Modeling Assisted Room Temperature Operation of Atomic Precision Advanced Manufacturing (APAM) Devices
Sispad 2020
Xujiao Gao, Lisa A Tracy, Evan Mark Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Tzu-Ming Lu, Denis Mamaluy, Scott William Schmucker, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Low Thermal Budget High-k/Metal Surface Gate for buried donor-based devices
Journal of PhysicsMaterials
Evan Michael Anderson, DeAnna Marie Campbell, Leon M. Maurer, Andrew David Baczewski, Michael Thomas Marshall, Tzu-Ming Lu, Ping Lu, Lisa A Tracy, Scott William Schmucker, Daniel R. Ward, Shashank Misra
https://www.osti.gov/search/identifier:1634811
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Journal Article – 2020
Journal Article
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2020 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
AVS Fall Meeting 2020
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Development of low thermal budget Si epitaxy and high-k/metal gate stack for atomically precise electronic devices
AVS 67th International Symposium & Exhibition
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Daniel R. Ward, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry
Journal of Materials Research
Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra
https://www.osti.gov/search/identifier:1644064
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Journal Article – 2020
Journal Article
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2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Proceedings
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1619225
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Journal Article – 2020
Journal Article
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2020 |
Development of a high-k gate stack for atomic-precision advanced manufacturing
APS March Meeting 2020
Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Ward, Shashank Misra
https://www.osti.gov/search/identifier:1768736
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Conference Paper – 2020
Conference Paper
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2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Advanced Lithography
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1768141
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Conference Paper – 2020
Conference Paper
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2020 |
Atomic precision advanced manufacturing for digital electronics
Electronic Device Failure Analysis
Daniel Robert Ward, Scott William Schmucker, Evan Mark Anderson, Ezra Bussmann, Lisa A Tracy, Tzu-Ming Lu, Leon Mauerer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Shashank Misra
https://www.osti.gov/search/identifier:1842839
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Journal Article – 2020
Journal Article
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2020 |
Photolithography of an atomic-layer resist for selective delta-doping of silicon
Electron Ion and Photon Beam Technology and Nanofabrication
Aaron Michael Katzenmeyer, Andrew David Baczewski, Sanja (non-Sandian) Dmitrovic, Gerardo Andrew, Scott William Schmucker, Evan Mark Anderson, Jeffrey Andrew Ivie, Tzu-Ming Lu, David Scrymgeour, DeAnna Marie Campbell, Daniel Robert Ward, George T. Wang, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation
Workshop on Innovative Nanoscale Devices and Systems
Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1643549
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Conference Paper – 2019
Conference Paper
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2019 |
Designer quantum materials
Shashank Misra, Daniel Robert Ward, Andrew David Baczewski, Quinn Campbell, Scott William Schmucker, Andrew Mounce, Lisa A Tracy, Tzu-Ming Lu, Michael Thomas Marshall, DeAnna Marie Campbell
https://www.osti.gov/search/identifier:1592939
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SAND Report – 2019
SAND Report
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2019 |
Low Thermal Budget Gate Stack for Atomic Precision Devices
Fair Deal Gc Eab 2
Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, Tzu-Ming Lu, Andrew David Baczewski, Reza Arghavani, Daniel Robert Ward
https://www.osti.gov/search/identifier:1700542
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Display or Poster (non-conference) – 2019
Display or Poster (non-conference)
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2019 |
Development of a high-k gate stack for atomic-precision advanced manufacturing
APS March Meeting 2020
Tzu-Ming Lu, Evan Mark Anderson, DeAnna Marie Campbell, Michael Thomas Marshall, Ping Lu, Scott William Schmucker, Lisa A Tracy, Mitchell Robison, Reza Arghavani, Leon Maurer, Andrew David Baczewski, Daniel Robert Ward, Shashank Misra
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Abstract – 2019
Abstract
|
2019 |
Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation
Workshop on Innovative Nanoscale Devices and Systems
Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
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Abstract – 2019
Abstract
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2019 |
Atomic precision advanced manufacturing in silicon
SPIE Advanced Lithography
Shashank Misra, Daniel Robert Ward, Aaron Michael Katzenmeyer, Andrew David Baczewski, Evan Michael Anderson, Scott William Schmucker, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Ping Lu, Xujiao Gao
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Abstract – 2019
Abstract
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2019 |
Surface gated atomically precise single electron Islands
Quantum Computing Program Review
Daniel Robert Ward, Evan Michael Anderson, Leon Maurer, DeAnna Marie Campbell, Michael Thomas Marshall, Lisa A Tracy, Andrew David Baczewski, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1641453
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Conference Paper – 2019
Conference Paper
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2019 |
Modeling Transport in Phosphorus δ-Doped Silicon Tunnel Junctions
International Workshop on Computational Nanotechnology
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1640109
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Conference Paper – 2019
Conference Paper
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2019 |
Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric
77th Device Research Conference
Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2019
Abstract
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2019 |
Fabrication and Measurement of Actomically Precise Single Electron Islands
APS March Meeting
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
https://www.osti.gov/search/identifier:1639282
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Conference Paper – 2019
Conference Paper
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2019 |
Modeling transport in phosphorus δ-doped silicon tunnel junctions
APS March Meeting
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1639249
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Conference Paper – 2019
Conference Paper
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2019 |
Modeling Transport in Phosphorus δ-doped Silicon Tunnel Junctions
International Workshop on Computational Nanotechnology
Leon Maurer, Michael Thomas Marshall, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Daniel Robert Ward, Shashank Misra
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Abstract – 2019
Abstract
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2019 |
Fabrication and Measurement of Atomically Precise Single Electron Islands
American Physical Society March Meet 2019
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
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Abstract – 2018
Abstract
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2018 |
Fabrication and Measurement of Gated, Atomically-Precise Tunnel-Junctions and Single Electron Islands
Materials Research Society Spring Meeting
Daniel Robert Ward, DeAnna Marie Campbell, Michael Thomas Marshall, Tzu-Ming Lu, Lisa A Tracy, Leon Maurer, Andrew David Baczewski, Shashank Misra
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Abstract – 2018
Abstract
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2018 |
Modeling the electronic structure of donor island arrays fabricated using STM lithography
APS March Meeting 2019
Andrew David Baczewski, Mitchell Ian Brickson, Leon Maurer, DeAnna Marie Campbell, Tzu-Ming Lu, Michael Thomas Marshall, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
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Abstract – 2018
Abstract
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2018 |