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Chemical Microsensors

Microelectronics fabrication
  • Component design and integration
  • CMOS and compound semiconductor manufacturing
  • Lithography, metallization, dep-etch
Laboratory test chambers
  • Environmental chambers with flexible manifolds to reproduce relevant gas matrices
  • Fully instrumented vacuum and high-pressure flow cells (2000 psia)
Recent projects
  • Monitoring H2 in an industrial cogeneration facility (reforming)
  • Monitoring CO and sulfur species in PEM fuel cell
  • Monitoring trace H2 and C2H2 in power transformer

Contact:
Anthony McDaniel
amcdani@sandia.gov
(925) 294-1440