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Materials Issues for Micromachines Development - ASCI Program Plan

Huei Eliot Fang, Corbett C. Battaile, Gilbert L. Benavides, Mark Travis Ensz, Thomas E. Buchheit, David A. LaVan, Er-Ping Chen, Todd R. Christenson, Maarten P De Boer, Samuel L. Miller, Michael T. Dugger, Somuri V. Prasad, Earl David Reedy, Aidan P. Thompson, Chungnin C. Wong, Pin Yang, Corbett C. Battaile

https://www.osti.gov/search/identifier:759431

Report – 2000 Report 2000
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