Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices
AVS 67 Virtual Symposium
Evan Michael Anderson, DeAnna Marie Campbell, Jeffrey Andrew Ivie, Scott William Schmucker, Ping Lu, Xujiao Gao, Lisa A Tracy, Reza Arghavani, Ezra Bussmann, Andrew David Baczewski, Tzu-Ming Lu, Aaron Michael Katzenmeyer, David Scrymgeour, Shashank Misra
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Conference Presentation – 2021
Conference Presentation
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2021 |
FAIR DEAL Grand Challenge Overview
Christopher Richard Allemang, Evan Mark Anderson, Andrew David Baczewski, Ezra Bussmann, Robert Butera, DeAnna Marie Campbell, Quinn Campbell, Stephen M Carr, Esther Frederick, Phillip Gamache, Xujiao Gao, Albert Dario Grine, Mathew Mark Gunter, Connor Halsey, Jeffrey Andrew Ivie, Aaron Michael Katzenmeyer, Andrew Jay Leenheer, William Lepkowski, Tzu-Ming Lu, Denis Mamaluy, Juan Pedro Mendez Granado, Luis Fabian Pena, Scott William Schmucker, David Scrymgeour, Lisa A Tracy, George T. Wang, Dan Ward, Steve Michael Young
https://www.osti.gov/search/identifier:1854733
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SAND Report – 2021
SAND Report
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2021 |
New fabrication pathway based on atomic resists
SPIE Advanced Lithography 2022
Shashank Misra, DeAnna Marie Campbell, Connor Halsey, Andrew Jay Leenheer, David Scrymgeour, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, Quinn Campbell, Juan Pedro Mendez Granado, William Lepkowski, Xujiao Gao, Esther Frederick, David R. Wheeler, Aaron Michael Katzenmeyer, Andrew David Baczewski, Bob Butera
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Abstract – 2021
Abstract
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2021 |
Expanded toolkit for atomic precision advanced manufacturing
Area Selective Deposition 2021
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Justin Koepke, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Ezra Bussmann, Scott William Schmucker, Evan Michael Anderson, Luis Fabian Pena, S. Baek, James Williams, D. Silva-Quinones, T. Parke, A.V. Teplyakov, P. Raffaelle, A.A. Shestopalov, J. Ballard, George T. Wang, Shashank Misra
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Abstract – 2021
Abstract
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2021 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
J. Micro/Nanopattern. Mater. Metrol.
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Michael Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, David Scrymgeour, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1772029
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Journal Article – 2021
Journal Article
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2021 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
American Physical Society March Meeting 2021
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1854693
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Conference Presentation – 2021
Conference Presentation
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2021 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
Sandia Postdoctoral Showcase 2020
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
https://www.osti.gov/search/identifier:1833491
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Conference Presentation – 2020
Conference Presentation
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2020 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
APS March Meeting 2021
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Room Temperature Operation of Donor-Based Atomically Precise Devices
AVS Fall Meeting 2020
Jeffrey Andrew Ivie, Lisa A Tracy, Juan Pedro Mendez Granado, Xujiao Gao, Evan Mark Anderson, Scott William Schmucker, DeAnna Marie Campbell, David Scrymgeour, Aaron Michael Katzenmeyer, Daniel Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Assessing atomically-thin delta-doping of silicon using mid-IR ellipsometry
Journal of Materials Research
Aaron Michael Katzenmeyer, Ting S. Luk, Ezra Bussmann, Steve Michael Young, Evan Mark Anderson, Michael Thomas Marshall, James A. Ohlhausen, Paul G. Kotula, Ping Lu, DeAnna Marie Campbell, Tzu-Ming Lu, Peter Liu, Dan Ward, Shashank Misra
https://www.osti.gov/search/identifier:1644064
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Journal Article – 2020
Journal Article
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2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Proceedings
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1619225
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Journal Article – 2020
Journal Article
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2020 |
Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques
SPIE Advanced Lithography
Aaron Michael Katzenmeyer, Sanja Dmitrovic, Andrew David Baczewski, Ezra Bussmann, Tzu-Ming Lu, Evan Mark Anderson, Scott William Schmucker, Jeffrey Andrew Ivie, DeAnna Marie Campbell, Daniel Ward, George T. Wang, Shashank Misra
https://www.osti.gov/search/identifier:1768141
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Conference Paper – 2020
Conference Paper
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2020 |
Expanded toolkit for atomic precision advanced manufacturing
Asd 2020
Esther Frederick, Quinn Campbell, Kevin Dwyer, Jeffrey Andrew Ivie, Andrew David Baczewski, Robert Butera, James Owen, Aaron Michael Katzenmeyer, Michael Thomas Marshall, Ezra Bussmann, Scott William Schmucker, Evan Mark Anderson, Daniel Robert Ward, George T. Wang, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Photolithography of an atomic-layer resist for selective delta-doping of silicon
Electron Ion and Photon Beam Technology and Nanofabrication
Aaron Michael Katzenmeyer, Andrew David Baczewski, Sanja (non-Sandian) Dmitrovic, Gerardo Andrew, Scott William Schmucker, Evan Mark Anderson, Jeffrey Andrew Ivie, Tzu-Ming Lu, David Scrymgeour, DeAnna Marie Campbell, Daniel Robert Ward, George T. Wang, Shashank Misra
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Abstract – 2020
Abstract
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2020 |
Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation
Workshop on Innovative Nanoscale Devices and Systems
Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
https://www.osti.gov/search/identifier:1643549
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Conference Paper – 2019
Conference Paper
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2019 |
APAM Photonics Silicon: optics beyond the telecom region
Fair Deal Gc Eab 2
Aaron Michael Katzenmeyer, Michael Goldflam, Thomas Edwin Beechem, Amun Jarzembski, Andrew David Baczewski, Steve Michael Young
https://www.osti.gov/search/identifier:1700541
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Display or Poster (non-conference) – 2019
Display or Poster (non-conference)
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2019 |
Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation
Workshop on Innovative Nanoscale Devices and Systems
Xujiao Gao, Denis Mamaluy, Evan Mark Anderson, DeAnna Marie Campbell, Albert Dario Grine, Aaron Michael Katzenmeyer, Tzu-Ming Lu, Scott William Schmucker, Lisa A Tracy, Daniel Robert Ward, Shashank Misra
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Abstract – 2019
Abstract
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2019 |
Atomic precision advanced manufacturing in silicon
SPIE Advanced Lithography
Shashank Misra, Daniel Robert Ward, Aaron Michael Katzenmeyer, Andrew David Baczewski, Evan Michael Anderson, Scott William Schmucker, DeAnna Marie Campbell, Lisa A Tracy, Tzu-Ming Lu, Ping Lu, Xujiao Gao
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Abstract – 2019
Abstract
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2019 |
Top-gated atomic precision phosphorous doped silicon single electron transistor with low thermal budget gate dielectric
77th Device Research Conference
Evan Michael Anderson, Leon Maurer, Lisa A Tracy, Sean Smith, Ping Lu, Aaron Michael Katzenmeyer, Andrew David Baczewski, DeAnna Marie Campbell, Michael Thomas Marshall, Daniel Robert Ward, Tzu-Ming Lu, Shashank Misra
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Abstract – 2019
Abstract
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2019 |