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Microsensors and Sensor Microsystems - Fiber Optic Chemical Sensor

Overview

Micromirror chemical sensors are constructed by coating the end of an optical fiber waveguide with a chemically-sensitive film that changes reflectivity upon exposure to a chemical of interest. This device enables remote monitoring of chemical concentration, operates in electrically-noisy environments, and does not constitute an ignition hazard. Applications include monitoring hydrogen levels in transformer oil to indicate breakdown and detecting oxidizing compounds in the Martian soil and atmosphere.

Micromirror Chemical Sensor

optical fiber

 

 

  • Chemically-sensitive film deposited on end of optical fiber
  • Gas/vapor absorption by film changes optical reflectivity
  • Enables remote chemical detection

Applications

  • Transformer breakdown (Harley)
  • Planetary chemical analysis (JPL)
  • Semiconductor tool diagnostics (Sematech)

 

breakdown

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