Publications

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New fabrication pathway based on atomic resists

SPIE Advanced Lithography 2022

Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera

Abstract – 2021 Abstract 2021

Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

https://www.osti.gov/search/identifier:1810387

Journal Article – 2021 Journal Article 2021

Supporting Information: Ultradoping Boron on Si(100) via Solvothermal Chemistry

Chemistry - A European Journal

Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra

Journal Article – 2021 Journal Article 2021

Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition

21st International Conference on Atomic Layer Deposition

Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra

https://www.osti.gov/search/identifier:1877517

Conference Presentation – 2021 Conference Presentation 2021

Solvothermal Chemistry to ?Ultradope? Si(100)

American Chemical Society - Spring 2021

Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Mark Anderson, David R. Wheeler, Shashank Misra

https://www.osti.gov/search/identifier:1877798

Conference Presentation – 2021 Conference Presentation 2021

Expanded toolkit for atomic precision advanced manufacturing

Area Selective Deposition 2021

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra

Abstract – 2021 Abstract 2021

Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition

21st International Conference on Atomic Layer Deposition (ALD 2021)

Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra

Abstract – 2021 Abstract 2021

Forming Direct Boron-Si Bonds on Si(100) using Solution-Phase Surface Chemistry

ACS SPRING 2021 meeting

Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Michael Anderson, David R. Wheeler, Shashank Misra

Abstract – 2021 Abstract 2021

Expanded toolkit for atomic precision advanced manufacturing

Asd 2020

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra

Abstract – 2020 Abstract 2020
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