New fabrication pathway based on atomic resists
SPIE Advanced Lithography 2022
Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera
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Abstract – 2021
Abstract
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2021 |
Ultradoping Boron on Si(100) via Solvothermal Chemistry
Chemistry - A European Journal
Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra
https://www.osti.gov/search/identifier:1810387
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Journal Article – 2021
Journal Article
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2021 |
Supporting Information: Ultradoping Boron on Si(100) via Solvothermal Chemistry
Chemistry - A European Journal
Esther Frederick, Quinn Campbell, Igor Kolesnichenko, Luis Fabian Pena, Angelica Benavidez, Evan Mark Anderson, David R. Wheeler, Shashank Misra
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Journal Article – 2021
Journal Article
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2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
https://www.osti.gov/search/identifier:1877517
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Conference Presentation – 2021
Conference Presentation
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2021 |
Solvothermal Chemistry to ?Ultradope? Si(100)
American Chemical Society - Spring 2021
Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Mark Anderson, David R. Wheeler, Shashank Misra
https://www.osti.gov/search/identifier:1877798
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Conference Presentation – 2021
Conference Presentation
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2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition
21st International Conference on Atomic Layer Deposition (ALD 2021)
Scott William Schmucker, Esther Frederick, Quinn Campbell, Jeffrey Andrew Ivie, Evan Michael Anderson, Kevin Dwyer, Andrew David Baczewski, George T. Wang, Robert Butera, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Forming Direct Boron-Si Bonds on Si(100) using Solution-Phase Surface Chemistry
ACS SPRING 2021 meeting
Esther Frederick, Quinn Campbell, Angelica Benavidez, Igor Kolesnichenko, Luis Fabian Pena, Evan Michael Anderson, David R. Wheeler, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Expanded toolkit for atomic precision advanced manufacturing
Asd 2020
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra
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Abstract – 2020
Abstract
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2020 |