689
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Conference Paper – 2019
Conference Paper
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2019 |
Surface gated atomically precise single electron Islands
Quantum Computing Program Review
Daniel Robert Ward, Evan Michael Anderson, Leon Maurer, DeAnna Marie Campbell, Michael Thomas Marshall, Lisa A Tracy, Andrew David Baczewski, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1641453
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Conference Paper – 2019
Conference Paper
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2019 |
Characterization of induced defects in InAsSb from proton irradiation using in-situ lifetime measurements
Research and applications of photonics in defense
Clark N. Kadlec, Michael Goldflam, Edward S. Bielejec, Emil A. Kadlec, Preston Thomas Webster, Evan Michael Anderson, Jin K. Kim, Peter Andrew Schultz, John F. Klem, Samuel D. Hawkins, Eric A. Shaner
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Abstract – 2019
Abstract
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2019 |
Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric
77th Device Research Conference
Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2019
Abstract
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2019 |
Microwave Based Lifetime Measurements and Analysis for Detector Materials
IEEE Research and Applications of Photonics In Defense Conference (RAPID)
Eric A. Shaner, Clark N. Kadlec, Michael Goldflam, Edward S. Bielejec, Preston Thomas Webster, Evan Michael Anderson, Samuel D. Hawkins, Ben Olson, Emil Kadlec, Jin K. Kim, Peter Andrew Schultz, Anna Tauke-Pedretti, Wesley Thomas Coon, Torben Ray Fortune, John F. Klem
https://www.osti.gov/search/identifier:1592044
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Conference Paper – 2018
Conference Paper
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2018 |
In-situ Annealing Studies of Radiation Induced Defects in InAs/InAsSb Type-II Superlattices under Ion Irradiation
Hardened Electronics And Radiation Technology
Clark N. Kadlec, Edward S. Bielejec, Michael Goldflam, Emil A. (SNL) Kadlec, Evan Michael Anderson, Eric A. Shaner, Jin K. Kim, Peter Andrew Schultz, John F. Klem, Samuel D. Hawkins
https://www.osti.gov/search/identifier:1575172
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Conference Paper – 2018
Conference Paper
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2018 |