Publications

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Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices

AVS 67 Virtual Symposium

Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra

Conference Presentation – 2021 Conference Presentation 2021

FAIR DEAL Grand Challenge Overview

Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young

https://www.osti.gov/search/identifier:1854733

SAND Report – 2021 SAND Report 2021

New fabrication pathway based on atomic resists

SPIE Advanced Lithography 2022

Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera

Abstract – 2021 Abstract 2021

Expanded toolkit for atomic precision advanced manufacturing

Area Selective Deposition 2021

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra

Abstract – 2021 Abstract 2021

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

J. Micro/Nanopattern. Mater. Metrol.

Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra

https://www.osti.gov/search/identifier:1772029

Journal Article – 2021 Journal Article 2021

Room Temperature Operation of Donor-Based Atomically Precise Devices

American Physical Society March Meeting 2021

Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra

https://www.osti.gov/search/identifier:1854693

Conference Presentation – 2021 Conference Presentation 2021

Room Temperature Operation of Donor-Based Atomically Precise Devices

Sandia Postdoctoral Showcase 2020

Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra

https://www.osti.gov/search/identifier:1833491

Conference Presentation – 2020 Conference Presentation 2020

Room Temperature Operation of Donor-Based Atomically Precise Devices

APS March Meeting 2021

Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra

Abstract – 2020 Abstract 2020

Room Temperature Operation of Donor-Based Atomically Precise Devices

AVS Fall Meeting 2020

Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra

Abstract – 2020 Abstract 2020

Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry

Journal of Materials Research

Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra

https://www.osti.gov/search/identifier:1644064

Journal Article – 2020 Journal Article 2020

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

SPIE Proceedings

Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra

https://www.osti.gov/search/identifier:1619225

Journal Article – 2020 Journal Article 2020

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

SPIE Advanced Lithography

Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra

https://www.osti.gov/search/identifier:1768141

Conference Paper – 2020 Conference Paper 2020

Expanded toolkit for atomic precision advanced manufacturing

Asd 2020

Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra

Abstract – 2020 Abstract 2020

Photolithography of an atomic-layer resist for selective delta-doping of silicon

Electron Ion and Photon Beam Technology and Nanofabrication

Aaron Michael Katzenmeyer, Andrew David Baczewski, Sanja (non-Sandian) Dmitrovic, Gerardo Andrew, Scott William Schmucker, Evan Mark Anderson, Jeffrey Andrew Ivie, Tzu-Ming Lu, David Scrymgeour, DeAnna Marie Campbell, Daniel Robert Ward, George T. Wang, Shashank Misra

Abstract – 2020 Abstract 2020

Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation

Workshop on Innovative Nanoscale Devices and Systems

Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra

https://www.osti.gov/search/identifier:1643549

Conference Paper – 2019 Conference Paper 2019

APAM Photonics Silicon: optics beyond the telecom region

Fair Deal Gc Eab 2

Aaron Michael Katzenmeyer, Michael Goldflam, Thomas Edwin Beechem, Amun Jarzembski, Andrew David Baczewski, Steve Michael Young

https://www.osti.gov/search/identifier:1700541

Display or Poster (non-conference) – 2019 Display or Poster (non-conference) 2019

Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation

Workshop on Innovative Nanoscale Devices and Systems

Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra

Abstract – 2019 Abstract 2019

Atomic precision advanced manufacturing in silicon

SPIE Advanced Lithography

Shashank Misra, Daniel Robert Ward, Aaron Michael Katzenmeyer, Andrew David Baczewski, Evan Michael Anderson, Scott William Schmucker, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Ping Lu, Xujiao Gao

Abstract – 2019 Abstract 2019

Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric

77th Device Research Conference

Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra

Abstract – 2019 Abstract 2019
Document Title Type Year