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[Sandia Lab News]

Vol. 53, No. 21        October 19, 2001
[Sandia National Laboratories]

Albuquerque, New Mexico 87185-0165    ||   Livermore, California 94550-0969
Tonopah, Nevada; Nevada Test Site; Amarillo, Texas

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EUVL CRADA is extended to 2005 < Sandia decon foam

EUVL CRADA extended to 2005

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By Nancy Garcia

DOE's largest ever cooperative research and development agreement -- a partnership to develop extreme ultraviolet lithography (EUVL) at Sandia into the next-generation technique for making computer chips (Lab News, April 6 and April 20, 2001) -- has been extended to 2005, and authorizes up to an additional $65 million in support to the $250 million already committed to the project.

The existing agreement, set to expire in March 2002, was extended to work on three current challenges, according to Chuck Gwyn, who heads the industrial consortium funding the project.

First, he said, the researchers will continue to improve the technology to increase the throughput rate and to increase the efficiency of the tools, thus decreasing the so-called "cost of ownership." Second, the continued development and use of the initial full-scale (or "alpha") tool assembled at Sandia/California will become a bridge for consortium members to develop and test their mask, resist, and early process technologies prior to the availability of pre-commercial "beta" tools. Finally, the extension will support the continuing transfer of the technology to industry to help establish the infrastructure for the technology over the next three years.

Funding comes from the EUVL Limited Liability Company (LLC), composed of Intel, Motorola, Advanced Micro Devices, Micron Technology, Infineon, and IBM. Sandia, Lawrence Livermore, and Lawrence Berkeley have joined their research efforts into a DOE Virtual National Laboratory (VNL) for the project.

In April, the partners announced completion of the first full-scale prototype machine (called the Engineering Test Stand) for inscribing transistors onto computer chips using extreme ultraviolet light. The breakthrough is expected to lead to microprocessors tens of times faster than today's most powerful chips and memory chips with similar increases in storage capacity.

EUVL was developed because the current chip-printing technology is expected to reach its physical limits in the next five years.

"The CRADA extension is a measure of the extent to which the semiconductor industry is committed to making EUVL successful," said Jim Glaze, executive director of the Virtual National Laboratory.

"While the cost to develop EUVL is high, the payoff to industry and the nation in terms of the computing power that EUVL will enable is potentially immense."

"EUVL has reached the anticipated transition phase in which the VNL increasingly will engage the tool suppliers to help them commercialize the technology. The CRADA extension provides continued support of the technology foundations to help make that happen," said Glenn Kubiak (8732), Sandia EUVL program manager.

The initial three-year CRADA between the EUVL LLC and the Virtual National Laboratory began in 1997, with an extension to 2002. -- Nancy Garcia

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Sandia decontamination formulation used in Colorado emergency response, foam sales hit the roof.<

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By John German

A formulation developed at Sandia to decontaminate rooms and equipment contaminated with chemical and biological agents (Lab News, March 12, 1999) was used for the first time in a response to a suspected biological attack late last week.

Englewood (Colo.) Fire Department officials used a Sandia licensee's product, Modec Decon Formula (MDF) provided by Modec, Inc. of Denver, to decontaminate equipment following an Oct. 12 response at a Denver-area post office. Authorities later determined that white powder leaking from an international package did not contain anthrax.

Sales of the foam have hit the roof in the last few weeks, report the two companies that have licensed from Sandia rights to sell the formulation.

Peter Beucher, CEO of EnviroFoam (Huntsville, Ala.), says the company is getting hundreds of calls a day for its EasyDECON formulation and has shipped quantities to federal, state, and local emergency response authorities, including the Army and National Guard. EnviroFoam employees are working day and night to build an inventory of the decontamination solution.

Brian Kalamanka, Modec CEO, says interest in MDF is way up. The company has taken orders of about $1 million since Sept. 11. Among those being provided the formulation are the Navy and FBI. Modec is scrambling to keep up with demand, he says.

Both companies are seeking FDA approval to distribute the formulation in personal quantities for topical use.

Watch for details about other deployments of the Sandia-developed formulation in future issues of the Lab News. -- John German

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Last modified: Oct. 19, 2001

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