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We strive to provide innovative solutions
in micro sized power sources, sensors, and actuators that
enable development of microsystems that have the ability
to sense their surroundings and communicate decisions
based on the data gathered.
Our goal is to incorporate all of this capability into
very small, low power systems.
We pursue both near-term and lower-risk engineering
solutions utilizing available products, as well as the
development of potentially disruptive technologies.
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Micro-Batteries
The
Microsystem Revolution requires advances in micro-battery
technologies such as the planar silicon micro-battery
which can be integrated onto a chip to power sensor
systems.
Planar Silicon Micro-battery
The top micrograph shows bulk silicon micromachined
components of the Planar Micro-Battery depicted schematically
in the lower drawing. Such batteries can be integrated
onto a chip to power sensor systems.
Series Photovoltaics
Twenty five mesa-isolated, series connected, GaAs solar
cells can be illuminated with laser light to provide
high voltage on-chip power sources. More cells are strung
together to generate higher voltages.

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BioMicroFuelCell™
The goal of this large multidisciplinary project is
to develop a long-lived miniature fuel cell system that
can harvest its own fuel (glucose for example) from
a plant or animal and provide enough power for remote
sensing applications.

The conceptual drawing depicts a fuel cell stack and
acoustic sensor platform integrated with a hollow screw
that can tap into tree sap to provide fuel.
Micro Energetic Materials
Micro patterned explosive materials are being investigated
as on-chip sources of gas for actuation, locomotion,
and acoustic signal generation.


Micro patterned explosive materials are shown above.
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