Chemical Microsensors
Microelectronics fabrication
- Component design and integration
- CMOS and compound semiconductor manufacturing
- Lithography, metallization, dep-etch
Laboratory test chambers
- Environmental chambers with flexible manifolds to reproduce relevant gas matrices
- Fully instrumented vacuum and high-pressure flow cells (2000 psia)
Recent projects
- Monitoring H2 in an industrial cogeneration facility (reforming)
- Monitoring CO and sulfur species in PEM fuel cell
- Monitoring trace H2 and C2H2 in power transformer
Contact:
Anthony McDaniel
amcdani@sandia.gov
(925) 294-1440
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